公开(公告)号：US09632327B2

公开(公告)日：2017-04-25

申请号：US15068398

申请日：2016-03-11

Applicant: Apple Inc.

Inventor： Ning Y. Chan ,  Richard J. Topliss ,  Steven Webster

IPC: G03B19/12 ,  G02B27/64 ,  G02B13/00 ,  H04N5/232 ,  G03B5/00 ,  G03B17/17 ,  G02B7/10 ,  G02B7/182 ,  G02B26/08 ,  H04N5/225

CPC classification number: G02B27/646 ,  G02B7/102 ,  G02B7/1828 ,  G02B13/0065 ,  G02B13/009 ,  G02B26/0816 ,  G03B5/00 ,  G03B17/17 ,  G03B2205/0023 ,  H04N5/2253 ,  H04N5/2254 ,  H04N5/2257 ,  H04N5/2328 ,  H04N5/23296

Abstract: Some embodiments include an image sensor and a zoom lens assembly including a plurality of movable lens elements arranged to be moved independent of one another. In some embodiments, the plurality of movable lens elements share an optical axis. Some embodiments include a lens and mirror assembly for admitting light to the miniature camera. The lens and mirror assembly includes a folded optics arrangement such that light enters the lens and mirror assembly through a first lens with an optical axis of the first lens orthogonal to the plurality of moveable lens elements. The lens and mirror assembly includes a mirror for folding the path of light from the optical axis of the first lens to the optical axis of the plurality of movable lens elements, and the lens and mirror assembly further includes an actuator for tilting the mirror.

公开(公告)号：US20150370033A1

公开(公告)日：2015-12-24

申请号：US14706608

申请日：2015-05-07

Applicant: TDK TAIWAN CORP.

Inventor： Bing Ru SONG ,  Cheng Kai YU ,  Chao Chang HU

IPC: G02B7/04 ,  H02K5/04 ,  H02K7/00 ,  H02K7/08

CPC classification number: H02K41/02 ,  G02B7/02 ,  G02B7/08 ,  G02B7/09 ,  G02B7/10 ,  G02B7/102 ,  G02B7/1828 ,  H02K7/00 ,  H02K7/08 ,  H02K11/215 ,  H02K41/0356

Abstract: The disclosure provides an anti-tilt electromagnetic motor, including a flame, a support base, a contact assembly, a drive assembly, and an elastic assembly. The support base is arranged movably relative to the frame along an axis. The contact assembly is disposed between the frame and the support base and directly contacts the frame and the support base. The drive assembly is configured to drive the support base to move. The elastic assembly is configured to provide a pre-loading force so as to enable the contact assembly to be compressed by the frame and the support base simultaneously.

Abstract translation: 本公开提供了一种防倾斜电磁电动机，包括火焰，支撑基座，接触组件，驱动组件和弹性组件。 支撑基座相对于框架沿轴线可移动地布置。 接触组件设置在框架和支撑基座之间并且直接接触框架和支撑基座。 驱动组件被配置成驱动支撑基座移动。 弹性组件被构造成提供预加载力，以便使得接触组件能够被框架和支撑基座同时压缩。

公开(公告)号：US20150261093A1

公开(公告)日：2015-09-17

申请号：US14435315

申请日：2013-09-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Edwin Johan Buis ,  Gosse Charles De Vries ,  Sven Antoin Johan Hol ,  Erik Maria Rekkers

IPC: G03F7/20 ,  G02B5/08 ,  H02K41/035 ,  H02K49/10 ,  H01F7/02 ,  G02B26/08 ,  G02B19/00

CPC classification number: G03F7/70833 ,  G02B5/0891 ,  G02B7/1828 ,  G02B19/0023 ,  G02B26/0816 ,  G03F7/70116 ,  G03F7/7015 ,  G03F7/70825 ,  H01F7/0205 ,  H02K11/40 ,  H02K16/00 ,  H02K41/0352 ,  H02K41/0356 ,  H02K49/10

Abstract: An EUV optical apparatus includes a number of adjustable mirrors (22x) on mirror bodies (120). Each mirror body is supported on an actuator (100x) comprising a moving part (132, 134, 136) and a fixed casing part (128, 130). The actuator provides a resilient support (140, 142) for the mirror body so that it is tiltable with two degrees relative to the casing. An electromagnetic motor (166, 170-178) applies first part, under the influence of an applied motive force, the resilient mounting being arranged to provide a biasing force that resists said motive force. A magnetic coupling (102, 104a, 104b) is arranged between the moving and fixed parts so as to provide a counter-biasing force. The counter-biasing force partly opposes said biasing force and thereby reduces the motive force required to effect a given displacement. The actuator can thus be made with reduced size, weight and heat dissipation.

Abstract translation: EUV光学装置包括在镜体（120）上的多个可调镜（22x）。 每个镜体支撑在包括移动部件（132,134,136）和固定壳体部件（128,130）的致动器（100x）上。 致动器提供用于镜体的弹性支撑件（140,142），使得其相对于壳体可倾斜两度。 电磁马达（166,170-178）在施加的动力的作用下施加第一部分，所述弹性安装件设置成提供抵抗所述动力的偏置力。 磁性联轴器（102,104a，104b）设置在运动部件和固定部件之间，以提供反作用力。 反作用力部分地与所述偏压力相反，从而减小了实现给定位移所需的动力。 致动器因此可以减小尺寸，重量和散热。

公开(公告)号：US20150124305A1

公开(公告)日：2015-05-07

申请号：US14533476

申请日：2014-11-05

Applicant: Airbus DS GmbH

Inventor： Reiner BARHO ,  Manfred SCHMID ,  Harald LANGENBACH

IPC: G02B26/08 ,  G02B7/182

CPC classification number: G02B26/0816 ,  G02B7/1821 ,  G02B7/1828 ,  G02B27/644

Abstract: A beam steering mirror device includes a mirror having an optical part with a reflecting or optical surface and a mirror body. The optical part is essentially thermally de-coupled from the body. A biaxial suspension of the mirror body has two rotation axes arranged essentially perpendicular with respect to each other and being located in a common plane. The suspension includes a set of four flexible pivots with a pair of pivots assigned to each rotation axis. The mirror is arranged with regard to the biaxial suspension such that its center of mass is approximately located in the intersection point of the two rotation axes. The device also includes motors for moving of the mirror body around the two rotation axes, sensors for determining the tilting angle of the mirror, and a housing for the mirror, the biaxial suspension, the motors and the sensors.

Abstract translation: 光束转向镜装置包括具有具有反射或光学表面的光学部件和镜体的反射镜。 光学部件基本上与身体热去耦合。 镜体的双轴悬架具有相对于彼此基本上垂直布置并且位于公共平面中的两个旋转轴。 悬架包括一组四个柔性枢轴，其具有分配给每个旋转轴线的一对枢轴。 反射镜相对于双轴悬架布置，使得其质心大致位于两个旋转轴线的交点处。 该装置还包括用于使镜体围绕两个旋转轴线移动的电机，用于确定反射镜倾斜角的传感器，以及用于反射镜的壳体，双轴悬架，马达和传感器。

公开(公告)号：US20140022655A1

公开(公告)日：2014-01-23

申请号：US13553724

申请日：2012-07-19

Applicant: Kwok Sing Cheng ,  Chuen Kuen Yeung

Inventor： Kwok Sing Cheng ,  Chuen Kuen Yeung

IPC: G02B7/04

CPC classification number: G02B26/085 ,  G02B6/4457 ,  G02B6/4458 ,  G02B7/025 ,  G02B7/1828 ,  G03B3/10 ,  G03B17/12 ,  G03B2205/0069 ,  H02K41/0356

Abstract: The subject matter disclosed herein relates to an imaging device including an epoxy reservoir and a number of features to facilitate alignment of components during assembly of the imaging device.

Abstract translation: 本文公开的主题涉及包括环氧树脂储存器和许多特征的成像装置，以在组装成像装置期间促进部件对准。

公开(公告)号：US20100027092A1

公开(公告)日：2010-02-04

申请号：US12221369

申请日：2008-08-01

Applicant: Ron van Os

Inventor： Ron van Os

IPC: G02B26/08 ,  H02K33/00

CPC classification number: G02B7/1828 ,  G02B7/181 ,  H02K41/0356

Abstract: The invention claimed is a novel magnetic mirror air bearing for a Michelson interferometer with lateral motion. A precise kinematic mount is used in combination with magnetic fields wherein current can be applied on a centerline to move a piston and mirror laterally without pitch and yaw so as to effect accurate light beam reflection regardless of distance of lateral movement within a defined space. The assembly is able to operate across extended temperature ranges by utilizing materials which expand and contract at similar rates, and contains a thermalizing cavity which will thermalize the gas to avoid temperature induced artifacts.

Abstract translation: 本发明要求的是用于具有横向运动的迈克尔逊干涉仪的新型磁性镜空气轴承。 精确的运动学座架与磁场结合使用，其中电流可以施加在中心线上以使活塞和镜子横向移动而不需要俯仰和偏转，以便实现精确的光束反射，而不管在限定的空间内的横向运动的距离。 该组件能够通过利用以相似速率膨胀和收缩的材料在更长的温度范围内操作，并且包含将使气体热化以避免温度引起的伪像的热化腔。

公开(公告)号：US20090225382A1

公开(公告)日：2009-09-10

申请号：US12043246

申请日：2008-03-06

Applicant: Warren H. Miller ,  Kenneth D. White ,  Reeder N. Ward

Inventor： Warren H. Miller ,  Kenneth D. White ,  Reeder N. Ward

IPC: G02B26/08

CPC classification number: G02B7/1821 ,  G02B7/1828 ,  G02B26/101

Abstract: The invention provides for an improved mirror scanning system for use with a millimeter wave imaging system. The mirror scanning system includes a pair of voice coil actuators aligned generally perpendicular to a mirror. The voice coils are intermittently energized pursuant to a predetermined frequency related to a desired resolution. A base supports a back plate that is generally disposed parallel to the mirror and secures the pair of voice coil actuators. A rod flexure is secured to a center yoke, or coil bobbin, of each of the respective voice coils and to a back side of the mirror so that the pair of rod flexures simultaneously exert a force on the mirror causing deflection thereon as the pair of voice coils are energized. Stationary position sensors are mounted adjacent to each cylinder so the sensor can determine to location of the cylinder, and hence the angle of the mirror.

Abstract translation: 本发明提供了一种与毫米波成像系统一起使用的改进的反射镜扫描系统。 镜面扫描系统包括一对大致垂直于镜子排列的音圈致动器。 音圈根据与期望分辨率有关的预定频率间歇地通电。 基座支撑背板，其通常平行于反射镜设置并固定该对音圈致动器。 杆弯曲固定到每个相应音圈的中心轭或线圈骨架，并固定到反射镜的后侧，使得一对杆弯曲同时在镜上施加力，导致其上的偏转，因为一对 音圈通电。 固定位置传感器安装在每个气缸附近，因此传感器可以确定气缸的位置，从而确定反射镜的角度。

公开(公告)号：US20090009742A1

公开(公告)日：2009-01-08

申请号：US12118577

申请日：2008-05-09

Applicant: Yoichi Arai

Inventor： Yoichi Arai

IPC: G02B7/04 ,  G02B7/198 ,  G03B27/52

CPC classification number: G02B26/0816 ,  G02B7/02 ,  G02B7/023 ,  G02B7/1821 ,  G02B7/1828 ,  G03F7/70825

Abstract: A permanent magnet fixed to a peripheral portion of a lens cell includes two magnets that are joined together so that the north poles face each other and the south poles are exposed. A first driving coil is arranged to face toward exits for lines of magnetic force from the joining surfaces of the north poles of the permanent magnet, and a second driving coil is arranged to face toward entrances for lines of magnetic force in the permanent magnet. The orientation of the lens is adjusted by adjusting the currents supplied to the first driving coil and second driving coil to drive the lens cell in an optical axis direction and horizontal direction in a state in which the lens cell is levitated relative to the cover.

Abstract translation: 固定到透镜单元的周边部分的永磁体包括两个磁体，这两个磁体接合在一起，使得北极彼此面对并且南极被暴露。 第一驱动线圈被布置为面对来自永磁体的北极的接合表面的磁力线的出口，并且第二驱动线圈被布置成面对永磁体中的磁力线的入口。 通过调整提供给第一驱动线圈和第二驱动线圈的电流来调整透镜的取向，以在透镜单元相对于盖悬浮的状态下沿光轴方向和水平方向驱动透镜单元。

公开(公告)号：US07221463B2

公开(公告)日：2007-05-22

申请号：US10798812

申请日：2004-03-10

Applicant: Makoto Mizuno ,  Ryo Nawata ,  Mitsuru Inoue

Inventor： Makoto Mizuno ,  Ryo Nawata ,  Mitsuru Inoue

IPC: G01B11/14 ,  G03B27/42

CPC classification number: G02B7/005 ,  G02B7/023 ,  G02B7/1828 ,  G03F7/70825 ,  G03F7/70833

Abstract: The present invention provides a positioning apparatus capable of performing six-axis micro adjustment of an optical element in an exposure apparatus with high accuracy, and the exposure apparatus. The positioning apparatus of the present invention includes a first measurement unit for measuring a position/inclination of a moving part having an optical element while being kept from contact with the moving part, and a driving unit capable of driving the moving part in directions of six axes with respect to a fixed part while being kept from contact with the moving part, based on the result of measurement by the first measurement unit.

Abstract translation: 本发明提供一种能够以高精度对曝光装置中的光学元件进行六轴微调的定位装置和曝光装置。 本发明的定位装置包括：第一测量单元，用于测量具有光学元件的运动部件的位置/倾斜度，同时不与运动部件接触;以及驱动单元，其能够沿六方向驱动运动部件 基于第一测量单元的测量结果，相对于固定部分的轴线与运动部件保持接触。

公开(公告)号：US20040179192A1

公开(公告)日：2004-09-16

申请号：US10798812

申请日：2004-03-10

Inventor： Makoto Mizuno ,  Ryo Nawata ,  Mitsuru Inoue

IPC: G01B011/08

CPC classification number: G02B7/005 ,  G02B7/023 ,  G02B7/1828 ,  G03F7/70825 ,  G03F7/70833

Abstract: The present invention provides a positioning apparatus capable of performing six-axis micro adjustment of an optical element in an exposure apparatus with high accuracy, and the exposure apparatus. The positioning apparatus of the present invention includes a first measurement unit for measuring a position/inclination of a moving part having an optical element while being kept from contact with the moving part, and a driving unit capable of driving the moving part in directions of six axes with respect to a fixed part while being kept from contact with the moving part, based on the result of measurement by the first measurement unit.

Abstract translation: 本发明提供一种能够以高精度对曝光装置中的光学元件进行六轴微调的定位装置和曝光装置。 本发明的定位装置包括：第一测量单元，用于测量具有光学元件的运动部件的位置/倾斜度，同时不与运动部件接触;以及驱动单元，其能够沿六方向驱动运动部件 基于第一测量单元的测量结果，相对于固定部分的轴线与运动部件保持接触。