摘要:
A cleaning composition with a corrosion inhibitor system and an active halogen-based bleaching system and aqueous solution is described for inhibiting corrosion of metal surfaces to which the composition is applied, especially when the cleaning composition is not rinsed from the treated metal surface prior to drying of the composition on the metal surface. The corrosion inhibitor is at least an alkyl phosphonate compound, wherein the alkyl group has 6 or more carbon atoms, and salts thereof. The bleaching system includes one or more sources of hypohalous acid or hypohalite ion, such as a stabilized hypochlorite solution, in particular a mixture of N-chlorosulfamate salts.
摘要:
PROBLEM TO BE SOLVED: To prevent the pattern collapse in a cleaning step of a metal-based wafer with concave and convex patterns formed on a surface thereof.SOLUTION: A chemical solution comprises a water-repellent protection-film-forming agent expressed by the following general formula [1]. The chemical solution is used in a surface treatment before a drying step after a cleaning step of a metal-based wafer. (In the formula [1], Ris a monovalent hydrocarbon group with 1-18 carbon atoms in which a fluorine element may be partially or totally substituted for a hydrogen element; Ris a monovalent organic group including a hydrocarbon group with 1-18 carbon atoms in which a fluorine element may be partially or totally substituted for a hydrogen element in a mutual independent manner; and "a" is an integer of 0-2.)