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1.发明申请公开(公告)号：US20180284031A1
公开(公告)日：2018-10-04
申请号：US15474210
申请日：2017-03-30
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Amir Shoham , Ido Dolev , Yariv Simovitch
IPC: G01N21/88 , G06K9/00 , G06T7/00 , G01N21/956
Abstract: A computer program product, a computerized method for configuring an inspection system and an inspection system. The inspection system may include an image acquisition module that comprises illumination optics and collection optics, a controller; and a processor. The image acquisition module may be arranged to acquire a group of first images of an object segment. Different first images of the group of first images are acquired while the inspection system is configured with different polarization configurations that belong to a first group of polarization configurations. The processor may be arranged to determine polarization parameters of different points within the object segment; wherein the determining is based on the group of first images and the different polarization configurations and calculate, based on the polarization parameters of the different points, a group of second images of the object segment that would be acquired when the inspection system is configured according to different polarization configurations that belong to a second group of polarization configurations.
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公开(公告)号：US10481101B2
公开(公告)日：2019-11-19
申请号：US15412879
申请日：2017-01-23
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Haim Feldman , Boris Golberg , Ido Dolev
Abstract: An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.
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公开(公告)号：US20170205359A1
公开(公告)日：2017-07-20
申请号：US15001099
申请日：2016-01-19
Applicant: Applied Materials Israel, Ltd.
Inventor： Harel Ilan , Ido Kofler , Ido Dolev
IPC: G01N21/95
CPC classification number: G01N21/9505 , G01N21/93 , G01N21/9501 , G01N21/956
Abstract: An inspection system that may include a first detection module, an illumination and collection module, and a processor. The illumination and collection module and the first detection module may be configured to execute one or more illumination and collection iterations. Each inspection iteration may include: illuminating with illuminating radiation multiple points of an object; (ii) directing first collected radiation from the multiple points of the object through one or more first exit pupil regions towards the first detection module; and (iii) generating first detection signals that may be indicative of the first collected radiation. The processor may be configured to process the first detection signals to provide a first mapping between (i) a characteristic of radiation at the first exit pupil, (ii) the multiple points of the object, and (iii) the multiple first exit pupil regions.
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公开(公告)号：US09354212B2
公开(公告)日：2016-05-31
申请号：US14149645
申请日：2014-01-07
Applicant: APPLIED MATERIALS ISRAEL, LTD.
Inventor： Yoav Berlatzky , Amir Shoham , Ido Dolev
CPC classification number: G01N33/00 , G01N21/8806 , G01N2021/8822 , G01N2033/0095
Abstract: A method and an apparatus that may include optics that is arranged to illuminate a surface of a sample with radiation and to collect reflected radiation from the surface of the sample; wherein the optics includes a pupil that has multiple pupil segments that correspond to different angular regions of collection or illumination; and a detection module arranged to receive the reflected radiation and generate, for each pupil segment, pupil segment detection signals.
Abstract translation: 一种方法和装置，其可以包括被布置成用辐射照射样品表面并收集来自样品表面的反射辐射的光学器件; 其中所述光学器件包括具有对应于收集或照明的不同角度区域的多个光瞳段的光瞳; 以及检测模块，布置成接收反射的辐射并且为每个瞳孔段产生瞳孔段检测信号。
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公开(公告)号：US11029253B2
公开(公告)日：2021-06-08
申请号：US15474210
申请日：2017-03-30
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Amir Shoham , Ido Dolev , Yariv Simovitch
IPC: G01N21/21 , G01N21/88 , G06T7/00 , G01N21/956
Abstract: A computer program product, a computerized method for configuring an inspection system and an inspection system. The inspection system may include an image acquisition module that comprises illumination optics and collection optics, a controller; and a processor. The image acquisition module may be arranged to acquire a group of first images of an object segment. Different first images of the group of first images are acquired while the inspection system is configured with different polarization configurations that belong to a first group of polarization configurations. The processor may be arranged to determine polarization parameters of different points within the object segment; wherein the determining is based on the group of first images and the different polarization configurations and calculate, based on the polarization parameters of the different points, a group of second images of the object segment that would be acquired when the inspection system is configured according to different polarization configurations that belong to a second group of polarization configurations.
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Patent Agency Ranking
公开(公告)号：US20180209915A1
公开(公告)日：2018-07-26
申请号：US15412879
申请日：2017-01-23
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Haim Feldman , Boris Golberg , Ido Dolev
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G02B21/0016 , G02B21/06 , G02B26/0891 , G02B27/0911 , G02B27/0972
Abstract: An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.
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公开(公告)号：US09535014B1
公开(公告)日：2017-01-03
申请号：US14800625
申请日：2015-07-15
Applicant: Applied Materials Israel, Ltd.
Inventor： Haim Feldman , Ido Dolev , Ido Almog
CPC classification number: G01N21/9501 , G01N21/956 , G01N2021/95676 , G02B26/123 , G02B26/124 , G03F1/84
Abstract: A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
Abstract translation: 一种系统，包括照明模块，该照明模块包括：（a）第一行进透镜声光装置; （b）用于照亮第一移动透镜以提供沿着第一方向传播的输入光束的光源; （c）用于输出在第二方向扫描物体的输出光束的照明光学器件; 检测单元; 以及收集模块，用于从所述物体收集收集的光束，其中所述收集的光束沿着第三方向传播; 并且将所收集的光束光学操纵以提供反向扫描光束指向检测单元，并且具有位于相同位置的焦点，而不管收集的光束沿着第三方向的传播。
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公开(公告)号：US09846128B2
公开(公告)日：2017-12-19
申请号：US15001099
申请日：2016-01-19
Applicant: Applied Materials Israel, Ltd.
Inventor： Harel Ilan , Ido Kofler , Ido Dolev
IPC: G01N21/95
CPC classification number: G01N21/9505 , G01N21/93 , G01N21/9501 , G01N21/956
Abstract: An inspection system that may include a first detection module, an illumination and collection module, and a processor. The illumination and collection module and the first detection module may be configured to execute one or more illumination and collection iterations. Each inspection iteration may include: illuminating with illuminating radiation multiple points of an object; (ii) directing first collected radiation from the multiple points of the object through one or more first exit pupil regions towards the first detection module; and (iii) generating first detection signals that may be indicative of the first collected radiation. The processor may be configured to process the first detection signals to provide a first mapping between (i) a characteristic of radiation at the first exit pupil, (ii) the multiple points of the object, and (iii) the multiple first exit pupil regions.
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公开(公告)号：US20170016834A1
公开(公告)日：2017-01-19
申请号：US14800625
申请日：2015-07-15
Applicant: Applied Materials Israel, Ltd.
Inventor： Haim Feldman , Ido Dolev , Ido Almog
CPC classification number: G01N21/9501 , G01N21/956 , G01N2021/95676 , G02B26/123 , G02B26/124 , G03F1/84
Abstract: A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
Abstract translation: 一种系统，包括照明模块，该照明模块包括：（a）第一行进透镜声光装置; （b）用于照亮第一移动透镜以提供沿着第一方向传播的输入光束的光源; （c）用于输出在第二方向扫描物体的输出光束的照明光学器件; 检测单元; 以及收集模块，用于从所述物体收集收集的光束，其中所述收集的光束沿着第三方向传播; 并且将所收集的光束光学操纵以提供反向扫描光束指向检测单元，并且具有位于相同位置的焦点，而不管收集的光束沿着第三方向的传播。
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公开(公告)号：US20150193926A1
公开(公告)日：2015-07-09
申请号：US14149645
申请日：2014-01-07
Applicant: APPLIED MATERIALS ISRAEL, LTD.
Inventor： Yoav Berlatzky , Amir Shoham , Ido Dolev
CPC classification number: G01N33/00 , G01N21/8806 , G01N2021/8822 , G01N2033/0095
Abstract: A method and an apparatus that may include optics that is arranged to illuminate a surface of a sample with radiation and to collect reflected radiation from the surface of the sample; wherein the optics includes a pupil that has multiple pupil segments that correspond to different angular regions of collection or illumination; and a detection module arranged to receive the reflected radiation and generate, for each pupil segment, pupil segment detection signals.
Abstract translation: 一种方法和装置，其可以包括被布置成用辐射照射样品表面并收集来自样品表面的反射辐射的光学器件; 其中所述光学器件包括具有对应于收集或照明的不同角度区域的多个光瞳段的光瞳; 以及检测模块，布置成接收反射的辐射并且为每个瞳孔段产生瞳孔段检测信号。
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