公开(公告)号：US10068748B2

公开(公告)日：2018-09-04

申请号：US15371332

申请日：2016-12-07

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Yoram Uziel ,  Benzion Sender ,  Doron Aspir ,  Yohanan Madmon ,  Ron Naftali ,  Yuri Belenky

IPC: H01J37/28 ,  H01J37/20 ,  G06T7/00

CPC classification number: H01J37/28 ,  G06T7/0004 ,  G06T2207/30148 ,  H01J37/20 ,  H01J2237/20228 ,  H01J2237/2817

Abstract: A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.

公开(公告)号：US10074512B2

公开(公告)日：2018-09-11

申请号：US14795795

申请日：2015-07-09

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Chun-Hsiang Yen ,  Barak Dee-Noor ,  Yuval Gronau ,  Ronen Hagai ,  Efim Vinnitsky ,  Yohanan Madmon

IPC: G05D23/00 ,  H01J37/24 ,  H01J37/20 ,  H01L21/67 ,  H01L21/68 ,  G03F7/20 ,  H01L21/66

CPC classification number: H01J37/24 ,  G03F7/70875 ,  H01J37/20 ,  H01J2237/002 ,  H01J2237/20278 ,  H01L21/67248 ,  H01L21/68 ,  H01L22/12

Abstract: A system that may include a chamber, a motorized system, a chuck, a controller, multiple temperature sensors and a cooling module; wherein the chuck is configured to support an object that is positioned within the chamber; wherein the motorized system is configured to move the chuck in relation to the chamber; wherein the multiple temperature sensors are configured to sense multiple temperatures of at least one point within the chamber; wherein the cooling module is configured to cool a unit of the motorized system; and wherein the controller is configured to control the cooling module in response to the multiple temperatures.

公开(公告)号：US09817208B1

公开(公告)日：2017-11-14

申请号：US15271093

申请日：2016-09-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Efim Vinnitsky ,  Samuel Ives Nackash ,  Yohanan Madmon

IPC: H01J37/20 ,  H01J37/16 ,  G03F7/00 ,  G02B7/18 ,  G01B11/14 ,  G01B9/02 ,  H01J37/28

CPC classification number: G02B7/181 ,  G01B5/0004 ,  G01B11/026 ,  G01B15/00 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2007

Abstract: A chuck interface that includes a mirror; an inner surface that is shaped and sized to match a portion of a sidewall of a chuck; wherein the inner surface is mechanically coupled to the mirror; and at least one interfacing element for assisting in attaching the chuck to the mirror; and wherein a difference between a thermal expansion coefficient of the chuck and a thermal expansion coefficient of the mirror does not exceed 0.5 micron*Kelvin per Meter.

公开(公告)号：US20170084425A1

公开(公告)日：2017-03-23

申请号：US15371332

申请日：2016-12-07

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Yoram Uziel ,  Benzion Sender ,  Doron Aspir ,  Yohanan Madmon ,  Ron Naftali ,  Yuri Belenky

IPC: H01J37/28 ,  H01J37/20 ,  G06T7/00

CPC classification number: H01J37/28 ,  G06T7/0004 ,  G06T2207/30148 ,  H01J37/20 ,  H01J2237/20228 ,  H01J2237/2817

Abstract: A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.

公开(公告)号：US20170011882A1

公开(公告)日：2017-01-12

申请号：US14795795

申请日：2015-07-09

Applicant: Applied Materials Israel, Ltd.

Inventor： Chun-Hsiang Yen ,  Barak Dee-Noor ,  Yuval Gronau ,  Ronen Hagai ,  Efim Vinnitsky ,  Yohanan Madmon

IPC: H01J37/24 ,  H01J37/20 ,  H05K7/20

CPC classification number: H01J37/24 ,  G03F7/70875 ,  H01J37/20 ,  H01J2237/002 ,  H01J2237/20278 ,  H01L21/67248 ,  H01L21/68 ,  H01L22/12

Abstract: A system that may include a chamber, a motorized system, a chuck, a controller, multiple temperature sensors and a cooling module; wherein the chuck is configured to support an object that is positioned within the chamber; wherein the motorized system is configured to move the chuck in relation to the chamber; wherein the multiple temperature sensors are configured to sense multiple temperatures of at least one point within the chamber; wherein the cooling module is configured to cool a unit of the motorized system; and wherein the controller is configured to control the cooling module in response to the multiple temperatures.

Abstract translation: 可以包括室，电动系统，卡盘，控制器，多个温度传感器和冷却模块的系统; 其中所述卡盘被构造成支撑位于所述腔室内的物体; 其中所述电动系统被配置成相对于所述室移动所述卡盘; 其中所述多个温度传感器被配置为感测所述室内的至少一个点的多个温度; 其中所述冷却模块被配置为冷却所述电动系统的单元; 并且其中所述控制器被配置为响应于所述多个温度来控制所述冷却模块。