公开(公告)号：US12106936B2

公开(公告)日：2024-10-01

申请号：US18214355

申请日：2023-06-26

申请人： Applied Materials, Inc.

发明人： Peter F. Kurunczi ,  Morgan Evans ,  Joseph C. Olson ,  Christopher A. Rowland ,  James Buonodono

IPC分类号： H01J37/20 ,  H01J37/08 ,  H01J37/305

CPC分类号： H01J37/3053 ,  H01J37/08 ,  H01J37/20 ,  H01J2237/0041 ,  H01J2237/0822 ,  H01J2237/20228 ,  H01J2237/3174

摘要： A system may include a substrate stage, configured to support a substrate, where a main surface of the substrate defines a substrate plane. The system may include an ion source, including an extraction assembly that is oriented to direct an ion beam to the substrate along a trajectory defining a non-zero angle of incidence with respect to a perpendicular to the substrate plane. The system may include a radical source oriented to direct a radical beam to the substrate along a trajectory defining the non-zero angle of incidence with respect to a perpendicular to the substrate plane. The substrate stage may be further configured to scan the substrate along a first direction, lying with the substrate plane, while the main surface of the substrate is oriented within the substrate plane.

公开(公告)号：US20240153734A1

公开(公告)日：2024-05-09

申请号：US18324437

申请日：2023-05-26

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： YEOSEON CHOI ,  DONGHOON KWON

IPC分类号： H01J37/20 ,  H01J37/26

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20278 ,  H01J2237/204

摘要： A sample holder for a transmission electron microscope may include: a column part that extends in a first direction; a stage configured to receive a sample, the stage disposed at a first end portion of the column part; a motor part disposed at a second end portion of the column part; and a thermoelectric cooling device disposed inside the column part.

公开(公告)号：US09859097B2

公开(公告)日：2018-01-02

申请号：US15224167

申请日：2016-07-29

申请人： The Board of Trustees of the Leland Stanford Junior University

发明人： R. Fabian W. Pease ,  Manu Prakash ,  James Stanley Cybulski ,  Alireza Nojeh

IPC分类号： H01J37/26 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/065 ,  H01J37/073 ,  H01J37/075 ,  H01J37/141 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/061 ,  H01J2237/06308 ,  H01J2237/06333 ,  H01J2237/1035 ,  H01J2237/14 ,  H01J2237/164 ,  H01J2237/18 ,  H01J2237/20228 ,  H01J2237/2608 ,  H01J2237/262 ,  H01J2237/28 ,  H01J2237/2803

摘要： A permanently sealed vacuum tube is used to provide the electrons for an electron microscope. This advantageously allows use of low vacuum at the sample, which greatly simplifies the overall design of the system. There are two main variations. In the first variation, imaging is provided by mechanically scanning the sample. In the second variation, imaging is provided by point projection. In both cases, the electron beam is fixed and does not need to be scanned during operation of the microscope. This also greatly simplifies the overall system.

公开(公告)号：US20170358422A1

公开(公告)日：2017-12-14

申请号：US15615289

申请日：2017-06-06

申请人： Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

发明人： PENG LIU ,  WEI ZHAO ,  XIAO-YANG LIN ,  DUAN-LIANG ZHOU ,  CHUN-HAI ZHANG ,  KAI-LI JIANG ,  SHOU-SHAN FAN

IPC分类号： H01J37/295 ,  H01J37/18 ,  H01J37/22 ,  H01J37/20

CPC分类号： H01J37/295 ,  G01N23/20058 ,  H01J37/18 ,  H01J37/20 ,  H01J37/222 ,  H01J37/265 ,  H01J2237/0245 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/1825 ,  H01J2237/20 ,  H01J2237/20228 ,  H01J2237/2447

摘要： The disclosure relates to a low energy electron microscopy. The electron microscopy includes a vacuum chamber; an electron gun used to emit electron beam; a diffraction chamber; an imaging device; a sample holder used to fix two-dimensional nanomaterial sample; a vacuum pumping device; and a control computer. The electron beam transmits the sample to form a transmission electron beam and diffraction electron beam. The control computer includes a switching module to switch the work mode between a large beam spot diffraction imaging mode and small beam spot diffraction imaging mode.

公开(公告)号：US20170084425A1

公开(公告)日：2017-03-23

申请号：US15371332

申请日：2016-12-07

申请人： APPLIED MATERIALS ISRAEL LTD.

发明人： Yoram Uziel ,  Benzion Sender ,  Doron Aspir ,  Yohanan Madmon ,  Ron Naftali ,  Yuri Belenky

IPC分类号： H01J37/28 ,  H01J37/20 ,  G06T7/00

CPC分类号： H01J37/28 ,  G06T7/0004 ,  G06T2207/30148 ,  H01J37/20 ,  H01J2237/20228 ,  H01J2237/2817

摘要： A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.

公开(公告)号：US20170062179A1

公开(公告)日：2017-03-02

申请号：US15224167

申请日：2016-07-29

申请人： The Board of Trustees of the Leland Stanford Junior University

发明人： R. Fabian W. Pease ,  Manu Prakash ,  James Stanley Cybulski

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  H01J37/065 ,  H01J37/073 ,  H01J37/075 ,  H01J37/141 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/061 ,  H01J2237/06308 ,  H01J2237/06333 ,  H01J2237/1035 ,  H01J2237/14 ,  H01J2237/164 ,  H01J2237/18 ,  H01J2237/20228 ,  H01J2237/2608 ,  H01J2237/262 ,  H01J2237/28 ,  H01J2237/2803

摘要： A permanently sealed vacuum tube is used to provide the electrons for an electron microscope. This advantageously allows use of low vacuum at the sample, which greatly simplifies the overall design of the system. There are two main variations. In the first variation, imaging is provided by mechanically scanning the sample. In the second variation, imaging is provided by point projection. In both cases, the electron beam is fixed and does not need to be scanned during operation of the microscope. This also greatly simplifies the overall system.

摘要翻译： 永久密封的真空管用于为电子显微镜提供电子。 这有利地允许在样品处使用低真空，这极大地简化了系统的整体设计。 有两个主要的变化。 在第一变型中，通过机械扫描样品来提供成像。 在第二变型中，通过点投影提供成像。 在这两种情况下，电子束是固定的，并且在显微镜的操作期间不需要扫描。 这也大大简化了整个系统。

公开(公告)号：US20160322195A1

公开(公告)日：2016-11-03

申请号：US15207024

申请日：2016-07-11

申请人： APPLIED MATERIALS ISRAEL, LTD. ,  Applied Materials, Inc.

发明人： Benzion Sender ,  Alon Litman

IPC分类号： H01J37/26 ,  H01J37/28

CPC分类号： H01J37/265 ,  H01J2237/15 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/28

摘要： A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system comprises: an irradiation module having charged particle optics; a stage for introducing a relative movement between the substrate and the charged particle optics; an imaging module for collecting electrons emanating from the substrate in response to a scanning of the regions of interest by the one or more charged particle beams; and wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering relative movements introduced between the substrate and the charged particle optics during the scanning of the regions of interest.

摘要翻译： 一种用于使用一个或多个带电粒子束扫描衬底的多个感兴趣区域的系统，所述系统包括：具有带电粒子光学器件的照射模块; 用于在衬底和带电粒子光学器件之间引入相对运动的阶段; 成像模块，用于响应于所述一个或多个带电粒子束对感兴趣区域的扫描，收集从衬底发射的电子; 并且其中带电粒子光学器件被布置成在感兴趣区域的扫描期间执行带电粒子束的反向运动，从而抵抗在感兴趣区域的扫描期间在衬底和带电粒子光学器件之间引入的相对运动。

公开(公告)号：US09466462B2

公开(公告)日：2016-10-11

申请号：US14153923

申请日：2014-01-13

申请人： APPLIED MATERIALS ISRAEL, LTD.

发明人： Benzion Sender ,  Alon Litman

IPC分类号： H01J37/26

CPC分类号： H01J37/265 ,  H01J2237/15 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/28

摘要： A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system may include: an irradiation module having charged particle optics; a stage for introducing a relative movement between the substrate and the charged particle optics; an imaging module for collecting electrons emanating from the substrate in response to a scanning of the regions of interest by the one or more charged particle beams; and wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering relative movements introduced between the substrate and the charged particle optics during the scanning of the regions of interest.

摘要翻译： 一种用于使用一个或多个带电粒子束扫描衬底的多个感兴趣区域的系统，所述系统可以包括：具有带电粒子光学器件的照射模块; 用于在衬底和带电粒子光学器件之间引入相对运动的阶段; 成像模块，用于响应于所述一个或多个带电粒子束对感兴趣区域的扫描，收集从衬底发射的电子; 并且其中带电粒子光学器件被布置成在感兴趣区域的扫描期间执行带电粒子束的反向运动，从而抵抗在感兴趣区域的扫描期间在衬底和带电粒子光学器件之间引入的相对运动。

公开(公告)号：US09368314B2

公开(公告)日：2016-06-14

申请号：US14319620

申请日：2014-06-30

申请人： EBARA CORPORATION

发明人： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Toshifumi Kimba ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Shin Oowada ,  Mutsumi Saito ,  Yuichiro Yamazaki ,  Takamitsu Nagai ,  Ichirota Nagahama

IPC分类号： G01N23/225 ,  H01J29/70 ,  H01J37/06 ,  H01J37/073 ,  H01J37/18 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01L21/67 ,  G01N23/227 ,  H01J37/26 ,  H01J37/141

CPC分类号： H01J29/70 ,  G01N23/225 ,  G01N23/2251 ,  G01N23/227 ,  H01J37/06 ,  H01J37/073 ,  H01J37/141 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/266 ,  H01J37/28 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L21/6719 ,  H01L21/67213

摘要： An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical systems; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader 60 for transferring the object to the stage system through the loading chambers.

摘要翻译： 电子束检查装置包括：电子光学装置70，具有用于从电子束源向一个电子束照射物体的电子 - 光学系统;以及用于检测由电子束投射的二次电子图像的检测器， 光学系统; 用于相对于电子 - 光学系统保持和移动物体的平台系统50; 小型环境室20，用于向物体供给清洁气体，以防止灰尘与物体接触; 用于容纳平台装置的工作室31，工作室可控制为具有真空气氛; 设置在微环境室和工作室之间的至少两个装载室41,42适于独立控制以具有真空气氛; 以及用于通过装载室将物体传送到舞台系统的装载器60。

公开(公告)号：US09147551B2

公开(公告)日：2015-09-29

申请号：US14298919

申请日：2014-06-07

申请人： FEI Company

发明人： Uwe Luecken ,  Remco Schoenmakers ,  Johannes Antonius Maria van den Oetelaar

IPC分类号： H01J37/20 ,  G01N23/04 ,  H01J37/22 ,  H01J37/28

CPC分类号： H01J37/20 ,  G01N23/046 ,  H01J37/22 ,  H01J37/28 ,  H01J2237/20207 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20264 ,  H01J2237/20285 ,  H01J2237/2802

摘要： The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50-100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.

摘要翻译： 本发明涉及电子断层摄影的改进方法。 电子断层摄影是一个耗时的过程，因为必须获取通常在50-100幅图像之间的大量图像，以形成一个断层图像。 本发明教导了一种方法，通过不断地逐步倾斜样品来缩短通过连续倾斜样本来更快地获取这个量的图像所需的时间。 因此消除了在步骤之间减少振动所需的时间。