公开(公告)号：US20240068097A1

公开(公告)日：2024-02-29

申请号：US18452725

申请日：2023-08-21

Applicant: ASM IP Holding B.V.

Inventor： Subir Parui ,  Werner Knaepen ,  Dieter Pierreux ,  Kelly Houben ,  Herbert Terhorst ,  Theodorus G.M. Oosterlaken ,  Angelos Karagiannis

IPC: C23C16/455 ,  C23C16/44 ,  C23C16/458 ,  C23C16/52

CPC classification number: C23C16/45574 ,  C23C16/4412 ,  C23C16/45546 ,  C23C16/4584 ,  C23C16/52

Abstract: A substrate processing apparatus configured to from a layer on a plurality of substrates is disclosed. Embodiments of the presently described substrate processing apparatus comprise a process chamber. The process chamber comprises process space for receiving a substrate boat arranged for holding the plurality of substrates. The substrate processing apparatus further comprise a gas delivery assembly comprising at least one gas injector; a gas exhaust assembly comprising two gas outlets. The two gas outlets are positioned at a distance on either side of the at least one gas injector.