-
公开(公告)号：US20240077803A1
公开(公告)日：2024-03-07
申请号：US18273618
申请日：2021-12-30
Applicant: ASML NETHERLANDS B.V. , ASML Holding N.V.
IPC: G03F7/00
CPC classification number: G03F7/702 , G03F7/70166 , G03F7/70208 , G03F7/70891
Abstract: Systems, apparatuses, and methods are provided for heating a plurality of optical components. An example method can include receiving an input radiation beam from a radiation source. The example method can further include generating a plurality of output radiation beams based on the input radiation beam. The example method can further include transmitting the plurality of output radiation beams towards a plurality of heater head optics configured to heat the plurality of optical components. Optionally, the example method can further include controlling a respective power value, and realizing a flat-top far-field profile, of each of the plurality of output radiation beams.
-
Patent Agency Ranking
公开(公告)号：US20230280660A1
公开(公告)日：2023-09-07
申请号：US18196108
申请日：2023-05-11
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： Sebastian Thomas BAUERSCHMIDT , Peter Maximilian GÖTZ , Patrick Sebastian UEBEL , Ronald Franciscus Herman HUGERS , Jan Adrianus BOER , Edwin Johannes Cornelis BOS , Andreas Johannes Antonius BROUNS , Vitaliy PROSYENTSOV , Paul William SCHOLTES - VAN EIJK , Paulus Antonius Andreas TEUNISSEN , Mahesh Upendra AJGAONKAR
CPC classification number: G03F7/70625 , G02B1/005 , G02B6/02 , G03F7/7065 , G01B11/27 , G01J1/4257 , G03F7/70525 , G01M11/30
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
-
公开(公告)号：US20240302753A1
公开(公告)日：2024-09-12
申请号：US18284161
申请日：2022-03-21
Applicant: ASML HOLDING N.V. , ASML NETHERLANDS B.V.
Inventor： Mahesh Upendra AJGAONKAR , Gerardus SWINKELS , Laurentius VAN BOKHOVEN , Joost KLUGKIST , Koen BOS
IPC: G03F7/00 , G01K1/02 , G01K7/22 , G01K11/3206
CPC classification number: G03F7/70891 , G01K1/026 , G01K7/22 , G01K11/3206 , G03F7/702 , G03F7/70233 , G03F7/70316 , G03F7/7085
Abstract: A lithographic apparatus includes an illumination system, a projection system, a temperature-sensitive object, and a temperature sensor that includes a detector and waveguide device that is thermally coupled to the temperature-sensitive object and includes an input end, a downstream end, and first and second scattering features. The illumination system illuminates a pattern of a patterning device. The projection system projects an image of the pattern onto a substrate. Based on temperature, the first scattering feature reflects a first spectrum. Radiation not reflected by the first scattering feature is allowed downstream. Based on temperature, the second scattering feature reflects a second spectrum different from the first spectrum. Radiation not reflected by the second scattering feature is allowed downstream. The detector is disposed to receive radiation including the reflected first and second spectra from the input end and generates a measurement signal based on the received radiation.
-
公开(公告)号：US20210063894A1
公开(公告)日：2021-03-04
申请号：US17004140
申请日：2020-08-27
Applicant: ASML NETHERLANDS B.V.
Inventor： Sebastian Thomas BAUERSCHMIDT , Peter Maximilian GÖTZ , Patrick Sebastian UEBEL , Ronald Franciscus Herman HUGERS , Jan Adrianus BOER , Edwin Johannes Cornelis BOS , Andreas Johannes Antonius BROUNS , Vitaliy PROSYENTSOV , Paul William SCHOLTES - VAN EIJK , Paulus Antonius Andreas TEUNISSEN , Mahesh Upendra AJGAONKAR
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
-
公开(公告)号：US20250036031A1
公开(公告)日：2025-01-30
申请号：US18716007
申请日：2022-11-17
Applicant: ASML Netherlands B.V.
Inventor： Aniruddha Ramakrishna SONDE , Mahesh Upendra AJGAONKAR , Krishanu SHOME , Simon Reinald HUISMAN , Sebastianus Adrianus GOORDEN , Franciscus Godefridus Casper BIJNEN , Patrick WARNAAR , Sergei SOKOLOV
Abstract: Some embodiments of this disclosure can improve measurement of target mark asymmetry in metrology apparatuses for improving accuracy in measurements performed in conjunction with lithographic processes. For example, a metrology system can include a projection system configured to receive a plurality of diffraction orders diffracted from a target on a substrate. The metrology system can further include a detector array and a waveguide device configured to transmit the plurality of diffraction orders between the projection system and the detector array. The detector array can be configured to detect each of the plurality of diffraction orders spatially separate from other ones of the plurality of diffraction orders.
-
6.发明公开公开(公告)号：US20240288747A1
公开(公告)日：2024-08-29
申请号：US18572750
申请日：2022-08-08
Applicant: ASML NETHERLANDS B.V.
Inventor： Mahesh Upendra AJGAONKAR , Amir ABDOLVAND , Willem Richard PONGERS , Johannes Jacobus Matheus BASELMANS , Yougfeng NI
CPC classification number: G02F1/365 , G02F1/3528 , G02F2202/32
Abstract: Radiation source assembly and method for generating broadband radiation by spectral broadening. The radiation source assembly includes a pump assembly configured to provide broadband input radiation. The pump assembly includes a pump source configured to provide first radiation at a pump wavelength, and a broadband assembly configured to provide second radiation including a continuous wavelength range, wherein the first radiation and the second radiation form the broadband input radiation. The radiation source assembly further includes an optical fibre configured to receive the broadband input radiation. The optical fibre includes a core configured along at least a part of the length of the fibre to guide the received broadband input radiation during propagation through the fibre, so as to generate broadband radiation by spectral broadening to be output by the fibre.
-
-
-
-
-
Search Results
6
records
(took 0.02 seconds)
