公开(公告)号：US20180079724A1

公开(公告)日：2018-03-22

申请号：US15558752

申请日：2015-03-18

Applicant: ADEKA CORPORATION

Inventor： Satoshi YANAGISAWA ,  Masaki KIMURA ,  Hitomi TODA ,  Koichi SHIGENO

IPC: C07D221/14 ,  G03F7/004 ,  G03F7/039 ,  G03F7/038 ,  C08G59/50

CPC classification number: C07D221/14 ,  C08G59/38 ,  C08G59/506 ,  G03F7/004 ,  G03F7/0045 ,  G03F7/038 ,  G03F7/039

Abstract: Provide are: a sulfonic acid derivative compound which has high absorbance for light having a wavelength of 365 nm and exhibits high solubility in organic solvents and good acid generation rate; a photoacid generator; a resist composition; a cationic polymerization initiator; and a cationically polymerizable composition. The sulfonic acid derivative compound is represented by the following Formula (I): (wherein, X represents a linear or branched alkyl group having 1 to 14 carbon atoms; and R represents an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an aryl group having 6 to 20 carbon atoms, an arylalkyl group having 7 to 20 carbon atoms, an acyl group-substituted aryl group having 7 to 20 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, a 10-camphoryl group or the like).

公开(公告)号：US20180079738A1

公开(公告)日：2018-03-22

申请号：US15558830

申请日：2015-03-18

Applicant: ADEKA CORPORATION

Inventor： Satoshi YANAGISAWA ,  Hitomi TODA ,  Koichi SHIGENO ,  Masaki KIMURA

IPC: C07D311/16 ,  C07C309/30 ,  C07C309/06 ,  G03F7/004 ,  C08G59/68

CPC classification number: C07D311/16 ,  C07C309/06 ,  C07C309/30 ,  C08G59/68 ,  C08G59/687 ,  G03F7/004 ,  G03F7/0045

Abstract: Provided are: an aromatic sulfonium salt compound which exhibits low corrosion to a substrate and excellent photolithographic characteristics and is thus useful as a photoacid generator and as a cationic polymerization agent; and a photoacid generator, a resist composition, a cationic polymerization initiator and a cationically polymerizable agent composition, which include the aromatic sulfonium salt compound. The aromatic sulfonium salt compound is represented by the following Formula (I): (wherein, R1 to R10 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, a nitro group, a cyano group, an alkyl group having 1 to 18 carbon atoms which is optionally substituted, or the like; R11 to R15 each independently represent a hydrogen atom, an alkoxy group having 1 to 18 carbon atoms which is optionally substituted, or the like; at least one of R11 to R15 is not a hydrogen atom; and X1− represents a monovalent organic sulfonate anion).

公开(公告)号：US20150315153A1

公开(公告)日：2015-11-05

申请号：US14647683

申请日：2013-11-27

Applicant: ADEKA CORPORATION

Inventor： Satoshi YANAGISAWA ,  Shohei FUJITA ,  Takuya MINAMISHIMA ,  Koichi SHIGENO

IPC: C07D221/14 ,  G03F7/004

CPC classification number: C07D221/14 ,  G03F7/0045 ,  G03F7/038 ,  G03F7/0385

Abstract: Provided are: a compound which shows large absorption for light having a wavelength of 365 nm and has good acid generation rate; and a photoacid generator, cationic polymerization initiator, resist composition and cationically polymerizable composition that use the compound. The sulfonic acid derivative compound of the present invention is characterized by being represented by the following Formula (I): (wherein, X represents a linear or branched alkyl group having 1 to 14 carbon atoms; and R represents an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an aryl group having 6 to 20 carbon atoms, an arylalkyl group having 7 to 20 carbon atoms, an aryl group having 7 to 20 carbon atoms which is substituted with an acyl group, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, 10-camphoryl group or a group represented by the following Formula (II), which aliphatic hydrocarbon group, aryl group, arylalkyl group or alicyclic hydrocarbon group is unsubstituted or substituted with a group selected from a halogen atom, a halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 18 carbon atoms and an alkylthio group having 1 to 18 carbon atoms).

Abstract translation: 提供：对波长365nm的光具有大的吸收并且具有良好的酸产生速率的化合物; 以及使用该化合物的光致酸产生剂，阳离子聚合引发剂，抗蚀剂组合物和阳离子聚合性组合物。 本发明的磺酸衍生物的特征在于由下式（I）表示：（其中，X表示碳原子数1〜14的直链或支链烷基，R表示1〜 碳原子数为6〜20的芳基，碳原子数为7〜20的芳烷基，被酰基取代的碳原子数7〜20的芳基，碳数为3〜12的脂环族烃基 原子，10-樟脑基或下述式（II）表示的基团，所述脂肪族烃基，芳基，芳烷基或脂环族烃基未被取代或被选自卤素原子，卤代烷基， 1〜4个碳原子的烷氧基，碳原子数1〜18的烷氧基和碳原子数1〜18的烷硫基）。