公开(公告)号：US07414398B2

公开(公告)日：2008-08-19

申请号：US11692823

申请日：2007-03-28

申请人： Yoshito Sasaki ,  Hideki Gochou ,  Kiyoshi Sato

发明人： Yoshito Sasaki ,  Hideki Gochou ,  Kiyoshi Sato

IPC分类号： G01R33/02

CPC分类号： G01R33/09

摘要： A magnetic detection device of which an output can be completely switched over with an external magnetic field is formed in a small size. A detection circuit is formed by forming circuit elements such as an active element layer and interconnection layers on a substrate. An insulating layer is formed on the detection circuit, and a flat surface is formed on the resultant surface. A magnetic detection element that detects an external magnetic field by using a magneto-resistance effect and a fixed resistance element, which has the same electric resistance as the magnetic detection element but does not react to the external magnetic field, are formed on the flat surface. Electrode layers and a lead layer are formed on the flat surface, and the lead layer and the interconnection layer are electrically connected to each other via a bump penetrating the insulating layer. The magnetic detection element and the fixed resistance element are formed on the flat surface of the insulating layer, thereby forming a small magnetic detection device.

摘要翻译： 能够以外部磁场将输出完全切换的磁检测装置形成为小尺寸。 通过在衬底上形成诸如有源元件层和互连层的电路元件来形成检测电路。 在检测电路上形成绝缘层，在所得表面上形成平坦表面。 通过使用具有与磁检测元件相同但不与外部磁场反应的电阻的磁阻效应和固定电阻元件来检测外部磁场的磁检测元件形成在平面上 。 电极层和引线层形成在平坦表面上，并且引线层和互连层通过穿过绝缘层的凸块彼此电连接。 磁性检测元件和固定电阻元件形成在绝缘层的平坦表面上，从而形成小的磁性检测装置。

公开(公告)号：US20070229068A1

公开(公告)日：2007-10-04

申请号：US11692823

申请日：2007-03-28

申请人： Yoshito Sasaki ,  Hideki Gochou ,  Kiyoshi Sato

发明人： Yoshito Sasaki ,  Hideki Gochou ,  Kiyoshi Sato

IPC分类号： G01R33/02

CPC分类号： G01R33/09

摘要： A magnetic detection device of which an output can be completely switched over with an external magnetic field is formed in a small size. A detection circuit is formed by forming circuit elements such as an active element layer and interconnection layers on a substrate. An insulating layer is formed on the detection circuit, and a flat surface is formed on the resultant surface. A magnetic detection element that detects an external magnetic field by using a magneto-resistance effect and a fixed resistance element, which has the same electric resistance as the magnetic detection element but does not react to the external magnetic field, are formed on the flat surface. Electrode layers and a lead layer are formed on the flat surface, and the lead layer and the interconnection layer are electrically connected to each other via a bump penetrating the insulating layer. The magnetic detection element and the fixed resistance element are formed on the flat surface of the insulating layer, thereby forming a small magnetic detection device.

摘要翻译： 能够以外部磁场将输出完全切换的磁检测装置形成为小尺寸。 通过在衬底上形成诸如有源元件层和互连层的电路元件来形成检测电路。 在检测电路上形成绝缘层，在所得表面上形成平坦表面。 通过使用具有与磁检测元件相同但不与外部磁场反应的电阻的磁阻效应和固定电阻元件来检测外部磁场的磁检测元件形成在平面上 。 电极层和引线层形成在平坦表面上，并且引线层和互连层通过穿过绝缘层的凸块彼此电连接。 磁性检测元件和固定电阻元件形成在绝缘层的平坦表面上，从而形成小的磁性检测装置。

公开(公告)号：US07472470B2

公开(公告)日：2009-01-06

申请号：US11624332

申请日：2007-01-18

申请人： Toru Takahashi ,  Hisayuki Yazawa ,  Hideki Gochou ,  Kiyoshi Kobayashi ,  Minoru Yamada ,  Kiyoshi Sato ,  Toshinori Watanabe

发明人： Toru Takahashi ,  Hisayuki Yazawa ,  Hideki Gochou ,  Kiyoshi Kobayashi ,  Minoru Yamada ,  Kiyoshi Sato ,  Toshinori Watanabe

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A main magnetic pore layer is formed on an insulating layer flattened into a high-flatness surface, and a yoke layer having a large film thickness is formed under the main magnetic pole layer independently of the main magnetic pole. The main magnetic pole layer has a front end surface formed in a shape with a width size gradually increasing in a direction of track width as the front end surface departs farther away from an auxiliary magnetic pole layer. A perpendicular magnetic recording head can be provided which can suppress the occurrence of fringing in a recording pattern, and can form the main magnetic pole layer with high pattern accuracy, and can satisfactorily introduce a recording magnetic field to a fore end of the main magnetic pole layer.

摘要翻译： 在平坦化面平坦化的绝缘层上形成有主要的磁性孔层，并且在主磁极层的下方形成具有大的膜厚的磁轭层，而与主磁极无关。 主磁极层的前端表面形成为具有随着前端表面离开辅助磁极层而在轨道宽度方向上逐渐增加的宽度尺寸的形状。 可以提供一种垂直磁记录头，其可以抑制记录图案中的边缘的发生，并且可以形成具有高图案精度的主磁极层，并且可以令人满意地将记录磁场引入主磁极的前端 层。

公开(公告)号：US07181829B2

公开(公告)日：2007-02-27

申请号：US11222441

申请日：2005-09-08

申请人： Toru Takahashi ,  Hisayuki Yazawa ,  Hideki Gochou ,  Kiyoshi Kobayashi ,  Minoru Yamada ,  Kiyoshi Sato ,  Toshinori Watanabe

发明人： Toru Takahashi ,  Hisayuki Yazawa ,  Hideki Gochou ,  Kiyoshi Kobayashi ,  Minoru Yamada ,  Kiyoshi Sato ,  Toshinori Watanabe

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A main magnetic pole layer is formed on an insulating layer flattened into a high-flatness surface, and a yoke layer having a large film thickness is formed under the main magnetic pole layer independently of the main magnetic pole. The main magnetic pole layer has a front end surface formed in a shape with a width size gradually increasing in a direction of track width as the front end surface departs farther away from an auxiliary magnetic pole layer. A perpendicular magnetic recording head can be provided which can suppress the occurrence of fringing in a recording pattern, and can form the main magnetic pole layer with high pattern accuracy, and can satisfactorily introduce a recording magnetic field to a fore end of the main magnetic pole layer.

摘要翻译： 在平坦化面平坦化的绝缘层上形成有主磁极层，独立于主磁极，在主磁极层的下方形成有膜厚较大的磁轭层。 主磁极层的前端表面形成为具有随着前端表面离开辅助磁极层而在轨道宽度方向上逐渐增加的宽度尺寸的形状。 可以提供一种垂直磁记录头，其可以抑制记录图案中的边缘的发生，并且可以以高图案精度形成主磁极层，并且可以令人满意地将记录磁场引入主磁极的前端 层。

公开(公告)号：US20050168870A1

公开(公告)日：2005-08-04

申请号：US11016949

申请日：2004-12-20

申请人： Kiyoshi Sato ,  Toshinori Watanabe ,  Hideki Gochou ,  Kiyoshi Kobayashi ,  Toru Takahashi ,  Hisayuki Yazawa ,  Masaki Ikegami ,  Hiromi Ikegami ,  Chiaki Ikegami

发明人： Kiyoshi Sato ,  Toshinori Watanabe ,  Hideki Gochou ,  Kiyoshi Kobayashi ,  Toru Takahashi ,  Hisayuki Yazawa ,  Masaki Ikegami ,  Hiromi Ikegami ,  Chiaki Ikegami

IPC分类号： G11B5/31 ,  G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/312 ,  G11B5/313 ,  G11B5/3163

摘要： A thin-film magnetic head includes a lower core layer; a recording core formed on the lower core layer and exposed at a face surface facing a recording medium, the recording core including a gap layer, an upper pole layer, and optionally, a lower pole layer; an upper core layer magnetically coupled to the upper pole layer; and a coil. A tip surface of the upper core layer at the face surface is set back from the face surface in the height direction, and the tip surface is an inclined surface or a curved surface in which the depth gradually increases from the track width direction. A method for fabricating a thin-film magnetic head is also disclosed.

摘要翻译： 薄膜磁头包括下芯层; 记录芯，形成在下芯层上并在面向记录介质的表面上暴露，所述记录芯包括间隙层，上极层和可选的下极层; 磁性地耦合到上极层的上芯层; 和线圈。 上表面的上芯层的顶表面在高度方向上从表面返回，并且尖端表面是倾斜表面或深度从轨道宽度方向逐渐增加的曲面。 还公开了一种用于制造薄膜磁头的方法。

公开(公告)号：US06687084B2

公开(公告)日：2004-02-03

申请号：US10025131

申请日：2001-12-18

申请人： Toru Takahashi ,  Hisayuki Yazawa ,  Hideki Gochou ,  Kiyoshi Kobayashi ,  Minoru Yamada ,  Kiyoshi Sato ,  Toshinori Watanabe

发明人： Toru Takahashi ,  Hisayuki Yazawa ,  Hideki Gochou ,  Kiyoshi Kobayashi ,  Minoru Yamada ,  Kiyoshi Sato ,  Toshinori Watanabe

IPC分类号： G11B5127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A main magnetic pole layer is formed on an insulating layer flattened into a high-flatness surface, and a yoke layer having a large film thickness is formed under the main magnetic pole layer independently of the main magnetic pole. The main magnetic pole layer has a front end surface formed in a shape with a width size gradually increasing in a direction of track width as the front end surface departs farther away from an auxiliary magnetic pole layer. A perpendicular magnetic recording head can be provided which can suppress the occurrence of fringing in a recording pattern, and can form the main magnetic pole layer with high pattern accuracy, and can satisfactorily introduce a recording magnetic field to a fore end of the main magnetic pole layer.

摘要翻译： 在平坦化面平坦化的绝缘层上形成有主磁极层，独立于主磁极，在主磁极层的下方形成有膜厚较大的磁轭层。 主磁极层的前端表面形成为具有随着前端表面离开辅助磁极层而在轨道宽度方向上逐渐增加的宽度尺寸的形状。 可以提供一种垂直磁记录头，其可以抑制记录图案中的边缘的发生，并且可以以高图案精度形成主磁极层，并且可以令人满意地将记录磁场引入主磁极的前端 层。

公开(公告)号：US20100072563A1

公开(公告)日：2010-03-25

申请号：US12560645

申请日：2009-09-16

申请人： Kiyoshi Sato ,  Kiyoshi Kobayashi ,  Yoshitaka Uto ,  Katsuya Kikuiri ,  Kazuyoshi Takahashi ,  Jun Suzuki ,  Hideki Gochou ,  Toru Takahashi ,  Hisanobu Ohkawa

发明人： Kiyoshi Sato ,  Kiyoshi Kobayashi ,  Yoshitaka Uto ,  Katsuya Kikuiri ,  Kazuyoshi Takahashi ,  Jun Suzuki ,  Hideki Gochou ,  Toru Takahashi ,  Hisanobu Ohkawa

IPC分类号： H01L29/84

CPC分类号： B81B7/007 ,  B81B2207/097

摘要： A MEMS sensor includes a first substrate; a second substrate; a movable electrode portion and a fixed electrode portion which are arranged between the first substrate and the second substrate, wherein: conductive supporting portions of the movable electrode portion and the fixed electrode portion are, respectively, fixedly secured to a surface of the first substrate via a first insulating layer; a second insulating layer, a lead layer buried into the second insulating layer, and connection electrode portions that are electrically connected to the lead layer to be individually connected to the conductive supporting portions are provided on a surface of the second substrate; a metallic connection layer is formed on the surface of one of the respective conductive supporting portions; one of the respective connection electrode portions and the metallic connection layer are bonded together by eutectic bonding or diffusion bonding; and, at least each of the connection electrode portions has a thickness of about 4 μm or smaller.

摘要翻译： MEMS传感器包括第一基板; 第二基板; 布置在所述第一基板和所述第二基板之间的可移动电极部分和固定电极部分，其中：所述可动电极部分和所述固定电极部分的导电支撑部分分别固定地固定到所述第一基板的表面， 第一绝缘层; 第二绝缘层，埋入第二绝缘层中的引线层和与导电层电连接以连接到导电支撑部分的连接电极部分设置在第二基板的表面上; 在各个导电支撑部分之一的表面上形成金属连接层; 各个连接电极部分和金属连接层中的一个通过共晶接合或扩散接合结合在一起; 并且至少每个连接电极部分具有约4μm或更小的厚度。

公开(公告)号：US07280320B2

公开(公告)日：2007-10-09

申请号：US10794753

申请日：2004-03-05

申请人： Kiyoshi Sato ,  Hideki Gochou ,  Hisayuki Yazawa

发明人： Kiyoshi Sato ,  Hideki Gochou ,  Hisayuki Yazawa

IPC分类号： G11B5/39 ,  G11B5/127

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3103 ,  G11B5/3106 ,  G11B5/313 ,  G11B5/3133 ,  G11B5/3136 ,  G11B5/3163 ,  G11B5/3903 ,  G11B5/40 ,  G11B2005/3996 ,  Y10T29/49034 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/49073 ,  Y10T428/1143 ,  Y10T428/1171 ,  Y10T428/1193 ,  Y10T428/3183

摘要： A lower shield layer is formed by being embedded in a first recess formed in an under layer. Accordingly, the distance between the lower shield layer and a slider can be reduced. Also, a second metal layer is formed from above a gap layer covering an electrode extracting layer over above the under layer hindwards therefrom. Accordingly, the second metal layer can be brought closer to the slider side than an upper shield layer. Consequently, the thermal dissipation effects of the thin-film magnetic head can be improved.

摘要翻译： 下屏蔽层通过嵌入形成在下层中的第一凹部中而形成。 因此，可以减小下屏蔽层和滑块之间的距离。 此外，从位于下层以上的电极提取层的间隙层的上方形成第二金属层。 因此，第二金属层可以比上屏蔽层更靠近滑块侧。 因此，可以提高薄膜磁头的散热效果。

公开(公告)号：US20070115594A1

公开(公告)日：2007-05-24

申请号：US11624332

申请日：2007-01-18

申请人： Toru Takahashi ,  Hisayuki Yazawa ,  Hideki Gochou ,  Kiyoshi Kobayashi ,  Minoru Yamada ,  Kiyoshi Sato ,  Toshinori Watanabe

发明人： Toru Takahashi ,  Hisayuki Yazawa ,  Hideki Gochou ,  Kiyoshi Kobayashi ,  Minoru Yamada ,  Kiyoshi Sato ,  Toshinori Watanabe

IPC分类号： G11B5/33

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A main magnetic pole layer is formed on an insulating layer flattened into a high-flatness surface, and a yoke layer having a large film thickness is formed on the main magnetic pole layer independently of the main magnetic pole. The main magnetic pole layer has a front end surface formed in a shape with a width size gradually increasing in a direction of track width as the front end surface departs farther away from an auxiliary magnetic pole layer. A perpendicular magnetic recording head can be provided which can suppress the occurrence of fringing in a recording pattern, and can form the main magnetic pole layer with high pattern accuracy, and can satisfactorily-introduce a recording magnetic field to a fore end of the main magnetic pole layer.

摘要翻译： 在平坦化面平坦化的绝缘层上形成有主磁极层，独立于主磁极，在主磁极层上形成膜厚大的磁轭层。 主磁极层的前端表面形成为具有随着前端表面离开辅助磁极层而在轨道宽度方向上逐渐增加的宽度尺寸的形状。 可以提供一种垂直磁记录头，其可以抑制记录图案中的边缘的发生，并且可以以高图案精度形成主磁极层，并且可以令人满意地将记录磁场引入主磁体的前端 极层。

公开(公告)号：US06697221B2

公开(公告)日：2004-02-24

申请号：US10024965

申请日：2001-12-18

申请人： Kiyoshi Sato ,  Toshinori Watanabe ,  Hideki Gochou ,  Hisayuki Yazawa ,  Kiyoshi Kobayashi ,  Akira Koyama

发明人： Kiyoshi Sato ,  Toshinori Watanabe ,  Hideki Gochou ,  Hisayuki Yazawa ,  Kiyoshi Kobayashi ,  Akira Koyama

IPC分类号： G11B539

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10S977/934

摘要： A perpendicular magnetic recording head includes an auxiliary magnetic pole layer exposed at a surface facing a recording medium, a main magnetic pole layer deposited on the auxiliary magnetic pole layer with an insulating layer therebetween, a coil layer for applying a recording magnetic field to the auxiliary magnetic pole layer and the main magnetic pole layer, and a connecting layer placed on the auxiliary magnetic pole layer toward the back from the surface facing the recording medium. At the surface facing the recording medium, the upper base of the main magnetic pole layer is wider than the lower base so that the width in the track width direction of the main magnetic pole layer gradually increases with distance from the auxiliary magnetic pole layer. A method for making such a perpendicular magnetic recording head is also disclosed.

摘要翻译： 垂直磁记录头包括在面向记录介质的表面上暴露的辅助磁极层，沉积在其上具有绝缘层的辅助磁极层上的主磁极层，用于向辅助磁极层施加记录磁场的线圈层 磁极层和主磁极层，以及从面向记录介质的表面朝向辅助磁极层的连接层。 在面对记录介质的表面上，主磁极层的上基底比下基底宽，使得主磁极层的磁道宽度方向上的宽度随着与辅助磁极层的距离而逐渐增加。 还公开了一种用于制造这种垂直磁记录头的方法。