Vacuum arc deposition apparatus
    5.
    发明授权
    Vacuum arc deposition apparatus 失效
    真空电弧沉积设备

    公开(公告)号:US5744017A

    公开(公告)日:1998-04-28

    申请号:US357752

    申请日:1994-12-16

    CPC classification number: H01J37/32055 C23C14/325 H01J37/32623 H01J37/3266

    Abstract: A vacuum arc deposition apparatus includes arc power sources having cathodes connected to both ends of an evaporation source; exciting coils disposed at positions axially outwardly far from both the ends of the evaporation source so as to be coaxial with the evaporation source; and coil power sources independently connected to the exciting coils. In this apparatus, each of the coil power sources is capable of controlling the exciting current in such a manner that the film thickness and the consumption of the evaporation source are suitably distributed. Moreover, an arc containment device of the vacuum arc deposition apparatus includes an arc containment body having a diameter substantially the same as that of a cylindrical evaporation source, which is disposed at one end portion of the evaporation source.

    Abstract translation: 真空电弧沉积设备包括具有连接到蒸发源的两端的阴极的电弧光源; 励磁线圈设置在轴向向外远离蒸发源的两端的位置处,以与蒸发源同轴; 以及独立地连接到励磁线圈的线圈电源。 在该装置中,每个线圈电源能够以这样的方式控制励磁电流,使得膜厚度和蒸发源的消耗被适当地分布。 此外,真空电弧沉积设备的电弧容纳装置包括一个电弧容纳体,其具有与蒸发源的一个端部处的圆柱形蒸发源的直径基本相同的直径。

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