公开(公告)号：US20170277045A1

公开(公告)日：2017-09-28

申请号：US15528693

申请日：2015-11-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Jasper MENGER ,  Paul Cornelis Hubertus ABEN ,  Everhardus Cornelis MOS

IPC: G03F9/00

CPC classification number: G03F9/7046

Abstract: Metrology measurements are performed on substrates that have been subjected to lithographic processing. Model parameters are calculated by fitting the measurements to an extended high-order substrate model defined using a combination of basis functions that include an edge basis function related to a substrate edge. A radial edge basis function may be expressed in terms of distance from a substrate edge. The edge basis function may, for example, be an exponential decay function or a rational function. Lithographic processing of a subsequent substrate is controlled using the calculated high-order substrate model parameters, in combination with low-order substrate model parameters obtained by fitting inline measurements to a low order model.

公开(公告)号：US20210191286A1

公开(公告)日：2021-06-24

申请号：US17111050

申请日：2020-12-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Jasper MENGER ,  Paul Cornelis Hubertus ABEN ,  Everhardus Cornelis MOS

IPC: G03F9/00

Abstract: Offline metrology measurements are performed on substrates that have been subjected to lithographic processing. Model parameters are calculated by fitting the measurements to an extended high-order substrate model defined using a combination of basis functions that include an edge basis function related to a substrate edge. A radial edge basis function may be expressed in terms of distance from a substrate edge. The edge basis function may, for example, be an exponential decay function or a rational function. Lithographic processing of a subsequent substrate is controlled using the calculated high-order substrate model parameters, in combination with low-order substrate model parameters obtained by fitting inline measurements to a low order model.

公开(公告)号：US20180149981A1

公开(公告)日：2018-05-31

申请号：US15578312

申请日：2016-06-27

Applicant: ASML Netherlands B.V.

Inventor： Paul Cornelis Hubertus ABEN ,  Sanjaysingh LALBAHADOERSING ,  Jurgen Johnnes Henderikus Maria SCHOONUS

IPC: G03F7/20 ,  G03F9/00

CPC classification number: G03F7/70516 ,  G03F7/70466 ,  G03F7/70633 ,  G03F7/70683 ,  G03F7/707 ,  G03F9/7019 ,  G03F9/708

Abstract: A method including: providing a reference substrate with a first mark pattern; providing the reference substrate with a first resist layer on the reference substrate, wherein the first resist layer has a minimal radiation dose needed for development of the first resist; using a reference patterning device to impart a radiation beam with a second mark pattern in its cross-section to form a patterned radiation beam; and exposing a target portion of the first resist layer of the reference substrate n times to said patterned radiation beam to create exposed areas in the target portion of the first resist layer in accordance with the second mark pattern that have been subjected to an accumulated radiation dose above the minimal radiation dose of the first resist layer, wherein n is an integer with a value of at least two.