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    Inspection method and reagent
    5.
    发明专利
    Inspection method and reagent 有权

    公开(公告)号：JP5314317B2

    公开(公告)日：2013-10-16

    申请号：JP2008099856

    申请日：2008-04-08

    申请人： 日本電子株式会社

    发明人： 山 英 利 西 ,  泉 充 小 ,  賀 三 雄 須

    IPC分类号： G01N23/225 ,  H01J37/20 ,  H01J37/28

    CPC分类号： G01N23/2202 ,  H01J37/228 ,  H01J2237/2004 ,  H01J2237/208 ,  H01J2237/2608 ,  H01J2237/2808

    摘要： An inspection method of efficiently observing or inspecting a liquid sample (20). The method permits improvement of maintenance of an apparatus. A reagent solution (39) used for the method is also offered. The method uses a sample holder (40) including a portion made of a film (32). A culture medium and biological cells (38) are put in the sample holder as a liquid sample. A plugging agent (41) is mixed into the liquid sample. The cells can be irradiated with a primary beam (7) via the film from below the film. An image of the cells or information about the cells can be obtained by detecting a resulting secondary signal. If the film is destroyed by the primary beam irradiation or some mechanical stimulation, the plugging agent plugs up the damaged portion of the film. Consequently, liquid leakage can be minimized. Previously, whenever the film is destroyed, the apparatus has been required to be cleaned. With the present invention, even if the film is destroyed at least ten times, cleaning is dispensed with.

    Spectroscopy system and method for surface analysis
    8.
    发明专利
    Spectroscopy system and method for surface analysis 有权
    光谱系统和表面分析方法

    公开(公告)号：JP2007127637A

    公开(公告)日：2007-05-24

    申请号：JP2006293552

    申请日：2006-10-30

    申请人： Thermo Fisher Scientific Inc ,  サーモ フィッシャー サイエンティフィック インク

    发明人： BARNARD BRYAN ROBERT

    IPC分类号： G01N23/227 ,  G01N23/225 ,  H01J37/22 ,  H01J37/252

    CPC分类号： H01J37/29 ,  H01J37/228 ,  H01J37/252

    摘要： PROBLEM TO BE SOLVED: To provide charged particle spectroscopy system which can provide high-sensitive spectral observation of secondary charged particles to generate high-quality sample optical images.
    SOLUTION: The primary particle-based spectroscopy system (10) achieves sample observation approximately perpendicular to the sample surface and collection of secondary charged particle. In this system, a collection chamber (22) provided with through hole (52) converges discharged particle in downstream direction along the 1st vertical axis (24). By this process, both the secondary charged particle lens system (20) for demarcating optical crossover point (25) of the charged particle and the light reflex optical device (50) located downstream of the lens system, which is designed to receive imaging light (41) and reflect it so as to be kept away from the 2nd vertical axis (42) for providing surface-observable images, are arranged on the crossover point (25) or near. Thus the converged particle may pass through the aperture in order to take spectroscopic analysis in downstream without almost being interrupted by optical device.
    COPYRIGHT: (C)2007,JPO&INPIT

    摘要翻译： 要解决的问题：提供可以提供二次带电粒子的高灵敏度光谱观察以产生高质量样品光学图像的带电粒子光谱系统。 解决方案：主要的基于粒子的光谱系统（10）实现大致垂直于样品表面的样品观察和二次带电粒子的收集。 在该系统中，具有通孔（52）的收集室（22）沿着第一垂直轴线（24）沿着下游方向会聚排出的颗粒。 通过该处理，用于划分带电粒子的光学交叉点（25）的二次带电粒子透镜系统（20）和位于透镜系统下游的光反射光学器件（50），被设计成接收成像光 41）并且将其反射以远离第二垂直轴线（42）以提供表面可观察的图像，布置在交叉点（25）或附近。 因此，会聚粒子可以通过孔径，以便在下游进行光谱分析，而几乎不被光学器件中断。 版权所有（C）2007，JPO＆INPIT