公开(公告)号：US07202935B2

公开(公告)日：2007-04-10

申请号：US10919806

申请日：2004-08-17

申请人： Jae Jong Lee ,  Kee Bong Choi ,  Gee Hong Kim ,  Kwang Jo Chung

发明人： Jae Jong Lee ,  Kee Bong Choi ,  Gee Hong Kim ,  Kwang Jo Chung

IPC分类号： G03B27/42 ,  G03B27/52 ,  G03B27/62

CPC分类号： G03F7/0002 ,  B29C33/303 ,  B29C59/02 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00

摘要： An imprinting apparatus including a plate unit, and a plurality of imprinting modules provided on a lower surface of the plate unit. Each imprinting module is self-aligned by a compliance of six degree of freedom and vertically moved along with the plate unit by a controller. The imprint module is independently self-aligned in response to surface conditions of an objective material to compensate for a relative pose error thereof, such that a pattern formed on a lower end of the imprinting module can be imprinted on an upper surface of the objective material within a predetermined unit range, and a sequence of imprinting the pattern of the imprinting module on the objective material can be variously controlled.

摘要翻译： 一种压印装置，包括板单元和设置在板单元的下表面上的多个压印模块。 每个压印模块通过六个自由度的顺应自对准，并通过控制器与板单元一起垂直移动。 压印模块响应于目标材料的表面状态而独立地自对准以补偿其相对姿态误差，使得形成在压印模块的下端上的图案可以被印刷在物体材料的上表面上 在预定的单位范围内，可以不同地控制将压印模块的图案压印在物镜上的顺序。

公开(公告)号：US06545763B1

公开(公告)日：2003-04-08

申请号：US09533157

申请日：2000-03-23

申请人： Seung Woo Kim ,  Gee Hong Kim

发明人： Seung Woo Kim ,  Gee Hong Kim

IPC分类号： G01B902

CPC分类号： G01B11/0675 ,  G01B9/02057 ,  G01B9/02083 ,  G01B9/02084 ,  G01B9/0209 ,  G01N21/45

摘要： A method and a recording medium for measuring three-dimensional thickness profile and refractive index of transparent dielectric thin-film with some patterns or not, which is fabricated in the semiconductor and related industrial field, using white-light scanning interferometry is provided. A method for measuring a thickness profile using white-light scanning interferometry in optical system includes the following steps. A first step is to extracting a phase graph by acquiring an interference signal and performing Fourier transform. A second step is to extracting a mathematical phase graph through modeling of a measurement object. And a third step is to measuring a profile value and a thickness value by applying an optimization technique to an error function determined by using phase values which is acquired from said first step and said second step.

摘要翻译： 提供一种使用白光扫描干涉测量法在半导体及相关工业领域中制造的具有某些图案的透明电介质薄膜的三维厚度分布和折射率的方法和记录介质。一种方法 用于在光学系统中使用白光扫描干涉测量法测量厚度分布包括以下步骤。 第一步是通过获取干扰信号并执行傅里叶变换来提取相位图。 第二步是通过对测量对象的建模来提取数学阶段图。 并且第三步是通过将优化技术应用于通过使用从所述第一步骤和所述第二步骤获取的相位值确定的误差函数来测量轮廓值和厚度值。

公开(公告)号：US07092105B2

公开(公告)日：2006-08-15

申请号：US10473089

申请日：2001-10-31

申请人： Ssang-Gun Lim ,  Gee-Hong Kim ,  Yi-Bae Choi ,  Sang-Yoon Lee

发明人： Ssang-Gun Lim ,  Gee-Hong Kim ,  Yi-Bae Choi ,  Sang-Yoon Lee

IPC分类号： G01B11/24

CPC分类号： G01B11/2509 ,  G01B2210/50

摘要： A method and apparatus for measuring the three-dimensional surface shape of an object using color informations of light reflected by the object. The method and apparatus for measuring the three-dimensional surface shape of the object, in which a real-time measurement of the three-dimensional surface is performed by projecting a beam of light having color information onto the object and detecting color distribution information according to levels of the object, thereby obtaining level information of the object.

摘要翻译： 一种使用由对象反射的光的颜色信息来测量对象的三维表面形状的方法和装置。 用于测量物体的三维表面形状的方法和装置，其中通过将具有颜色信息的光束投射到物体上并且根据以下方式检测颜色分布信息来进行三维表面的实时测量 对象的级别，从而获得对象的级别信息。