Abstract:
PROBLEM TO BE SOLVED: To provide a grinding method of an elastic roller capable of keeping high swinging accuracy and a uniform outer diameter and grinding an elastic layer surface with good manufacturing efficiency when grinding the surface having a region with no adhesive at an edge thereof. SOLUTION: The grinding method is for grinding the elastic roller having an elastic layer 1 via an adhesive on an outer periphery of a shaft 2 and having a region with no adhesive at one of roller longitudinal ends of the elastic layer. The method includes a step of grinding the outer peripheral surface of the elastic layer by a rotary grinding wheel 10 moving along the roller longitudinal direction. The grinding with the rotary grinding wheel is started from an end opposite to the end with the region with no adhesive in the roller longitudinal direction. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a glass substrate for semiconductor that has a non-through hole, a groove, or a step having mirror-finished bottom and side faces for which dimensions such as size, bottom thickness, and degree of parallelization are accurately and stably controlled, that is resistant to cracking or chipping at the non-through hole, groove, or step, and that has high strength and cleanness, and a method for producing the glass substrate.SOLUTION: A glass substrate for a semiconductor has at least on one of its faces a non-through hole, a groove or a level difference; and a first chamfer is provided between a side face of the non-through hole, groove or level difference and the face having the non-through hole, groove or level difference. The side and bottom faces of the non-through hole, groove or level difference are mirror faces and the first chamfer also is a mirror face. The present invention provides a synthetic quartz glass substrate for semiconductor that has a non-through hole, a groove, or a step which has mirror-finished bottom and side faces and which have high dimensional accuracy, that is resistant to cracking or chipping at the non-through hole, groove, or step, and that has high strength and cleanness. The substracte is applicable to a synthetic quartz glass substrate for a photomask substrate or a molded substrate for nano-imprinting that is used in optical lithography, which is an important process in IC manufacturing.
Abstract:
PROBLEM TO BE SOLVED: To provide a grinding method of a honeycomb structure for forming a honeycomb structure which has a ring-shaped protrusion part, which is formed in a tapered shape, on an outer circumference in a short time by improving a profile of a processed surface.SOLUTION: In a grinding method of a honeycomb structure 41, a grinding member 1 having an outer circumference surface 4, a first grinder tapered surface 5, and a second grinder tapered surface 6, grinds a honeycomb segment joined body 11 rotating around a center axis while rotating the grinding member around the center axis. A first ground region 21, a second ground region 23, a center ground surface 33, a first tapered surface 31, and a second tapered surface 32 are formed by the respective surfaces of the grinding member 1 to produce the honeycomb structure 41 having a cylindrical honeycomb base material 42, and a ring-shaped protrusion part 43 which surrounds the outer periphery of the honeycomb base material 42, protrudes in a flange shape from an outer circumference of the honeycomb base material 42 to an outer side, and includes the first tapered surface 31, the second tapered surface 32, and the center ground surface 33.