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公开(公告)号：US10429634B2
公开(公告)日：2019-10-01
申请号：US15830834
申请日：2017-12-04
Applicant: Agiltron, Inc.
Inventor： Guanghai Jin , Congshun Wang , Jing Zhao
Abstract: A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel.
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公开(公告)号：US10962765B1
公开(公告)日：2021-03-30
申请号：US16367031
申请日：2019-03-27
Applicant: Agiltron, Inc.
Inventor： Jing Zhao , Xiangchen Che
Abstract: A planer silicon-based displacement amplification structure and a method are provided for latching the displacement. The displacement amplification structure may include a first actuation beam and a second actuation beam coupled to the first beam with an angle, the ends of the first beam and the second beam coupled to fixture sites, and an end of the second beam coupled to a motion actuator; a motion shutter coupled to an opposing end of the first and second beams; and a latching thermoelectric displacement structure blocking the shutter return path and have faster response than the shutter structure.
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Patent Agency Ranking
公开(公告)号：US20170183217A1
公开(公告)日：2017-06-29
申请号：US15300212
申请日：2015-03-24
Applicant: Agiltron, Inc.
Inventor： Luzhong Yin , Jing Zhao , Guanghai Jin
CPC classification number: B81B3/0037 , B81B3/0024 , B81B2201/045 , B81B2203/0118 , B81B2203/0315 , B81B2203/0384 , B81B2203/051 , G02B26/02 , G02B26/023 , G02B26/04 , H02N2/043 , H02N10/00
Abstract: The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, and an end of the second beam coupled to a motion actuator; and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.
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公开(公告)号：US20190171001A1
公开(公告)日：2019-06-06
申请号：US15830834
申请日：2017-12-04
Applicant: Agiltron, Inc.
Inventor： Guanghai Jin , Congshun Wang , Luzhong Yin , Jing Zhao
CPC classification number: G02B26/001 , G01J3/26 , G02B6/29361 , G02B6/2938
Abstract: A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel.
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公开(公告)号：US20170184840A1
公开(公告)日：2017-06-29
申请号：US15282870
申请日：2016-09-30
Applicant: Agiltron, Inc.
Inventor： Luzhong Yin , Jing Zhao
CPC classification number: B81B3/0037 , B81B3/0024 , B81B2201/045 , B81B2203/0118 , B81B2203/0315 , B81B2203/0384 , B81B2203/051 , G02B26/02 , G02B26/023 , G02B26/04 , H02N2/043 , H02N10/00
Abstract: The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, an end of the second beam coupled to a motion actuator, and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.
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公开(公告)号：US10752492B2
公开(公告)日：2020-08-25
申请号：US15300212
申请日：2015-03-24
Applicant: Agiltron, Inc.
Inventor： Luzhong Yin , Jing Zhao , Guanghai Jin
Abstract: The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, and an end of the second beam coupled to a motion actuator; and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.
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公开(公告)号：US10730740B2
公开(公告)日：2020-08-04
申请号：US15282870
申请日：2016-09-30
Applicant: Agiltron, Inc.
Inventor： Luzhong Yin , Jing Zhao
Abstract: The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, an end of the second beam coupled to a motion actuator, and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.
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