公开(公告)号：US12099307B2

公开(公告)日：2024-09-24

申请号：US17920763

申请日：2021-03-19

Applicant: ASML Netherlands B.V.

Inventor： Sjoerd Martijn Huiberts ,  René Josephus Johannes Van Der Meulen ,  Johannes Petrus Martinus Bernardus Vermeulen

IPC: G03F7/00 ,  G02B7/182

CPC classification number: G03F7/70258 ,  G02B7/1828 ,  G03F7/70141

Abstract: Disclosed is an actuator unit for positioning an optical element, comprising a first reluctance actuator comprising a first stator part and a first mover part separated by a gap in a first direction. The first mover part is constructed and arranged to be connected to the optical element and for moving the optical element. The first stator part is constructed and arranged to exert a magnetic force on the first mover part along a first line of actuation. The first mover part is movable relative to the first stator part in the first direction. The first stator part and the first mover part are constructed and arranged such that the first line of actuation is, in operational use, moving along with the first mover part in a second direction perpendicular to the first direction, for at least a predetermined movement range of the first mover part in the second direction.

公开(公告)号：US20150234297A1

公开(公告)日：2015-08-20

申请号：US14428287

申请日：2013-08-26

Applicant: ASML Netherlands B.V.

Inventor： Johannes Antonius Gerardus Akkermans ,  Bas Pieter Lemmen ,  Sjoerd Martijn Huiberts ,  Joeri Lof ,  Petrus Theodorus Rutgers ,  Sven Antoin Johan Hol ,  Harmeet Singh ,  Peter Michel Silvester Maria Heijmans

IPC: G03F7/20 ,  G03F7/22 ,  H02P25/06 ,  H02P25/08 ,  H02K41/03 ,  H02K11/00

CPC classification number: G03F7/70725 ,  G03F7/22 ,  G03F7/70758 ,  H01F7/081 ,  H01F7/1646 ,  H02K11/20 ,  H02K41/025 ,  H02K41/03 ,  H02K41/033 ,  H02P6/16 ,  H02P25/034 ,  H02P25/06 ,  H02P25/08 ,  H02P25/092

Abstract: A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the reluctance actuator based on a flux set point and the flux measured by the flux sensor. A method comprising providing to the flux amplifier a flux setpoint, the flux setpoint comprising a time constant component and a sinusoidally varying component at an excitation frequency, measuring a force generated by the reluctance actuator in response to the flux setpoint, and calibrating the reluctance actuator assembly from the measured force.

Abstract translation: 一种磁阻致动器组件，包括磁阻致动器，用于测量磁阻致动器的间隙中的磁通量的磁通传感器，以及基于磁通量设定点和磁通量测量的磁通量来驱动磁阻致动器的致动器线圈的磁通放大器 通量传感器 一种方法，包括向所述通量放大器提供磁通设定点，所述通量设定点包括在激励频率处的时间常数分量和正弦变化分量，以响应于所述通量设定点测量由所述磁阻致动器产生的力，以及校准所述磁阻致动器 从测量力组装。

公开(公告)号：US10372045B2

公开(公告)日：2019-08-06

申请号：US14428287

申请日：2013-08-26

Applicant: ASML Netherlands B.V.

Inventor： Johannes Antonius Gerardus Akkermans ,  Bas Pieter Lemmen ,  Sjoerd Martijn Huiberts ,  Joeri Lof ,  Petrus Theodorus Rutgers ,  Sven Antoin Johan Hol ,  Harmeet Singh ,  Peter Michel Silvester Maria Heijmans

IPC: G03F7/20 ,  H01F7/08 ,  H01F7/16 ,  H02P25/08 ,  H02P6/16 ,  H02P25/06 ,  H02K41/025 ,  H02P25/034 ,  G03F7/22 ,  H02K11/00 ,  H02K41/03

Abstract: A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the reluctance actuator based on a flux set point and the flux measured by the flux sensor. A method comprising providing to the flux amplifier a flux setpoint, the flux setpoint comprising a time constant component and a sinusoidally varying component at an excitation frequency, measuring a force generated by the reluctance actuator in response to the flux setpoint, and calibrating the reluctance actuator assembly from the measured force.