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    Czochralski crystal growth process furnace that maintains constant melt line orientation and method of operation
    1.
    发明授权
    Czochralski crystal growth process furnace that maintains constant melt line orientation and method of operation 有权
    Czochralski晶体生长工艺炉保持恒定的熔体线取向和操作方法

    公开(公告)号：US08721786B2

    公开(公告)日：2014-05-13

    申请号：US12877140

    申请日：2010-09-08

    申请人： Mark S. Andreaco ,  Troy Marlar ,  Brant Quinton ,  Piotr Szupryczynski

    发明人： Mark S. Andreaco ,  Troy Marlar ,  Brant Quinton ,  Piotr Szupryczynski

    IPC分类号： C30B15/26

    CPC分类号： C30B15/30 ,  C30B15/20

    摘要： A Czochralski process (“CZ”) crystal growth method and furnace having a heater capable of generating a heating zone, a crucible within the heating zone and capable of retaining a volume of molten crystal growth material forming a melt line oriented in a designated position within the heating zone, a seed growth rod retractable from the crucible with a rod retraction mechanism, for forming a crystal boule thereon proximal the melt line from the molten crystal growth material. The furnace causes relative movement between the crucible and heating zone as the crystal boule is retracted, so that the melt line is maintained in the designated position within the heating zone. In some embodiments relative movement is based at least in part on sensed weight of the growing crystal boule. In other embodiments the crucible growth rod retraction mechanism are fixed relative to each other by a gantry.

    摘要翻译： Czochralski工艺（“CZ”）晶体生长方法和具有能够产生加热区域的加热器的炉子，在加热区内的坩埚，并且能够保持一定量的熔融晶体生长材料， 所述加热区域是从所述坩埚收回的具有杆缩回机构的种子生长棒，用于在熔融线上从所述熔融晶体生长材料形成晶体棒。 当晶体晶棒缩回时，炉引起坩埚和加热区之间的相对运动，使得熔体线保持在加热区内的指定位置。 在一些实施例中，相对运动至少部分地基于生长的晶体晶粒的感测重量。 在其他实施例中，坩埚生长杆回缩机构通过台架相对于彼此固定。

    CZOCHRALSKI CRYSTAL GROWTH PROCESS FURNACE THAT MAINTAINS CONSTANT MELT LINE ORIENTATION AND METHOD OF OPERATION
    2.
    发明申请
    CZOCHRALSKI CRYSTAL GROWTH PROCESS FURNACE THAT MAINTAINS CONSTANT MELT LINE ORIENTATION AND METHOD OF OPERATION 有权
    CZOCHRALSKI晶体生长过程保持恒定的熔体线定向和操作方法

    公开(公告)号：US20120055395A1

    公开(公告)日：2012-03-08

    申请号：US12877140

    申请日：2010-09-08

    申请人： Mark S. Andreaco ,  Troy Marlar ,  Brant Quinton ,  Piotr Szupryczynski

    发明人： Mark S. Andreaco ,  Troy Marlar ,  Brant Quinton ,  Piotr Szupryczynski

    IPC分类号： C30B15/30 ,  C30B15/20

    CPC分类号： C30B15/30 ,  C30B15/20

    摘要： A Czochralski process (“CZ”) crystal growth method and furnace having a heater capable of generating a heating zone, a crucible within the heating zone and capable of retaining a volume of molten crystal growth material forming a melt line oriented in a designated position within the heating zone, a seed growth rod retractable from the crucible with a rod retraction mechanism, for forming a crystal boule thereon proximal the melt line from the molten crystal growth material. The furnace causes relative movement between the crucible and heating zone as the crystal boule is retracted, so that the melt line is maintained in the designated position within the heating zone. In some embodiments relative movement is based at least in part on sensed weight of the growing crystal boule. In other embodiments the crucible growth rod retraction mechanism are fixed relative to each other by a gantry.

    摘要翻译： Czochralski工艺（“CZ”）晶体生长方法和具有能够产生加热区的加热器的炉子，在加热区内的坩埚，并且能够保持一定量的熔融晶体生长材料， 所述加热区域是从所述坩埚收回的具有杆缩回机构的种子生长棒，用于在熔融线上从所述熔融晶体生长材料形成晶体棒。 当晶体晶棒缩回时，炉引起坩埚和加热区之间的相对运动，使得熔体线保持在加热区内的指定位置。 在一些实施例中，相对运动至少部分地基于生长的晶体晶粒的感测重量。 在其他实施例中，坩埚生长杆回缩机构通过台架相对于彼此固定。

    Composite Crucible For Crystal Growth
    5.
    发明申请
    Composite Crucible For Crystal Growth 审中-公开
    复合坩埚用于晶体生长

    公开(公告)号：US20130087094A1

    公开(公告)日：2013-04-11

    申请号：US13305803

    申请日：2011-11-29

    申请人： Brant Quinton ,  Troy Marlar

    发明人： Brant Quinton ,  Troy Marlar

    IPC分类号： C30B15/10 ,  B23K31/02

    CPC分类号： B23K9/167 ,  B23K9/23 ,  C30B11/002 ,  C30B13/14 ,  C30B15/10 ,  C30B35/002 ,  Y10T117/1032

    摘要： A composite crucible comprising an iridium alloy sidewall and an iridium bottom. The iridium alloy is selected from the group consisting of iridium, rhenium, rhodium and tungsten. In some embodiments the iridium alloy comprises about 99 to 95 parts iridium and about 1 to 5 five parts rhenium. The crucible can be fabricated by rolling a flat sheet of iridium alloy into a cylinder and affixing an iridium circular bottom to one end of the cylinder. Seams can be welded to complete the composite crucible structure.

    摘要翻译： 一种复合坩埚，包括铱合金侧壁和铱底。 铱合金选自铱，铼，铑和钨。 在一些实施方案中，铱合金包含约99至95份铱和约1至5份五份铼。 坩埚可以通过将铱合金的平板轧制成圆筒并将铱圆形底部固定到圆筒的一端来制造。 可以焊接接缝以完成复合坩埚结构。