公开(公告)号：US20180079738A1

公开(公告)日：2018-03-22

申请号：US15558830

申请日：2015-03-18

Applicant: ADEKA CORPORATION

Inventor： Satoshi YANAGISAWA ,  Hitomi TODA ,  Koichi SHIGENO ,  Masaki KIMURA

IPC: C07D311/16 ,  C07C309/30 ,  C07C309/06 ,  G03F7/004 ,  C08G59/68

CPC classification number: C07D311/16 ,  C07C309/06 ,  C07C309/30 ,  C08G59/68 ,  C08G59/687 ,  G03F7/004 ,  G03F7/0045

Abstract: Provided are: an aromatic sulfonium salt compound which exhibits low corrosion to a substrate and excellent photolithographic characteristics and is thus useful as a photoacid generator and as a cationic polymerization agent; and a photoacid generator, a resist composition, a cationic polymerization initiator and a cationically polymerizable agent composition, which include the aromatic sulfonium salt compound. The aromatic sulfonium salt compound is represented by the following Formula (I): (wherein, R1 to R10 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, a nitro group, a cyano group, an alkyl group having 1 to 18 carbon atoms which is optionally substituted, or the like; R11 to R15 each independently represent a hydrogen atom, an alkoxy group having 1 to 18 carbon atoms which is optionally substituted, or the like; at least one of R11 to R15 is not a hydrogen atom; and X1− represents a monovalent organic sulfonate anion).

公开(公告)号：US20180079724A1

公开(公告)日：2018-03-22

申请号：US15558752

申请日：2015-03-18

Applicant: ADEKA CORPORATION

Inventor： Satoshi YANAGISAWA ,  Masaki KIMURA ,  Hitomi TODA ,  Koichi SHIGENO

IPC: C07D221/14 ,  G03F7/004 ,  G03F7/039 ,  G03F7/038 ,  C08G59/50

CPC classification number: C07D221/14 ,  C08G59/38 ,  C08G59/506 ,  G03F7/004 ,  G03F7/0045 ,  G03F7/038 ,  G03F7/039

Abstract: Provide are: a sulfonic acid derivative compound which has high absorbance for light having a wavelength of 365 nm and exhibits high solubility in organic solvents and good acid generation rate; a photoacid generator; a resist composition; a cationic polymerization initiator; and a cationically polymerizable composition. The sulfonic acid derivative compound is represented by the following Formula (I): (wherein, X represents a linear or branched alkyl group having 1 to 14 carbon atoms; and R represents an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an aryl group having 6 to 20 carbon atoms, an arylalkyl group having 7 to 20 carbon atoms, an acyl group-substituted aryl group having 7 to 20 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, a 10-camphoryl group or the like).