METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE
    2.
    发明申请
    METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE 审中-公开
    太阳能生产线的计量和检验套件

    公开(公告)号:US20100197051A1

    公开(公告)日:2010-08-05

    申请号:US12698559

    申请日:2010-02-02

    CPC classification number: H01L31/188 H01L31/022466 Y02E10/50

    Abstract: Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.

    Abstract translation: 本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。 在一个实施例中,该系统适于通过接受大的未处理衬底并执行多次沉积,材料去除,清洁,切片,结合以及各种检查和测试过程来形成薄膜太阳能电池器件,以形成多个完整,功能和测试 然后太阳能电池装置可以运送到最终用户以安装在期望的位置以发电。 在一个实施例中,系统提供在各种形成水平的太阳能电池装置的检查,同时收集和使用计量数据来诊断,调整或改进在制造太阳能电池装置期间的生产线工艺。

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