公开(公告)号：US20150315153A1

公开(公告)日：2015-11-05

申请号：US14647683

申请日：2013-11-27

Applicant: ADEKA CORPORATION

Inventor： Satoshi YANAGISAWA ,  Shohei FUJITA ,  Takuya MINAMISHIMA ,  Koichi SHIGENO

IPC: C07D221/14 ,  G03F7/004

CPC classification number: C07D221/14 ,  G03F7/0045 ,  G03F7/038 ,  G03F7/0385

Abstract: Provided are: a compound which shows large absorption for light having a wavelength of 365 nm and has good acid generation rate; and a photoacid generator, cationic polymerization initiator, resist composition and cationically polymerizable composition that use the compound. The sulfonic acid derivative compound of the present invention is characterized by being represented by the following Formula (I): (wherein, X represents a linear or branched alkyl group having 1 to 14 carbon atoms; and R represents an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an aryl group having 6 to 20 carbon atoms, an arylalkyl group having 7 to 20 carbon atoms, an aryl group having 7 to 20 carbon atoms which is substituted with an acyl group, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, 10-camphoryl group or a group represented by the following Formula (II), which aliphatic hydrocarbon group, aryl group, arylalkyl group or alicyclic hydrocarbon group is unsubstituted or substituted with a group selected from a halogen atom, a halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 18 carbon atoms and an alkylthio group having 1 to 18 carbon atoms).

Abstract translation: 提供：对波长365nm的光具有大的吸收并且具有良好的酸产生速率的化合物; 以及使用该化合物的光致酸产生剂，阳离子聚合引发剂，抗蚀剂组合物和阳离子聚合性组合物。 本发明的磺酸衍生物的特征在于由下式（I）表示：（其中，X表示碳原子数1〜14的直链或支链烷基，R表示1〜 碳原子数为6〜20的芳基，碳原子数为7〜20的芳烷基，被酰基取代的碳原子数7〜20的芳基，碳数为3〜12的脂环族烃基 原子，10-樟脑基或下述式（II）表示的基团，所述脂肪族烃基，芳基，芳烷基或脂环族烃基未被取代或被选自卤素原子，卤代烷基， 1〜4个碳原子的烷氧基，碳原子数1〜18的烷氧基和碳原子数1〜18的烷硫基）。

公开(公告)号：US20220137507A1

公开(公告)日：2022-05-05

申请号：US17425308

申请日：2020-01-22

Applicant: ADEKA CORPORATION

Inventor： Toshihiko MURAI ,  Shohei FUJITA ,  Junya MIYAKE ,  Izumi MATSUI ,  Konomi OTSUKA

IPC: G03F7/004 ,  C07C309/73 ,  C07C309/65 ,  G03F7/039 ,  G03F7/038

Abstract: A compound represented by formula (A) exhibits excellent balance between acid generation sensitivity and capability of providing a composition with reduced discoloration. In formula (A), R1, R11, R12, R13, R14, R15, R16, R17, and n are as defined in the description. R1 is preferably an optionally substituted aliphatic hydrocarbon group having 1 to 20 carbon atoms or an optionally substituted aromatic hydrocarbon group having 6 to 20 carbon atoms.