公开(公告)号：US06616987B1

公开(公告)日：2003-09-09

申请号：US09676366

申请日：2000-09-29

Applicant: Gregor Morfill ,  Hubertus Thomas ,  Timo Stuffler ,  Uwe Konopka

Inventor： Gregor Morfill ,  Hubertus Thomas ,  Timo Stuffler ,  Uwe Konopka

IPC: H05H102

CPC classification number: H01J37/32623 ,  H01J37/32321 ,  H01J37/32366

Abstract: A process for manipulating particles distributed substantially non-uniformly in a plasma of a carrier or reaction gas, wherein Coulomb interaction between the particles is so low that the particles substantially do not form a plasmacrystalline state, and the particles are exposed in a location-selective manner to external adjustment forces and/or the plasma conditions are subjected to a location-selective change to apply at least a portion of the particles onto a substrate surface mask-free and/or subject it to a location-selective plasma treatment in the carrier or reaction gas.

Abstract translation: 用于操纵在载体或反应气体的等离子体中基本不均匀分布的颗粒的方法，其中颗粒之间的库仑相互作用非常低，使得颗粒基本上不形成等离子体结晶状态，并且颗粒以位置选择性 对外部调节力和/或等离子体条件的方式进行位置选择性改变以将至少一部分颗粒施加到无掩模的基板表面上和/或使其在载体中进行位置选择性等离子体处理 或反应气体。

公开(公告)号：US06777880B2

公开(公告)日：2004-08-17

申请号：US10403202

申请日：2003-03-31

Applicant: Gregor Morfill ,  Hubertus Thomas ,  Timo Stuffler ,  Uwe Konopka

Inventor： Gregor Morfill ,  Hubertus Thomas ,  Timo Stuffler ,  Uwe Konopka

IPC: H01J724

CPC classification number: H01J37/32623 ,  H01J37/32321 ,  H01J37/32366

Abstract: A process for manipulating particles distributed substantially non-uniformly in a plasma of a carrier or reaction gas, wherein Coulomb interaction between the particles is so low that the particles substantially do not form a plasmacrystalline state, and the particles are exposed in a location-selective manner to external adjustment forces and/or the plasma conditions are subjected to a location-selective change to apply at least a portion of the particles onto a substrate surface mask-free and/or subject it to a location-selective plasma treatment in the carrier or reaction gas.

Abstract translation: 用于操纵在载体或反应气体的等离子体中基本不均匀分布的颗粒的方法，其中颗粒之间的库仑相互作用非常低，使得颗粒基本上不形成等离子体结晶状态，并且颗粒以位置选择性 对外部调节力和/或等离子体条件的方式进行位置选择性改变以将至少一部分颗粒施加到无掩模的基板表面上和/或使其在载体中进行位置选择性等离子体处理 或反应气体。

公开(公告)号：US06517912B1

公开(公告)日：2003-02-11

申请号：US09402295

申请日：1999-11-29

Applicant: Gregor Morfill ,  Hubertus Thomas ,  Timo Stuffler ,  Uwe Konopka

Inventor： Gregor Morfill ,  Hubertus Thomas ,  Timo Stuffler ,  Uwe Konopka

IPC: H05H102

CPC classification number: H05H3/04 ,  Y10S977/773 ,  Y10S977/84

Abstract: In a method for manipulating particles arranged in a plasma-cristalline state in a plasma of a carrier gas, the particles are at least partially subject to plasma treatment and/or applied to a substrate surface. A device for manipulating of particles in plasma-cristalline state includes a reaction vessel, in which plasma electrodes and at least one substrate are situated. An adaptive electrode for formation of a location selective low frequency or static electrical field in the reaction vessel is described.

Abstract translation: 在用于操作在载气等离子体中以等离子体 - 质子态排列的颗粒的方法中，颗粒至少部分地进行等离子体处理和/或施加到基板表面。 用于操作等离子体 - 晶体状态的颗粒的装置包括其中设置有等离子体电极和至少一个基板的反应容器。 描述了在反应容器中形成位置选择性低频或静电场的自适应电极。

公开(公告)号：US20080136332A1

公开(公告)日：2008-06-12

申请号：US11792740

申请日：2005-12-09

Applicant: Gregor Morfill ,  Uwe Konopka ,  Hubertus M. Thomas ,  Wolfgang Jacob ,  Beatrice Annaratone ,  Martin Fink ,  Noriyoshi Sato ,  Tetsuji Shimizu ,  Timo Stuffler

Inventor： Gregor Morfill ,  Uwe Konopka ,  Hubertus M. Thomas ,  Wolfgang Jacob ,  Beatrice Annaratone ,  Martin Fink ,  Noriyoshi Sato ,  Tetsuji Shimizu ,  Timo Stuffler

IPC: H05H1/00

CPC classification number: H01J37/32431 ,  H01J37/32036 ,  H01J37/32568

Abstract: A method for the operation of a plasma device (100) is described in which particles (2) are arranged in a plasma, wherein a generation of electric travelling waves (1) is provided, under whose effective action the particles (2) in the plasma device (100) perform a directed movement to at least one pre-determined collection area (20, 20A). A plasma device for carrying out the method is also described.

Abstract translation: 描述了等离子体装置（100）的操作方法，其中颗粒（2）布置在等离子体中，其中提供电行波（1）的产生，其中有效的作用是颗粒（2）在 等离子体装置（100）对至少一个预定的收集区域（20,20A）执行定向移动。 还描述了用于执行该方法的等离子体装置。

公开(公告)号：US07869556B2

公开(公告)日：2011-01-11

申请号：US11792740

申请日：2005-12-09

Applicant: Gregor Morfill ,  Uwe Konopka ,  Hubertus M. Thomas ,  Wolfgang Jacob ,  Beatrice Annaratone ,  Martin Fink ,  Noriyoshi Sato ,  Tetsuji Shimizu ,  Timo Stuffler

Inventor： Gregor Morfill ,  Uwe Konopka ,  Hubertus M. Thomas ,  Wolfgang Jacob ,  Beatrice Annaratone ,  Martin Fink ,  Noriyoshi Sato ,  Tetsuji Shimizu ,  Timo Stuffler

IPC: H05H1/18

CPC classification number: H01J37/32431 ,  H01J37/32036 ,  H01J37/32568

Abstract: A method for the operation of a plasma device (100) is described in which particles (2) are arranged in a plasma, wherein a generation of electric travelling waves (1) is provided, under whose effective action the particles (2) in the plasma device (100) perform a directed movement to at least one pre-determined collection area (20, 20A). A plasma device for carrying out the method is also described.

Abstract translation: 描述了等离子体装置（100）的操作方法，其中颗粒（2）布置在等离子体中，其中提供电行波（1）的产生，其中有效的作用是颗粒（2）在 等离子体装置（100）对至少一个预定的收集区域（20,20A）进行定向移动。 还描述了用于执行该方法的等离子体装置。