摘要:
The present invention relates to a process for preparing polyol alkyl ethers by reacting compounds comprising at least three hydroxyl functionalities with olefins in the presence of acidic catalysts at temperatures of from 20 to 250° C. and pressures of from 0.5 to 10 bar, wherein the olefins correspond to the general formula (I) in which R1 is hydrogen and R2 is a linear or branched carbon radical having from 7 to 28 carbon atoms, or R1 and R2 are each linear or branched carbon radicals having from 1 to 27 carbon atoms, the sum of the carbon number of R1 and R2 being at most 28, to polyol alkyl ethers derived from compounds having at least three hydroxyl functionalities, not more than all but one hydroxyl functionality being replaced by a moiety of the general formula (VIII) to the use of these polyol alkyl ethers as surfactants and to laundry detergents and cleaning compositions comprising these polyol alkyl ethers.
摘要:
PROBLEM TO BE SOLVED: To provide a cleaning liquid of an integrated circuit device formed on a wafer which shall be cleaned, and a cleaning method using the cleaning liquid. SOLUTION: The cleaning liquid cleans an integrated circuit device which comprises a low cellularity detergent, metal corrosion inhibitor, acid pH modifier or alkaline pH modifier, and water. When a metal substance like tungsten is introduced into a manufacturing process of gate line, the cleaning liquid relating to this invention can be employed in a cleaning process for removing particles which is executed after forming gate line pattern thereby. COPYRIGHT: (C)2005,JPO&NCIPI