Spinel-structured metal oxide on a substrate and method of making same by molecular beam epitaxy

    公开(公告)号:US07001459B2

    公开(公告)日:2006-02-21

    申请号:US10653035

    申请日:2003-08-29

    申请人: Scott A. Chambers

    发明人: Scott A. Chambers

    IPC分类号: C30B25/02

    摘要: A method of making a spinel-structured metal oxide on a substrate by molecular beam epitaxy, comprising the step of supplying activated oxygen, a first metal atom flux, and at least one other metal atom flux to the surface of the substrate, wherein the metal atom fluxes are individually controlled at the substrate so as to grow the spinel-structured metal oxide on the substrate and the metal oxide is substantially in a thermodynamically stable state during the growth of the metal oxide. A particular embodiment of the present invention encompasses a method of making a spinel-structured binary ferrite, including Co ferrite, without the need of a post-growth anneal to obtain the desired equilibrium state.

    Method of adhesion between an oxide layer and a metal layer
    3.
    发明授权
    Method of adhesion between an oxide layer and a metal layer 有权
    氧化物层和金属层之间的粘附方法

    公开(公告)号:US06790476B1

    公开(公告)日:2004-09-14

    申请号:US10154224

    申请日:2002-05-21

    IPC分类号: C23C1606

    CPC分类号: C23C14/185 C23C14/024

    摘要: A method of controlling the wetting characteristics and increasing the adhesion between a metal and an oxide layer. By introducing a negatively-charged species to the surface of an oxide layer, layer-by-layer growth of metal deposited onto the oxide surface is promoted, increasing the adhesion strength of the metal-oxide interface. The negatively-charged species can either be deposited onto the oxide surface or a compound can be deposited that dissociates on, or reacts with, the surface to form the negatively-charged species. The deposited metal adatoms can thereby bond laterally to the negatively-charged species as well as vertically to the oxide surface as well as react with the negatively charged species, be oxidized, and incorporated on or into the surface of the oxide.

    摘要翻译: 控制润湿特性并增加金属和氧化物层之间的粘附性的方法。 通过向氧化物层的表面引入带负电荷的物质,促进沉积在氧化物表面上的金属逐层生长,增加金属氧化物界面的粘合强度。 带负电荷的物质可以沉积在氧化物表面上,或者可以沉积化合物,其与表面分离或与表面反应以形成带负电荷的物质。 沉积的金属吸附原子因此可以侧向地连接到带负电的物质以及垂直于氧化物表面,并且与带负电的物质反应,被氧化并且结合到氧化物的表面上或其中。