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公开(公告)号:KR101095193B1
公开(公告)日:2011-12-16
申请号:KR1020067023516
申请日:2004-05-11
申请人: 에릭슨 텔레커뮤니케이코스 에스.에이.
发明人: 메새데크,유네스 , 리베이로,시드니,제이.,엘. , 페코라로,에디슨 , 나스키멘토,에두아르도,마우로
IPC分类号: C03C3/32
CPC分类号: C03C4/0071 , C03C3/253 , C03C13/048 , H01S3/06716
摘要: A germanate glass composition suitable for use in a fiber amplifier for broadband amplification of optical signals is provided. The glass preferably includes 35-75% GeO2, 0-45% PbO, 5-20% BaO, 5-20% ZnO, and 2-10% R2O (R=Na, Li, K). It is doped with thulium ions (Tm3+) and codoped with holmium ions (Ho3+). The glass composition of results in a remarkably large bandwidth as compared with previous glasses. It is also highly compatible with existing silica optical fibers.
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公开(公告)号:KR1020100123850A
公开(公告)日:2010-11-25
申请号:KR1020107019081
申请日:2009-02-27
申请人: 아사히 가라스 가부시키가이샤
CPC分类号: C03B19/1453 , B82Y10/00 , B82Y40/00 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03B2201/42 , C03C3/06 , C03C3/076 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/23 , C03C2201/42 , C03C2203/44 , C03C2203/52 , C03C2203/54 , G03F1/24 , G03F7/70958 , Y02P40/57
摘要: 본 발명은 EUVL용 노광 장치의 광학 부재로서 사용한 경우에, 고EUV 에너지 광의 조사시 열팽창 계수가 거의 0이고 유리로부터 수소를 방출시킴으로써 다층막의 물성을 장시간 유지시킬 수 있는 TiO
2 -SiO
2 유리를 제공한다. 본 발명은 가상 온도가 1,100℃ 이하이고 수소 분자 농도가 1×10
16 분자/㎤ 이상이며, 선열팽창 계수가 0 ppb/℃가 되는 온도가 40 내지 110℃의 범위 내에 있는 TiO
2 함유 실리카 유리에 관한 것이다.-
公开(公告)号:KR1020090018678A
公开(公告)日:2009-02-20
申请号:KR1020087032056
申请日:2007-05-31
申请人: 코닝 인코포레이티드
发明人: 맥슨,존,이. , 로스취,윌리엄,알.
CPC分类号: C03C3/06 , C03B19/1453 , C03B19/1484 , C03B2201/42 , C03C4/0071 , C03C4/0085 , C03C2201/42 , C03C2203/42 , C03C2203/50 , Y02P40/57
摘要: The invention is directed to a low expansion glass with reduced striae, the glass have a point to point variation in titania content is 0.1 wt% or less through its thickness and a CTE of 0 ± 3 ppb/°C throughout the temperature range 5-35 °C. The invention is further directed to a method for producing the low expansion glass by using a method in which the time for repetition of the oscillation patterns used in the process are 10 minutes or less. In addition, the low expansion glass of the invention can have striae further reduced by heat treating the glass at temperatures above 1600 °C for a time in the range of 48 160 hours. The invention is also directed to optical elements suitable for extreme ultraviolet lithography, which elements are made of a titania-containing silica glass having a titania content in the range of 5-10 wt.%, a polished and shaped surface have a peak to valley roughness of less than 10 nm, an average variation in titania content of less than ±0.1 wt. % as measured through the vertical thickness of the glass and a coefficient of thermal expansion of 0 ±3 ppb/°C throughout the temperature range 5 35 °C.
摘要翻译: 本发明涉及一种具有减少条纹的低膨胀玻璃,通过其厚度,玻璃具有0.1重量%以下的二氧化钛含量的点对点变化,并且在整个温度范围内的CTE为0±3ppb /℃, 35°C。 本发明还涉及一种通过使用在该方法中使用的振荡图案的重复时间为10分钟以下的方法制造低膨胀玻璃的方法。 此外,本发明的低膨胀玻璃可以通过在高于1600℃的温度下热处理玻璃在48 160小时的时间内进一步降低条纹。 本发明还涉及适用于极紫外光刻的光学元件,该元件由二氧化钛含量在5-10重量%范围内的含二氧化钛的二氧化硅玻璃制成,抛光和成形的表面具有峰谷 粗糙度小于10nm,二氧化钛含量的平均变化小于±0.1wt。 通过玻璃的垂直厚度测量,并且在整个温度范围5 35°C时,热膨胀系数为0±3ppb /°C。
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公开(公告)号:KR1020070002941A
公开(公告)日:2007-01-05
申请号:KR1020050058651
申请日:2005-06-30
申请人: 한국전자통신연구원
CPC分类号: H01S3/302 , C03C3/122 , C03C4/0071 , C03C4/12 , C03C13/048 , C03C14/006 , H01S3/06716 , H01S3/0675 , H01S3/06754 , H01S3/094011 , H01S3/094096 , H01S3/177
摘要: Tellurite glass composition including oxides of tellurium, molybdenum, tungsten, zinc and/or bismuth is provided to be applied in manufacturing optical waveguide and/or optical amplifier and to embody wide-band optical amplifier or laser even with a few of excitation light sources by comprising TeO2, MoO3 or WO3, ZnO, Bi2O3 and mono-valent metal oxides. The composition includes: 25-90mol.% of TeO2; 1-55mol.% of T1O3 or 1-40mol.% of T2O3; 0-35mol.% of ZnO; 0-35mol.% of M2O; and 0-20mol.% of Bi2O3. T1 is molybdenum Mo, T2 is tungsten W and M2O is Li2O or Na2O. M2O is fabricated of two or more of metal oxides among Li2O, Na2O, K2O and Cs2O which are metal oxides containing mono-valence electron. Amount of each of M2O and ZnO is not zero(0) at the same time. The composition further contains at least one or two selected from WO3, Ta2O5, PbO, Nb2O3 and Al2O3 in amount of 0-20mol.%. The composition increases full width at half maximum of Raman peak from 200cm-1 to 300cm-3.
摘要翻译: 提供了包括碲,钼,钨,锌和/或铋的氧化物的碲化物玻璃组合物,用于制造光波导和/或光放大器,并且即使用少量激发光源也可以实现宽带光放大器或激光器 包括TeO 2,MoO 3或WO 3,ZnO,Bi 2 O 3和一价金属氧化物。 组合物包括:25-90mol%的TeO 2; 1-55mol%的T1O3或1-40mol%的T2O3; 0-35mol%的ZnO; 0-35mol%的M2O; 和0-20mol%的Bi2O3。 T1是钼Mo,T2是钨W,M2O是Li2O或Na2O。 M2O由Li2O,Na2O,K2O和Cs2O中的两种或多种金属氧化物制成,它们是含有单价电子的金属氧化物。 M2O和ZnO中的每一个都不是零(0)。 组合物还含有选自WO 3,Ta 2 O 5,PbO,Nb 2 O 3和Al 2 O 3中的至少一种或两种,其量为0-20mol%。 组合物将拉曼峰的最大半峰宽从200cm -1增加到300cm-3。
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公开(公告)号:KR100391106B1
公开(公告)日:2003-09-22
申请号:KR1019950044507
申请日:1995-11-24
申请人: 코닝 인코포레이티드
发明人: 니콜라스프란시스보렐리 , 로렌케이코넬리어스 , 마크앤드류뉴하우스 , 폴아서티크
IPC分类号: C03C13/04
CPC分类号: C03C10/16 , C03C3/108 , C03C4/0071 , C03C13/006 , C03C13/04 , C03C13/046 , G02B6/102
摘要: The ZnO-free transparent glass-ceramic has a compsn. (cation %) of: 20-35 SiO2; 10-20 AlO1.5; 19-34 CdF2; 19-23 PbF2; and 3-7 YF3. Also claimed is a further glass ceramic with a compsn. (cation %) of: 20-35 SiO2; 10-20 AlO1.5; 21-31 CdF2; 15-25 PbF2; 3-7 YF3; and 3-7% ZnF2. Also claimed is an optical fibre waveguide comprising: (a) a core of one of the above glass-ceramics; and (b) a cladding of a transparent glass of compsn. (by wt.% on oxide basis): 23-30 SiO2; 49-60 PbO; 5-11 K2O; 1-10 B2O3; 0-1 Li2O; 0-8 BaO; 0-3 Al2O3; and 0-2 Na2O.
摘要翻译: 不含ZnO的透明玻璃陶瓷具有复合结构。 (阳离子%):20-35 SiO2; 10-20 AlO1.5; 19-34 CdF2; 19-23 PbF2; 和3-7 YF3。 还要求保护的是另一种玻璃陶瓷, (阳离子%):20-35 SiO2; 10-20 AlO1.5; 21-31 CdF2; 15-25 PbF2; 3-7 YF3; 和3-7%的ZnF 2。 还要求保护的光纤波导包括:(a)上述玻璃陶瓷之一的芯; 和(b)一个透明的复合玻璃包层。 (以氧化物为基准的重量%):23-30 SiO2; 49-60 PbO; 5-11 K2O; 1-10 B2O3; 0-1 Li2O; 0-8 BaO; 0-3 Al2O3; 和0-2Na2O。
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公开(公告)号:KR1020030017550A
公开(公告)日:2003-03-03
申请号:KR1020027017324
申请日:2002-04-19
申请人: 가부시키가이샤 니콘
IPC分类号: C03C3/06
CPC分类号: C03C4/0071 , C03B19/1423 , C03B19/1453 , C03B19/1492 , C03B2201/07 , C03B2201/21 , C03B2201/23 , C03B2207/00 , C03C3/06 , C03C2201/11 , C03C2201/21 , C03C2201/23 , C03C2203/40 , C03C2203/44 , C03C2203/46 , C03C2203/52 , C03C2203/54 , G02B1/02 , G02B13/143 , G03F7/70241 , G03F7/70958
摘要: 본 발명의 석영글래스부재는, 조성을 SiO
x 로 나타낼 때 x가 1.85 이상 1.95 이하이고, 함유되는 수소분자 농도가 1 ×10
16 분자/㎤ 이상 5 ×10
18 분자/㎤ 이하이고, 또한 ArF 엑시머레이저광을 평균 원펄스 에너지밀도 2mJ/㎠ 로 1 ×10
4 펄스 조사했을 때의 조사종료직전의 흡수계수 A 와, 상기 ArF 엑시머레이저광의 조사정지후 600초가 경과했을 때의 제 2 흡수계수 B 의 차 AB 가 0.002㎝
-1 이하인 것이다. 이 석영글래스부재를 투영노광장치의 조명광학계나 투영광학계에 사용함으로써, 레티클면이나 웨이퍼 상의 노광영역내에서의 조도변동이 저감되어 균일한 노광을 실시할 수 있게 된다.-
公开(公告)号:KR1019950000627B1
公开(公告)日:1995-01-26
申请号:KR1019910018730
申请日:1991-10-24
申请人: 스미토모덴키고교가부시키가이샤 , 니폰 덴신 덴와 가부시끼가이샤
IPC分类号: C03C4/00
CPC分类号: H01S3/0632 , C03C3/095 , C03C3/16 , C03C4/0071 , C03C13/046 , H01S3/06716 , H01S3/1611 , H01S3/1691 , H01S2302/00 , H01S2303/00
摘要: 내용 없음.
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公开(公告)号:KR101866624B1
公开(公告)日:2018-06-11
申请号:KR1020157034927
申请日:2014-05-07
申请人: 코닝 인코포레이티드
发明人: 다비치,레오나르드찰스,Ⅱ , 로거노브,스테판르보비치 , 퀘사다,마크알레잔드로 , 스털트소브,알렉산더믹하일로비치
IPC分类号: C03C23/00 , C03C27/06 , C03C27/08 , C03B23/203 , C03C3/12 , B23K26/20 , H01L51/00 , B32B37/06
CPC分类号: H01L51/5246 , B23K26/206 , B32B7/04 , B32B17/06 , B32B37/06 , B32B2250/03 , B32B2250/40 , B32B2255/20 , B32B2310/0825 , B32B2310/0831 , B32B2310/0843 , B32B2457/206 , C03B23/203 , C03C3/12 , C03C3/14 , C03C3/16 , C03C3/23 , C03C3/247 , C03C4/0071 , C03C8/24 , C03C23/0025 , C03C27/06 , C03C27/08 , C03C2204/00 , C03C2207/00 , C03C2218/32 , H01L51/0024 , H01L2251/301
摘要: 제1기판의표면에걸쳐무기질막을형성하는단계, 상기제1기판및 제2기판사이에보호될워크피스를배열하는단계, 여기서, 상기막은상기제2기판과접촉됨, 및미리결정된파장을갖는레이저광선으로상기막을국부적으로가열하여상기무기질막의조성의함수로서및 상기제1 또는제2기판의불순물의조성의함수로서상기제1 및제2기판사이에상기워크피스를밀봉시키는단계를포함하는워크피스결합방법이개시된다. 상기무기질막, 상기제1기판또는상기제2기판은약 420 nm 내지약 750 nm에서투과성을가질수 있다.
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公开(公告)号:KR1020170115595A
公开(公告)日:2017-10-17
申请号:KR1020177025099
申请日:2016-02-03
申请人: 닛본 이따 가라스 가부시끼가이샤
CPC分类号: C03C4/0071 , B23K26/0006 , B23K26/0066 , B23K26/0648 , B23K26/53 , B23K26/70 , B23K2203/54 , C03B33/02 , C03B33/0222 , C03C3/091 , C03C3/093 , C03C3/095 , C03C15/00
摘要: 본발명은, 자외선레이저조사에의한변질부형성과에칭을조합한미세구멍일괄가공기술에있어서, 원형의윤곽과평활한내벽을갖는구멍을제작가능하게하고, 실용적인연속생산이가능한유리조성을제공한다. 본발명은, 착색성분의금속산화물을포함하고, 유리의조성이, 몰%로표시하여, 45.0%≤SiO≤68.0%, 2.0%≤BO≤20.0%, 3.0%≤AlO≤20.0%, 0.1%≤TiO
摘要翻译: 根据UV激光照射微孔批处理技术组合改变本发明结束并用,使得能够制造具有与圆形的光滑内壁的轮廓的孔刻蚀,和提供了可能的玻璃组合物的实际连续生产。 本发明包含着色成分的金属氧化物时,玻璃的组成,以摩尔%,以显示,45.0%≤SiO≤68.0%,2.0%≤BO≤20.0%,3.0%≤AlO≤20.0%,0.1% TiO <5.0%,0%→ZnO→9.0%,0≤LiO+ NaO + KO <2.0%。
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公开(公告)号:KR1020080025412A
公开(公告)日:2008-03-20
申请号:KR1020087002154
申请日:2006-06-23
申请人: 코닝 인코포레이티드
CPC分类号: C03C3/06 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/23 , C03C2201/54
摘要: Disclosed in the application are a synthetic silica glass having low fluence-dependent transmission, particularly at about 193 nm, and a process for making the same. The glass may desirably exhibit a low level of fluorescence at 290 and 390 nm when activated at about 248 nm. The glass may desirably exhibit low level of LIWFD, [SiH*] and/or [ODC]. ® KIPO & WIPO 2008
摘要翻译: 在本申请中公开了具有低注射度依赖性透射率,特别是约193nm的合成二氧化硅玻璃及其制造方法。 当在约248nm激活时,该玻璃可期望地在290和390nm处表现出低水平的荧光。 玻璃可能期望显示低水平的LIWFD,[SiH *]和/或[ODC]。 ®KIPO&WIPO 2008
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