公开(公告)号：US20210240088A1

公开(公告)日：2021-08-05

申请号：US17213983

申请日：2021-03-26

Applicant: ASML Netherlands B.V.

Inventor： Paul William SCHOLTES - VAN EIJK ,  Ronald Franciscus Herman HUGERS

IPC: G03F7/20

Abstract: Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.

公开(公告)号：US20230280660A1

公开(公告)日：2023-09-07

申请号：US18196108

申请日：2023-05-11

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GÖTZ ,  Patrick Sebastian UEBEL ,  Ronald Franciscus Herman HUGERS ,  Jan Adrianus BOER ,  Edwin Johannes Cornelis BOS ,  Andreas Johannes Antonius BROUNS ,  Vitaliy PROSYENTSOV ,  Paul William SCHOLTES - VAN EIJK ,  Paulus Antonius Andreas TEUNISSEN ,  Mahesh Upendra AJGAONKAR

IPC: G03F7/20 ,  G02B1/00 ,  G02B6/02 ,  G01B11/27 ,  G01J1/42 ,  G01M11/00

CPC classification number: G03F7/70625 ,  G02B1/005 ,  G02B6/02 ,  G03F7/7065 ,  G01B11/27 ,  G01J1/4257 ,  G03F7/70525 ,  G01M11/30

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

公开(公告)号：US20210063894A1

公开(公告)日：2021-03-04

申请号：US17004140

申请日：2020-08-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GÖTZ ,  Patrick Sebastian UEBEL ,  Ronald Franciscus Herman HUGERS ,  Jan Adrianus BOER ,  Edwin Johannes Cornelis BOS ,  Andreas Johannes Antonius BROUNS ,  Vitaliy PROSYENTSOV ,  Paul William SCHOLTES - VAN EIJK ,  Paulus Antonius Andreas TEUNISSEN ,  Mahesh Upendra AJGAONKAR

IPC: G03F7/20 ,  G02B1/00 ,  G02B6/02 ,  G01M11/00 ,  G01B11/27 ,  G01J1/42

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.