-
公开(公告)号：JP2015008031A
公开(公告)日：2015-01-15
申请号：JP2014129132
申请日：2014-06-24
发明人： CHENG YUHANG , ZHAO TONG , MICHAEL C KAUTZKY , ED F REJDA , KURT W WIERMAN , SCOTT FRANZEN , ANDREW J BOYNE
CPC分类号： G11B5/314 , B05D1/36 , G11B5/3106 , G11B5/3163 , G11B5/4866 , G11B5/6088 , G11B5/84 , G11B5/85 , G11B5/851 , G11B5/858 , G11B7/1387 , G11B2005/0021
摘要： 【課題】近接場トランスデューサ(NFT)の変形、凹みを防ぐ装置を提供する。【解決手段】NFTはディスク310とペグ306とを有し、ペグは5つの表面を有し、ペグの少なくとも1つに位置決めされる接着層を含み、接着層は、レニウム、オスミウム、イリジウム、プラチナ、ルテニウム、テクネチウム、ロジウム、パラジウム、ベリリウム、アルミニウム、マンガン、インジウム、ホウ素、およびこれらの組み合わせ、酸化ベリリウム、酸化シリコン、酸化鉄、酸化ジルコニウム、酸化マンガン、酸化カドミウム、酸化マグネシウム、酸化ハフニウム、およびこれらの組み合わせ、炭化タンタル、炭化ウラニウム、炭化ハフニウム、炭化ジルコニウム、炭化スカンジウム、炭化マンガン、炭化鉄、炭化ニオブ、炭化テクネチウム、炭化レニウム、およびこれらの組み合わせ、ならびに窒化クロム、窒化ホウ素、およびこれらの組み合わせのうち1つ以上を含む。【選択図】図3A
摘要翻译： 要解决的问题：提供一种防止近场换能器（NFT）变形和衰退的装置。解决方案：一种装置包括：具有盘310和钉306的NFT，该钉具有五个表面; 以及位于所述钉的至少一个表面上的粘合层，所述粘合层包括以下中的一种或多种：铼，锇，铱，铂，钌，锝，铑，钯，铍，铝，锰，铟 ，硼及其组合，氧化铍，氧化硅，氧化铁，氧化锆，氧化锰，氧化镉，氧化镁，氧化铪及其组合，碳化钽，碳化铌，碳化铪，碳化锆，碳化钪， 碳化锰，碳化铌，碳化铌，碳化铌，碳化铼及其组合，以及氮化铬，氮化硼及其组合。
-
公开(公告)号：JP5566669B2
公开(公告)日：2014-08-06
申请号：JP2009263856
申请日：2009-11-19
申请人： 昭和電工株式会社
发明人： 諭 上野
CPC分类号： G11B5/85 , C23C14/50 , C23C14/568 , C23C16/4401 , C23C16/4412 , C23C16/54 , H01L21/67017 , H01L21/67069 , H01L21/67748 , H01L21/67751
-
-
-
公开(公告)号：JP4776872B2
公开(公告)日：2011-09-21
申请号：JP2003019678
申请日：2003-01-29
发明人： アールトネン ティッタ , アレン ペトラ , レスケレ マルック , リタラ ミッコ
IPC分类号： C23C16/18 , C23C16/44 , C23C16/455 , G11B5/66 , G11B5/85 , H01F10/32 , H01L21/02 , H01L21/285 , H01L21/316 , H01L21/768 , H01L21/8242 , H01L21/8246 , H01L27/105 , H01L27/108
CPC分类号： H01L21/7687 , B82Y25/00 , C23C16/18 , C23C16/45553 , G11B5/66 , G11B5/85 , H01F10/325 , H01L21/28562 , H01L21/3162 , H01L28/60
摘要： The invention relates generally to processes for producing electrically conductive noble metal thin films on a substrate by atomic layer deposition. According to one embodiment of the invention a substrate with a surface is provided in a reaction chamber and a vaporised precursor of a noble metal is pulsed into the reaction chamber. By contacting the vaporised precursor with the surface of the substrate, no more than about a molecular layer of the metal precursor is formed on the substrate. In a next step, a pulse of molecular oxygen-containing gas is provided in the reaction chamber, where the oxygen reacts with the precursor on the substrate. Thus, high-quality metal thin films can be deposited by utilising reactions between the metal precursor and oxygen. In one embodiment, electrically conductive layers are deposited in structures that have high aspect ratio vias and trenches, local high elevation areas or other similar surface structures that make the surface rough.
-
6.发明专利In-line film forming apparatus, method for producing magnetic recording medium, and gate valve 审中-公开在线成膜装置，生产磁记录介质的方法和门阀
公开(公告)号：JP2011127190A
公开(公告)日：2011-06-30
申请号：JP2009287679
申请日：2009-12-18
申请人： Showa Denko Kk , 昭和電工株式会社
发明人： TSUNODA YUKITAKA , UENO SATOSHI
CPC分类号： G11B5/85 , C23C14/34 , C23C14/3464 , C23C14/50 , C23C14/56 , C23C14/568 , F16K3/184 , F16K51/02 , H01L21/67126
摘要： PROBLEM TO BE SOLVED: To provide an in-line film forming apparatus capable of suppressing generation of vibrations accompanying an open/close operation of a gate valve and opening and closing the gate valve at a high speed.
SOLUTION: Just before a piston 114 in a cylinder 115 reaches an end in one direction, a second valve 117a is fully closed to discharge air through only a second flow rate control valve 117b; and just before the piston 114 in the cylinder 115 reaches an end in the other direction, a first valve 116a is fully closed to discharge air through only a first flow rate control valve 116b. Thereby, shocks due to the contact between the end of the cylinder 115 and the piston 114 are reduced, and generation of vibrations can be suppressed.
COPYRIGHT: (C)2011,JPO&INPIT摘要翻译： 要解决的问题：提供一种能够抑制伴随闸阀的打开/关闭操作产生的振动并且高速打开和关闭闸阀的在线成膜设备。 解决方案：在气缸115中的活塞114在一个方向上达到端部之前，第二阀117a完全关闭，仅通过第二流量控制阀117b排出空气; 并且在气缸115中的活塞114在另一方向上达到端部之前，第一阀116a完全关闭，仅通过第一流量控制阀116b排出空气。 因此，由于气缸115的端部和活塞114之间的接触引起的冲击减小，并且可以抑制振动的产生。 版权所有（C）2011，JPO＆INPIT
-
公开(公告)号：JP4689324B2
公开(公告)日：2011-05-25
申请号：JP2005107667
申请日：2005-04-04
申请人： 東京エレクトロン株式会社
IPC分类号： H01L21/31
CPC分类号： C23C16/401 , C23C16/45512 , G11B5/85 , G11B7/266 , H01L21/02148 , H01L21/02214 , H01L21/02271 , H01L21/31604
-
公开(公告)号：JP2011081903A
公开(公告)日：2011-04-21
申请号：JP2010276513
申请日：2010-12-13
发明人： WATANABE SADAYUKI , SAKAI YASUSHI
CPC分类号： G11B5/7325 , G11B5/65 , G11B5/85
摘要： PROBLEM TO BE SOLVED: To provide a perpendicular medium in which an isolation structure of an underlayer is formed using a simple method as in a conventional manufacturing process for a medium of continuous films, the method suppressing dispersion of alignment and reducing magnetic cluster size in a magnetic recording layer, while achieving high recording density by reducing the thickness of the underlayer. SOLUTION: The perpendicular magnetic recording medium includes at least an underlayer and a magnetic recording layer sequentially laminated on a nonmagnetic substrate. The underlayer consists of crystal grains and an amorphous grain boundary, and the crystal grain has a shape holding a relation (an area of a bottom region at an initial stage of growth)>(an area of a top region). COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译： 要解决的问题：为了提供一种垂直介质，其中使用与常规的连续膜介质的制造方法中的简单方法形成底层的隔离结构，抑制取向分散和减小磁簇的方法 通过减小底层的厚度来实现高记录密度。 解决方案：垂直磁记录介质至少包括在非磁性衬底上顺序层压的底层和磁记录层。 底层由晶粒和无定形晶界组成，晶粒具有保持关系（生长初始阶段的底部区域的面积）>（顶部区域的面积）的形状。 版权所有（C）2011，JPO＆INPIT
-
-
10.发明专利Method for manufacturing magnetic recording medium and connecting device used for manufacturing magnetic recording medium 审中-公开用于制造磁记录介质的方法和连接用于制造磁记录介质的装置
公开(公告)号：JP2009181605A
公开(公告)日：2009-08-13
申请号：JP2008017476
申请日：2008-01-29
发明人： TAKAYA SHIGEAKI
CPC分类号： G11B5/85 , C23C14/568
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic recording medium, which is difficult to accomplish with a single vacuum film-formation device having an insufficient number of chambers, by connecting vacuum film-formation devices.
SOLUTION: In the method for manufacturing the disk-shaped magnetic recording medium, a film-formation device is used which is formed by connecting a plurality of vacuum film-formation devices 101, 201 by a connecting device 301 provided with a disk transport system 302.
COPYRIGHT: (C)2009,JPO&INPIT摘要翻译： 要解决的问题：通过连接真空成膜装置，提供一种制造磁记录介质的方法，该方法难以通过具有不足室数的单个真空成膜装置来实现。 解决方案：在制造盘形磁记录介质的方法中，使用通过连接装置301形成的成膜装置，连接装置301设置有盘 运输系统302.版权所有（C）2009，JPO＆INPIT
-
-
-
-
-
-
-
-
-
搜索结果
210 条记录 (耗时 0.033 秒)
