감소된 맥리 저 팽창 유리 및 구성요소, 및 이의 제조방법
    3.
    发明公开
    감소된 맥리 저 팽창 유리 및 구성요소, 및 이의 제조방법 无效
    减少的低膨胀玻璃和元素,以及制造它们的方法

    公开(公告)号:KR1020090018678A

    公开(公告)日:2009-02-20

    申请号:KR1020087032056

    申请日:2007-05-31

    IPC分类号: C03C3/06 C03B19/14

    摘要: The invention is directed to a low expansion glass with reduced striae, the glass have a point to point variation in titania content is 0.1 wt% or less through its thickness and a CTE of 0 ± 3 ppb/°C throughout the temperature range 5-35 °C. The invention is further directed to a method for producing the low expansion glass by using a method in which the time for repetition of the oscillation patterns used in the process are 10 minutes or less. In addition, the low expansion glass of the invention can have striae further reduced by heat treating the glass at temperatures above 1600 °C for a time in the range of 48 160 hours. The invention is also directed to optical elements suitable for extreme ultraviolet lithography, which elements are made of a titania-containing silica glass having a titania content in the range of 5-10 wt.%, a polished and shaped surface have a peak to valley roughness of less than 10 nm, an average variation in titania content of less than ±0.1 wt. % as measured through the vertical thickness of the glass and a coefficient of thermal expansion of 0 ±3 ppb/°C throughout the temperature range 5 35 °C.

    摘要翻译: 本发明涉及一种具有减少条纹的低膨胀玻璃,通过其厚度,玻璃具有0.1重量%以下的二氧化钛含量的点对点变化,并且在整个温度范围内的CTE为0±3ppb /℃, 35°C。 本发明还涉及一种通过使用在该方法中使用的振荡图案的重复时间为10分钟以下的方法制造低膨胀玻璃的方法。 此外,本发明的低膨胀玻璃可以通过在高于1600℃的温度下热处理玻璃在48 160小时的时间内进一步降低条纹。 本发明还涉及适用于极紫外光刻的光学元件,该元件由二氧化钛含量在5-10重量%范围内的含二氧化钛的二氧化硅玻璃制成,抛光和成形的表面具有峰谷 粗糙度小于10nm,二氧化钛含量的平均变化小于±0.1wt。 通过玻璃的垂直厚度测量,并且在整个温度范围5 35°C时,热膨胀系数为0±3ppb /°C。

    텔루라이트 유리 조성물, 이를 이용한 광도파로 및광증폭기
    4.
    发明公开
    텔루라이트 유리 조성물, 이를 이용한 광도파로 및광증폭기 失效
    微波玻璃复合材料,光波导和使用其的光学放大器

    公开(公告)号:KR1020070002941A

    公开(公告)日:2007-01-05

    申请号:KR1020050058651

    申请日:2005-06-30

    IPC分类号: C03C3/12 C03C13/04

    摘要: Tellurite glass composition including oxides of tellurium, molybdenum, tungsten, zinc and/or bismuth is provided to be applied in manufacturing optical waveguide and/or optical amplifier and to embody wide-band optical amplifier or laser even with a few of excitation light sources by comprising TeO2, MoO3 or WO3, ZnO, Bi2O3 and mono-valent metal oxides. The composition includes: 25-90mol.% of TeO2; 1-55mol.% of T1O3 or 1-40mol.% of T2O3; 0-35mol.% of ZnO; 0-35mol.% of M2O; and 0-20mol.% of Bi2O3. T1 is molybdenum Mo, T2 is tungsten W and M2O is Li2O or Na2O. M2O is fabricated of two or more of metal oxides among Li2O, Na2O, K2O and Cs2O which are metal oxides containing mono-valence electron. Amount of each of M2O and ZnO is not zero(0) at the same time. The composition further contains at least one or two selected from WO3, Ta2O5, PbO, Nb2O3 and Al2O3 in amount of 0-20mol.%. The composition increases full width at half maximum of Raman peak from 200cm-1 to 300cm-3.

    摘要翻译: 提供了包括碲,钼,钨,锌和/或铋的氧化物的碲化物玻璃组合物,用于制造光波导和/或光放大器,并且即使用少量激发光源也可以实现宽带光放大器或激光器 包括TeO 2,MoO 3或WO 3,ZnO,Bi 2 O 3和一价金属氧化物。 组合物包括:25-90mol%的TeO 2; 1-55mol%的T1O3或1-40mol%的T2O3; 0-35mol%的ZnO; 0-35mol%的M2O; 和0-20mol%的Bi2O3。 T1是钼Mo,T2是钨W,M2O是Li2O或Na2O。 M2O由Li2O,Na2O,K2O和Cs2O中的两种或多种金属氧化物制成,它们是含有单价电子的金属氧化物。 M2O和ZnO中的每一个都不是零(0)。 组合物还含有选自WO 3,Ta 2 O 5,PbO,Nb 2 O 3和Al 2 O 3中的至少一种或两种,其量为0-20mol%。 组合物将拉曼峰的最大半峰宽从200cm -1增加到300cm-3。

    투명한글라스-세라믹
    5.
    发明授权
    투명한글라스-세라믹 失效
    투명한글라스 - 세라믹

    公开(公告)号:KR100391106B1

    公开(公告)日:2003-09-22

    申请号:KR1019950044507

    申请日:1995-11-24

    IPC分类号: C03C13/04

    摘要: The ZnO-free transparent glass-ceramic has a compsn. (cation %) of: 20-35 SiO2; 10-20 AlO1.5; 19-34 CdF2; 19-23 PbF2; and 3-7 YF3. Also claimed is a further glass ceramic with a compsn. (cation %) of: 20-35 SiO2; 10-20 AlO1.5; 21-31 CdF2; 15-25 PbF2; 3-7 YF3; and 3-7% ZnF2. Also claimed is an optical fibre waveguide comprising: (a) a core of one of the above glass-ceramics; and (b) a cladding of a transparent glass of compsn. (by wt.% on oxide basis): 23-30 SiO2; 49-60 PbO; 5-11 K2O; 1-10 B2O3; 0-1 Li2O; 0-8 BaO; 0-3 Al2O3; and 0-2 Na2O.

    摘要翻译: 不含ZnO的透明玻璃陶瓷具有复合结构。 (阳离子%):20-35 SiO2; 10-20 AlO1.5; 19-34 CdF2; 19-23 PbF2; 和3-7 YF3。 还要求保护的是另一种玻璃陶瓷, (阳离子%):20-35 SiO2; 10-20 AlO1.5; 21-31 CdF2; 15-25 PbF2; 3-7 YF3; 和3-7%的ZnF 2。 还要求保护的光纤波导包括:(a)上述玻璃陶瓷之一的芯; 和(b)一个透明的复合玻璃包层。 (以氧化物为基准的重量%):23-30 SiO2; 49-60 PbO; 5-11 K2O; 1-10 B2O3; 0-1 Li2O; 0-8 BaO; 0-3 Al2O3; 和0-2Na2O。