公开(公告)号：US20190033075A1

公开(公告)日：2019-01-31

申请号：US16073165

申请日：2017-01-24

Applicant: Agency for Science, Technology and Research

Inventor： Guoqiang Wu ,  Sanchitha Nirodha Fernando ,  Alex Yuandong Gu ,  Geng Li Chua

IPC: G01C19/5762

Abstract: According to various embodiments, there is provided a gyroscope device including: an outer frame; and four cells arranged within the outer frame, each cell of the four cells including: a proof mass arranged at least substantially in a centre region of the cell; and four electrode frames, each electrode frame of the four electrode frames arranged at a corner region of the cell and coupled to a respective side of the proof mass.

公开(公告)号：US20160202366A1

公开(公告)日：2016-07-14

申请号：US14295080

申请日：2014-06-03

Applicant: PGS Geophysical AS ,  Agency for Science Technology and Research (A*STAR)

Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

IPC: G01V1/18 ,  G01P15/125 ,  G01V1/09 ,  G01V1/38

CPC classification number: G01V1/18 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0862 ,  G01P2015/0882 ,  G01V1/09 ,  G01V1/38

Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

Abstract translation: 公开了具有分离的感测和力反馈电极的微机电系统（MEMS）加速计。 在一些实施例中，单独电极的使用可以增加这种装置的动态范围。 其他可能的优点包括例如更好的灵敏度，更好的噪声抑制和更好的信噪比。 在一个实施例中，加速度计包括三个硅晶片，由感应电极制成，其形成全差分电容结构的电容器，并且具有单独的力反馈电极，形成用于力反馈的电容器。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合间隔物和力反馈电极，其可以对检测质量区域施加恢复力。 具有力反馈电极的MEMS加速度计可用于地球物理勘测，例如用于地震检测或声学定位。

公开(公告)号：US20140260618A1

公开(公告)日：2014-09-18

申请号：US14190721

申请日：2014-02-26

Applicant: Agency for Science Technology and Research (A*STAR) ,  PGS Geophysical AS

Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

IPC: G01P15/125

CPC classification number: G01V1/18 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0862 ,  G01P2015/0882 ,  G01V1/09 ,  G01V1/38

Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

Abstract translation: 公开了具有分离的感测和力反馈电极的微机电系统（MEMS）加速计。 在一些实施例中，单独电极的使用可以增加这种装置的动态范围。 其他可能的优点包括例如更好的灵敏度，更好的噪声抑制和更好的信噪比。 在一个实施例中，加速度计包括三个硅晶片，由感应电极制成，其形成全差分电容结构的电容器，并且具有单独的力反馈电极，形成用于力反馈的电容器。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合间隔物和力反馈电极，其可以对检测质量区域施加恢复力。 具有力反馈电极的MEMS加速度计可用于地球物理勘测，例如用于地震检测或声学定位。

公开(公告)号：US20140260617A1

公开(公告)日：2014-09-18

申请号：US14190673

申请日：2014-02-26

Applicant: Agency for Science Technology and Research (A*STAR) ,  PGS Geophysical AS

Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0882 ,  G01V1/02 ,  G01V1/38

Abstract: A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

Abstract translation: 公开了一种配置成测量Z轴加速度的全差分微机电系统（MEMS）加速计。 这可以避免传统电容感测架构中的一些缺点，例如由于布朗噪声导致的灵敏度较低，低噪声抑制和低SNR。 在一个实施例中，加速度计包括三个硅晶片，其由在全差分电容结构中形成电容器的电极制成。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合隔离物和力反馈电极，其可以向检测质量区域施加力。 全差分MEMS加速度计可用于地球物理测量，例如用于地震检测或声学定位。

公开(公告)号：US09945968B2

公开(公告)日：2018-04-17

申请号：US14295080

申请日：2014-06-03

Applicant: PGS Geophysical AS ,  Agency for Science Technology and Research (A*STAR)

Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

IPC: G01P15/13 ,  G01V1/18 ,  G01V1/09 ,  G01V1/38 ,  G01P15/125 ,  G01P15/08

CPC classification number: G01V1/18 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0862 ,  G01P2015/0882 ,  G01V1/09 ,  G01V1/38

Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

公开(公告)号：US09506946B2

公开(公告)日：2016-11-29

申请号：US14294999

申请日：2014-06-03

Applicant: PGS Geophysical AS ,  Agency for Science Technology and Research (A*STAR)

Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

IPC: G01P3/00 ,  G01P15/125 ,  G01P15/13 ,  G01V1/02 ,  G01V1/38 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0882 ,  G01V1/02 ,  G01V1/38

Abstract: A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

Abstract translation: 公开了一种配置成测量Z轴加速度的全差分微机电系统（MEMS）加速计。 这可以避免传统电容感测架构中的一些缺点，例如由于布朗噪声导致的灵敏度较低，低噪声抑制和低SNR。 在一个实施例中，加速度计包括三个硅晶片，其由在全差分电容结构中形成电容器的电极制成。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合隔离物和力反馈电极，其可以向检测质量区域施加力。 全差分MEMS加速度计可用于地球物理测量，例如用于地震检测或声学定位。

公开(公告)号：US20150293142A1

公开(公告)日：2015-10-15

申请号：US14294999

申请日：2014-06-03

Applicant: PGS Geophysical AS ,  Agency for Science Technology and Research (A*STAR)

Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

IPC: G01P15/125 ,  G01V1/02 ,  G01V1/38

CPC classification number: G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0882 ,  G01V1/02 ,  G01V1/38

Abstract: A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

Abstract translation: 公开了一种配置成测量Z轴加速度的全差分微机电系统（MEMS）加速计。 这可以避免传统电容感测架构中的一些缺点，例如由于布朗噪声导致的灵敏度较低，低噪声抑制和低SNR。 在一个实施例中，加速度计包括三个硅晶片，其由在全差分电容结构中形成电容器的电极制成。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合隔离物和力反馈电极，其可以向检测质量区域施加力。 全差分MEMS加速度计可用于地球物理测量，例如用于地震检测或声学定位。