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公开(公告)号：JP2016175421A
公开(公告)日：2016-10-06
申请号：JP2016130212
申请日：2016-06-30
Applicant: 三星ダイヤモンド工業株式会社
Inventor： 留井 直子
IPC: H01L21/301 , B28D5/00
CPC classification number: B28D1/225 , B24B3/36 , B26D1/0006 , B26D3/08 , C03B33/107 , B26D2001/002 , B26D2001/0053 , Y10T83/0341 , Y10T83/0385
Abstract: 【課題】スクライビングホイールを長寿命化すると共に、スクライブ後に脆性材料基板を分断したときの基板の端面強度を強くすること。 【解決手段】スクライビングホイール基材の傾斜面がなす頂角α1と、基材の刃先部分に設けられたダイヤモンド膜の研磨領域の先端部がなす刃先角度α2との差が5°以上20°以下であり、前記研磨領域の稜線及び傾斜面の算術平均粗さRaが0.015μm以下であるスクライビングホイールを用いて脆性材料基板をスクライブし分断したときに、分断された基材の端面精度が増し、端面強度を向上させることができる。又スクライブを進めても稜線部分の摩耗が少なく、スクライビングホイールを長寿命化することができる。 【選択図】図2B
Abstract translation: 要解决的问题：为了延长划线轮的使用寿命，并且在划线后脆性材料基片分裂时，增加基板的端面强度。解决方案：当使用划线轮将脆性材料基板刻划成碎片时 其中由划线轮基材的斜面形成的顶角α1与设置在基材的叶片前端部的金刚石膜的研磨区域的前端部形成的叶片前端角α2之差为5° °以上20°以下，抛光区域的棱线的算术平均粗糙度Ra和斜率为0.015μm以下，碎片基材的端面精度提高，并且能够提高端面强度。 即使进行划线时，脊线部的磨损受到限制，也可以实现划线轮的长寿命。图2B：
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公开(公告)号：JP5865448B2
公开(公告)日：2016-02-17
申请号：JP2014147325
申请日：2014-07-18
Applicant: 三星ダイヤモンド工業株式会社
IPC: C03B33/027 , B28D5/00
CPC classification number: B28D1/225 , B28D7/043 , C03B33/027 , C03B33/037 , C03B33/10 , Y10T83/0333 , Y10T83/0341 , Y10T83/0385 , Y10T83/9403
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公开(公告)号：JP5327288B2
公开(公告)日：2013-10-30
申请号：JP2011154746
申请日：2011-07-13
Applicant: 三星ダイヤモンド工業株式会社
IPC: B31B50/25 , C03B33/027 , B28D1/24 , C03B33/10
CPC classification number: B28D1/225 , B28D7/043 , C03B33/027 , C03B33/037 , C03B33/10 , Y10T83/0333 , Y10T83/0341 , Y10T83/0385 , Y10T83/9403
Abstract: A tip 14 is rotatably attached to a tip holder 10. The tip holder 10 is made into a cylindrical shape and its end has an installation part 16. An opening is arranged at a holder joint. The tip holder 10 is attracted by a magnet for attachment so that detaching and attaching can be performed easily. Tip offset data is recorded as a 2-dimensional code 17 on the surface of the tip holder 10. When replacing the tip holder, the offset data is read out and inputted to a scribe device, thereby canceling the offset. This eliminates the operation required for correction when attaching/detaching the tip holder and enables easy tip replacement during a short time of device stop.
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公开(公告)号：JP4921383B2
公开(公告)日：2012-04-25
申请号：JP2007548017
申请日：2006-12-01
Applicant: 三星ダイヤモンド工業株式会社
IPC: B28D5/00 , B31B50/25 , B28D1/24 , C03B33/033
CPC classification number: B28D1/225 , B28D7/043 , C03B33/027 , C03B33/037 , C03B33/10 , Y10T83/0333 , Y10T83/0341 , Y10T83/0385 , Y10T83/9403
Abstract: A tip 14 is rotatably attached to a tip holder 10. The tip holder 10 is made into a cylindrical shape and its end has an installation part 16. An opening is arranged at a holder joint. The tip holder 10 is attracted by a magnet for attachment so that detaching and attaching can be performed easily. Tip offset data is recorded as a 2-dimensional code 17 on the surface of the tip holder 10. When replacing the tip holder, the offset data is read out and inputted to a scribe device, thereby canceling the offset. This eliminates the operation required for correction when attaching/detaching the tip holder and enables easy tip replacement during a short time of device stop.
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公开(公告)号：JP2012006833A
公开(公告)日：2012-01-12
申请号：JP2011184867
申请日：2011-08-26
Applicant: Mitsuboshi Diamond Industrial Co Ltd , 三星ダイヤモンド工業株式会社
Inventor： MAEKAWA KAZUYA , WAKAYAMA HARUO
CPC classification number: B28D1/225 , C03B33/033 , C03B33/07 , C03B33/107 , Y10T29/49 , Y10T83/0385 , Y10T83/9403 , Y10T225/12 , Y10T225/321
Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a scribing wheel for brittle material in which bite to a glass surface is improved while controlling a high penetrating effect.SOLUTION: The method for manufacturing the scribing wheel 70 for brittle material, composed of an outer peripheral part formed with a circumferential ridge line 71 by intersecting bottoms of two truncated cones having a rotational axis in common, a plurality of notches 75 and protrusions 76 formed alternately in the circumferential direction along the circumferential ridge line 71, the protrusion 76 being constituted by parts of the circumferential ridge line 71 having lengths in the circumferential direction remaining by notching the circumferential ridge line 71, comprises a process of forming the notches having a form of a trapezoid viewed from the axial direction of the truncated corn by notching on the outer peripheral part with irradiation of laser light wherein the length a of the notches 75 in the circumferential direction is set by varying a length a' of a base of the trapezoid.
Abstract translation: 要解决的问题：提供一种制造脆性材料划线轮的方法，其中在控制高渗透效果的同时提高对玻璃表面的咬合性。 解决方案：用于制造用于脆性材料的划线轮70的方法，该方法由外周部分组成，该外围部分通过将具有共同旋转轴线的两个截锥体相交，多个凹口75和 沿圆周棱线71沿圆周方向交替形成的突起76，突出部76由周向棱线71的沿圆周方向的长度方向的部分构成，该圆周棱线71在圆周方向上残留有圆周棱线71，包括形成凹口 具有从截顶玉米的轴向观察的梯形的形式，其中通过照射激光而在外周部分开槽，其中凹口75在圆周方向上的长度a通过改变基部的长度a'来设定 的梯形。 版权所有（C）2012，JPO＆INPIT
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Patent Agency Ranking
公开(公告)号：JP2011246348A
公开(公告)日：2011-12-08
申请号：JP2011154745
申请日：2011-07-13
Applicant: Mitsuboshi Diamond Industrial Co Ltd , 三星ダイヤモンド工業株式会社
Inventor： YAMAMOTO MASAO , TABATA ATSUSHI
IPC: B31B50/25 , C03B33/027 , B28D1/24 , B28D5/00
CPC classification number: B28D1/225 , B28D7/043 , C03B33/027 , C03B33/037 , C03B33/10 , Y10T83/0333 , Y10T83/0341 , Y10T83/0385 , Y10T83/9403
Abstract: PROBLEM TO BE SOLVED: To replace chip in a scribe device in a short period of time.SOLUTION: A chip 14 is rotatably attached to a chip holder 10. The chip holder 10 is made into a cylindrical shape and its end has an installation part. An opening 23 is arranged at a holder joint. The chip holder 10 is attracted by a magnet, positioned by a parallel pin 25 and installed, so that detaching and attaching can be performed easily. Chip offset data is recorded as a 2-dimensional code on the surface of the chip holder 10. When replacing the chip holder, the offset data is read out and input to a scribe device, thereby canceling the offset. This eliminates the operation required for correction when attaching/detaching the chip holder and enables easy chip replacement during a short time of device stop.
Abstract translation: 要解决的问题：在短时间内更换划线设备中的芯片。 解决方案：芯片14可旋转地附接到芯片保持器10.芯片保持器10被制成圆柱形，其端部具有安装部分。 开口23布置在支架接头处。 芯片保持器10被由平行销25定位的磁体吸引，从而可以容易地进行拆卸和附接。 芯片偏移数据作为二维码记录在芯片保持器10的表面上。当更换芯片保持器时，偏移数据被读出并输入到划线装置，从而抵消偏移。 这样就可以消除在安装/拆卸芯片保持架时进行修正所需的操作，并能在短时间的设备停止期间轻松更换芯片。 版权所有（C）2012，JPO＆INPIT
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7.发明专利Brittle material scribing wheel, and scribing method, scribing apparatus and scribing tool using the brittle material scribing wheel 有权BRITTLE材料筛选轮和切割方法，使用脆性材料筛选轮的筛选设备和筛选工具
公开(公告)号：JP2011246346A
公开(公告)日：2011-12-08
申请号：JP2011121389
申请日：2011-05-31
Applicant: Mitsuboshi Diamond Industrial Co Ltd , 三星ダイヤモンド工業株式会社
Inventor： MAEKAWA KAZUYA , WAKAYAMA HARUO
IPC: C03B33/10 , B28D1/24 , B28D5/00 , C03B33/027 , C03B33/037 , G02F1/13 , G02F1/1333 , H01L51/50 , H05B33/10
CPC classification number: B28D1/225 , C03B33/033 , C03B33/07 , C03B33/107 , Y10T29/49 , Y10T83/0385 , Y10T83/9403 , Y10T225/12 , Y10T225/321
Abstract: PROBLEM TO BE SOLVED: To provide a scribing wheel and a scribing apparatus which can prevent a crosspoint skip and can achieve scribing performance with good quality in a cutting face.SOLUTION: The brittle material scribing wheel 10 includes an outer circumference end section 14 wherein a circumference ridge line 11 is formed by having crossed bottom sections of two truncated cones 13 which share a rotating shaft 12, and a plurality of notches 15 and protruding sections 16 alternately formed in a circumference direction along the circumference ridge line 11. The protruding section 16 is formed of a part of the circumference ridge line 11, which is left by notching the circumference ridge line 11 and has a length in the circumference direction. The protruding sections 16 are rotated by being brought into contact with a brittle material substrate with pressure, and scribe lines and vertical cracks extending in a thickness direction of the brittle material substrate from the scribe line are formed on the brittle material substrate. A length of the notch 15 in the circumference direction is made shorter than that of the protruding section in the circumference direction, and catching to a glass surface is improved while suppressing hyperosmotic effects.
Abstract translation: 要解决的问题：提供一种可以防止交叉点跳过的划线轮和划线装置，并且可以在切割面中以良好的质量实现划线性能。 解决方案：脆性材料划线轮10包括外周端部14，其中通过具有共享旋转轴12的两个截头圆锥体13的交叉底部部分形成圆周棱线11，以及多个凹口15和 突出部16沿着圆周棱线11在圆周方向上交替地形成。突出部16由圆周棱线11的一部分形成，该圆周棱线11由圆周棱线11切开而具有圆周方向的长度 。 突出部16通过与脆性材料基板的压力接触而旋转，并且在脆性材料基板上形成有沿着脆性材料基板的厚度方向从划线延伸的划线和垂直裂纹。 在圆周方向上的切口15的长度比突出部的圆周方向的长度短，并且在抑制高渗效果的同时提高了对玻璃面的捕捉。 版权所有（C）2012，JPO＆INPIT
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8.发明专利Brittle material scribing wheel, and scribing method, apparatus, and tool using the brittle material scribing wheel 有权BRITTLE MATERIAL SCRINGING WHEEL，AND SCRIBING METHOD，APPARATUS，AND TOOL WITH THE BRITTLE MATERIAL SCRINGING WHEEL
公开(公告)号：JP2011241144A
公开(公告)日：2011-12-01
申请号：JP2011184865
申请日：2011-08-26
Applicant: Mitsuboshi Diamond Industrial Co Ltd , 三星ダイヤモンド工業株式会社
Inventor： MAEKAWA KAZUYA , WAKAYAMA HARUO
IPC: C03B33/033 , B28D1/24 , B28D5/00
CPC classification number: B28D1/225 , C03B33/033 , C03B33/07 , C03B33/107 , Y10T29/49 , Y10T83/0385 , Y10T83/9403 , Y10T225/12 , Y10T225/321
Abstract: PROBLEM TO BE SOLVED: To provide a scribing wheel for a brittle material for improving catching to a glass surface while restraining a high penetration effect, and to provide a method, an apparatus, and a tool for scribing a substrate made of a brittle material using the scribing wheel for a brittle material.SOLUTION: The scribing wheel for a brittle material includes: an outer peripheral portion around which a circumference ridgeline is formed, where two truncated cones have connected bottoms so as to share the same rotational axis; and a plurality of alternating notches and protrusions which are formed in a circumferential direction along the circumference ridgeline, wherein the circumferential ridgeline includes a center line average roughness Ra of 0.40 μm, and the protrusions are formed of portions of the circumference ridgeline which remain after the circumference ridge line is notched and have a length in a circumferential direction. In the notches, length in the circumferential direction is smaller than that in a circumferential direction of the protrusions.
Abstract translation: 要解决的问题：为了提供一种脆性材料的划线轮，用于改善对玻璃表面的捕捉同时抑制高的穿透效果，并且提供一种用于对由...制成的基板进行划线的方法，装置和工具 脆性材料使用划线轮为脆性材料。 解决方案：用于脆性材料的划线轮包括：外围部分，围绕其形成圆周棱线，其中两个截锥体具有连接的底部以便共享相同的旋转轴线; 以及沿圆周棱线沿圆周方向形成的多个交替的切口和突起，其中所述圆周棱线包括0.40μm的中心线平均粗糙度Ra，并且所述突起由保留在所述圆周棱线之后的圆周棱线的部分形成 圆周棱线在圆周方向上具有长度。 在凹口中，圆周方向上的长度小于凸起的周向长度。 版权所有（C）2012，JPO＆INPIT
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公开(公告)号：JP4578086B2
公开(公告)日：2010-11-10
申请号：JP2003356771
申请日：2003-10-16
Applicant: エルジー ディスプレイ カンパニー リミテッド
IPC: G02F1/13 , B26F1/38 , B28D5/00 , C03B33/023 , C03B33/03 , C03B33/033 , C03B33/07 , G02F1/1333
CPC classification number: C03B33/03 , B65G2249/04 , C03B33/033 , C03B33/07 , G02F1/133351 , Y02P40/57 , Y10T83/0378 , Y10T83/0385 , Y10T83/207 , Y10T225/12 , Y10T225/325
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公开(公告)号：JP4402883B2
公开(公告)日：2010-01-20
申请号：JP2002557877
申请日：2002-01-16
Applicant: 三星ダイヤモンド工業株式会社
IPC: C03B33/03 , B28D5/00 , B31B50/25 , C03B33/033 , C03B33/037 , C03B33/07 , G02F1/13 , G02F1/1333 , G09F9/00 , H01J9/24 , H01J17/16
CPC classification number: B28D5/0082 , B28D5/0011 , B65G2249/04 , C03B33/03 , C03B33/033 , C03B33/07 , G02F1/133351 , Y10T83/0378 , Y10T83/0385 , Y10T83/0581 , Y10T225/307 , Y10T225/321 , Y10T225/325 , Y10T225/329 , Y10T225/371
Abstract: A separation apparatus comprising a first and a second scribing devices for scribing front and rear surfaces of a first mother substrate made of a brittle material along first predetermined scribing lines previously provided on the front and rear surfaces of the first mother substrate, the first and second scribing devices being opposed to each other on an upper side and a lower side, and a holding and transferring device for holding and transferring the first mother substrate so that the first predetermined scribing lines of the first mother substrate are located between the first and second scribing devices.
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