MAGNETIC DETECTION DEVICE HAVING BRIDGE CIRCUIT PROVIDED WITH RESISTANCE ADJUSTMENT PORTION AND METHOD OF MANUFACTURING THE SAME
    1.
    发明申请
    MAGNETIC DETECTION DEVICE HAVING BRIDGE CIRCUIT PROVIDED WITH RESISTANCE ADJUSTMENT PORTION AND METHOD OF MANUFACTURING THE SAME 审中-公开
    具有电阻调节部的桥式电路的磁性检测装置及其制造方法

    公开(公告)号:US20090315552A1

    公开(公告)日:2009-12-24

    申请号:US12545639

    申请日:2009-08-21

    CPC classification number: G01D5/142

    Abstract: In a magnetic detection device using a magnetic resistance element, the resistance of a layer having a multi-layer structure can be easily adjusted without causing damages to the layer. A magneto-resistance layer is connected in series to a reference resistance layer, and a magneto-resistance layer is connected in series to a reference resistance layer on a substrate. A voltage is applied between a power supply layer and a grounding layer. A first output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. A second output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. Accordingly, it is possible to adjust the resistance of the reference resistance layers by selecting the respective positions of the connection layers.

    Abstract translation: 在使用磁阻元件的磁检测装置中,可以容易地调整具有多层结构的层的电阻而不会对该层造成损害。 磁阻层与基准电阻层串联连接,并且磁电阻层与衬底上的参考电阻层串联连接。 在电源层和接地层之间施加电压。 第一输出导电层和参考电阻层彼此并联延伸,使得它们经由连接层部分地彼此电连接。 第二输出导电层和参考电阻层彼此并联延伸,使得它们经由连接层部分地彼此电连接。 因此,可以通过选择连接层的各个位置来调整参考电阻层的电阻。

    Magnetic detection device having magnetic detection element in magnetic detection circuit and fabricating method thereof
    3.
    发明授权
    Magnetic detection device having magnetic detection element in magnetic detection circuit and fabricating method thereof 有权
    在磁检测电路中具有磁检测元件的磁检测装置及其制造方法

    公开(公告)号:US07414398B2

    公开(公告)日:2008-08-19

    申请号:US11692823

    申请日:2007-03-28

    CPC classification number: G01R33/09

    Abstract: A magnetic detection device of which an output can be completely switched over with an external magnetic field is formed in a small size. A detection circuit is formed by forming circuit elements such as an active element layer and interconnection layers on a substrate. An insulating layer is formed on the detection circuit, and a flat surface is formed on the resultant surface. A magnetic detection element that detects an external magnetic field by using a magneto-resistance effect and a fixed resistance element, which has the same electric resistance as the magnetic detection element but does not react to the external magnetic field, are formed on the flat surface. Electrode layers and a lead layer are formed on the flat surface, and the lead layer and the interconnection layer are electrically connected to each other via a bump penetrating the insulating layer. The magnetic detection element and the fixed resistance element are formed on the flat surface of the insulating layer, thereby forming a small magnetic detection device.

    Abstract translation: 能够以外部磁场将输出完全切换的磁检测装置形成为小尺寸。 通过在衬底上形成诸如有源元件层和互连层的电路元件来形成检测电路。 在检测电路上形成绝缘层,在所得表面上形成平坦表面。 通过使用具有与磁检测元件相同但不与外部磁场反应的电阻的磁阻效应和固定电阻元件来检测外部磁场的磁检测元件形成在平面上 。 电极层和引线层形成在平坦表面上,并且引线层和互连层通过穿过绝缘层的凸块彼此电连接。 磁性检测元件和固定电阻元件形成在绝缘层的平坦表面上,从而形成小的磁性检测装置。

    Method of manufacturing a thin film magnetic head
    4.
    发明授权
    Method of manufacturing a thin film magnetic head 失效
    制造薄膜磁头的方法

    公开(公告)号:US07343669B2

    公开(公告)日:2008-03-18

    申请号:US11527892

    申请日:2006-09-27

    Abstract: A manufacturing method of a thin film magnetic head is provided. In the manufacturing method of a thin film magnetic head, an inorganic insulating layer is formed along at least a sidewall surface of each conductor part. A gap of each conductor part is filled by an organic insulating layer. An upper surface of the conductor part, a magnetic pole portion, and a connecting layer are grinded to be planar with an organic insulating layer and an inorganic insulating layer. During an upper surface of each conductor part is grinded, the inorganic insulating layer, which is hard, suppresses a shear drop of each conductor part by grinding.

    Abstract translation: 提供了薄膜磁头的制造方法。 在薄膜磁头的制造方法中,沿着每个导体部分的至少一个侧壁表面形成无机绝缘层。 每个导体部分的间隙由有机绝缘层填充。 将导体部分的上表面,磁极部分和连接层用有机绝缘层和无机绝缘层研磨成平面。 在每个导体部分的上表面被研磨时,硬的无机绝缘层通过研磨抑制每个导体部分的剪切降。

    Thin film magnetic head having upper core layer with narrow track width
    5.
    发明授权
    Thin film magnetic head having upper core layer with narrow track width 失效
    薄膜磁头具有磁道宽度窄的上芯层

    公开(公告)号:US06400527B1

    公开(公告)日:2002-06-04

    申请号:US09437888

    申请日:1999-11-09

    Abstract: To provide a thin film magnetic head having an upper core layer whose dimensions are controlled with high precision, which can yield high density recording on a magnetic recording medium, and a production process of the same, an upper core layer is formed on a first, second and third insulation layers and a gap layer, and has a narrow tip region, a connecting portion and a body portion, in which the tip region is connected via the gap layer to a lower core layer on a head surface facing a magnetic recording medium, the connecting portion is connected to the tip region in a nearly identical width, and is formed on a lower region of a first sloping region and an inclined plane K, and the body portion extends wider from the connecting portion and covers part of a coil layer. In a thin film magnetic head having a dual coil layer structure, a third insulation layer having a third apex and a third sloping region is formed to cover a second coil layer, and the third apex is located on a second plane region, and the top of a second insulation layer and the third sloping region establish a first pocket region P1.

    Abstract translation: 为了提供具有高精度地控制尺寸的上芯层的薄膜磁头,其可以在磁记录介质上产生高密度记录及其制造方法,上芯层形成在第一, 第二和第三绝缘层和间隙层,并且具有窄的尖端区域,连接部分和主体部分,其中尖端区域经由间隙层连接到面对磁记录介质的头表面上的下芯层 连接部分以几乎相同的宽度连接到尖端区域,并且形成在第一倾斜区域和倾斜平面K的下部区域上,并且主体部分从连接部分延伸得更宽并覆盖线圈的一部分 层。 在具有双线圈层结构的薄膜磁头中,形成具有第三顶点和第三倾斜区域的第三绝缘层以覆盖第二线圈层,并且第三顶点位于第二平面区域上,并且顶部 并且所述第三倾斜区域建立第一袋区域P1。

    Force sensor and method of manufacturing the same
    6.
    发明授权
    Force sensor and method of manufacturing the same 有权
    力传感器及其制造方法

    公开(公告)号:US08516906B2

    公开(公告)日:2013-08-27

    申请号:US13475579

    申请日:2012-05-18

    CPC classification number: G01L1/18 G01L5/162

    Abstract: A sensor substrate includes a plurality of piezoresistance elements. The electrical resistance of each piezoresistance element changes in accordance with an amount of displacement of a displacement portion displaced by an external load applied through a pressure receiving unit. A base substrate supports the sensor substrate. The sensor substrate and the base substrate each include a support supporting the displacement portion such that the displacement portion can be displaced and a plurality of electrically connecting portions electrically connected to the plurality of piezoresistance elements. The supports of the sensor and base substrates are joined to each other and the plurality of electrically connecting portions of the sensor and base substrates are joined to each other. Furthermore, in each of the sensor and base substrates, either the support or the plurality of electrically connecting portions or both extend to the periphery of the sensor substrate or the base substrate.

    Abstract translation: 传感器基板包括多个压阻元件。 每个压电元件的电阻根据通过压力接收单元施加的外部负载而移位的位移部分的位移量而变化。 基底支撑传感器基底。 传感器基板和基板各自包括支撑位移部分的支撑件,使得位移部分可以移位,并且多个电连接部分电连接到多个压阻元件。 传感器和基底基板的支撑件彼此接合,并且传感器和基底基板的多个电连接部分彼此接合。 此外,在每个传感器和基底基板中,支撑件或多个电连接部分或两者都延伸到传感器基板或基底基板的周边。

    SUBSTRATE BONDED MEMS SENSOR
    7.
    发明申请
    SUBSTRATE BONDED MEMS SENSOR 有权
    基板结合MEMS传感器

    公开(公告)号:US20100072563A1

    公开(公告)日:2010-03-25

    申请号:US12560645

    申请日:2009-09-16

    CPC classification number: B81B7/007 B81B2207/097

    Abstract: A MEMS sensor includes a first substrate; a second substrate; a movable electrode portion and a fixed electrode portion which are arranged between the first substrate and the second substrate, wherein: conductive supporting portions of the movable electrode portion and the fixed electrode portion are, respectively, fixedly secured to a surface of the first substrate via a first insulating layer; a second insulating layer, a lead layer buried into the second insulating layer, and connection electrode portions that are electrically connected to the lead layer to be individually connected to the conductive supporting portions are provided on a surface of the second substrate; a metallic connection layer is formed on the surface of one of the respective conductive supporting portions; one of the respective connection electrode portions and the metallic connection layer are bonded together by eutectic bonding or diffusion bonding; and, at least each of the connection electrode portions has a thickness of about 4 μm or smaller.

    Abstract translation: MEMS传感器包括第一基板; 第二基板; 布置在所述第一基板和所述第二基板之间的可移动电极部分和固定电极部分,其中:所述可动电极部分和所述固定电极部分的导电支撑部分分别固定地固定到所述第一基板的表面, 第一绝缘层; 第二绝缘层,埋入第二绝缘层中的引线层和与导电层电连接以连接到导电支撑部分的连接电极部分设置在第二基板的表面上; 在各个导电支撑部分之一的表面上形成金属连接层; 各个连接电极部分和金属连接层中的一个通过共晶接合或扩散接合结合在一起; 并且至少每个连接电极部分具有约4μm或更小的厚度。

    Magnetic detection device having bridge circuit provided with resistance adjustment portion and method of manufacturing the same
    8.
    发明授权
    Magnetic detection device having bridge circuit provided with resistance adjustment portion and method of manufacturing the same 失效
    具有电路调节部的桥接电路的磁检测装置及其制造方法

    公开(公告)号:US07592805B2

    公开(公告)日:2009-09-22

    申请号:US11679015

    申请日:2007-02-26

    CPC classification number: G01D5/142

    Abstract: In a magnetic detection device using a magnetic resistance element, the resistance of a layer having a multi-layer structure can be easily adjusted without causing damages to the layer. A magneto-resistance layer is connected in series to a reference resistance layer, and a magneto-resistance layer is connected in series to a reference resistance layer on a substrate. A voltage is applied between a power supply layer and a grounding layer. A first output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. A second output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. Accordingly, it is possible to adjust the resistance of the reference resistance layers by selecting the respective positions of the connection layers.

    Abstract translation: 在使用磁阻元件的磁检测装置中,可以容易地调整具有多层结构的层的电阻而不会对该层造成损害。 磁阻层与参考电阻层串联连接,并且磁阻层与衬底上的参考电阻层串联连接。 在电源层和接地层之间施加电压。 第一输出导电层和参考电阻层彼此并联延伸,使得它们经由连接层部分地彼此电连接。 第二输出导电层和参考电阻层彼此并联延伸,使得它们经由连接层部分地彼此电连接。 因此,可以通过选择连接层的各个位置来调整参考电阻层的电阻。

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