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公开(公告)号：US10068748B2
公开(公告)日：2018-09-04
申请号：US15371332
申请日：2016-12-07
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Yoram Uziel , Benzion Sender , Doron Aspir , Yohanan Madmon , Ron Naftali , Yuri Belenky
CPC classification number: H01J37/28 , G06T7/0004 , G06T2207/30148 , H01J37/20 , H01J2237/20228 , H01J2237/2817
Abstract: A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.
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公开(公告)号：US20170084425A1
公开(公告)日：2017-03-23
申请号：US15371332
申请日：2016-12-07
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Yoram Uziel , Benzion Sender , Doron Aspir , Yohanan Madmon , Ron Naftali , Yuri Belenky
CPC classification number: H01J37/28 , G06T7/0004 , G06T2207/30148 , H01J37/20 , H01J2237/20228 , H01J2237/2817
Abstract: A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.
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