Abstract:
PROBLEM TO BE SOLVED: To provide a nanoimprinting master template and a method for manufacturing the template.SOLUTION: A method for manufacturing a nanoimprinting master template uses a metallic etching stop layer for two etching steps. A layer of silicon dioxide is deposited on the etching stop layer, and a first resist pattern of either concentric rings or radial spokes is formed on the silicon dioxide layer. The exposed silicon dioxide layer is etched down to the etching stop layer and the resist is removed to expose a pattern of silicon dioxide rings or spokes on the etching stop layer. A second resist pattern of rings (if spokes were the first pattern) or spokes (if rings were the first pattern) is formed over the silicon dioxide rings or spokes and the etching stop layer. The exposed silicon dioxide is etched down to the etching stop layer and the resist is removed to expose a pattern of silicon dioxide pillars on the etching stop layer.
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a sheet joint body for manufacturing a sheet joint body improved in joint quality. SOLUTION: The method of manufacturing the sheet joint body for manufacturing the sheet joint body with a resin sheet and a metal film welded and joined by laminating the resin sheet on the metal film to form a laminate and irradiating the laminate with laser beams from the back face side of the resin sheet, is characterized in that a support material with elasticity to have the amount of compressive strain of 0.1-20 μm at 5 MPa pressurization is allowed to abut on the back face side of the metal film and that irradiation of the laser beams is carried out in a state of pressurizing the resin sheet toward the metal film at a pressure of 1-100 kgf/cm 2 . COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
An object of the present invention is to provide a sheet joined body having a high joint strength while limiting an amount of adhesive to be used. A method of producing a sheet joined body includes: abutting ends of sheet members (10,20) against each other, coating an abutted part with a joining member (30) containing a thermoplastic resin, and irradiating a part coated with the joining member, with laser light (R) to join the sheet members with the joining member by welding, thereby joining the ends with each other to manufacture a sheet joined body.
Abstract:
PROBLEM TO BE SOLVED: To provide a reliable laser bonding method for bonding a resin and a metal, configured to prevent thermal decomposition of resin without influence of light absorptivity of metal.SOLUTION: A laser bonding method is used for a pressing material made of metal or ceramics. Resin and metal is pressed from the metal side with the pressing material. The pressing material is laser-irradiated. Heat of the laser beam is thermally transferred via the metal from the pressing material to the resin for join them. High-strength, bubble-less, and highly reliable laser bonding can be achieved between the resin and the metal in a short tact.