公开(公告)号：US20080101892A1

公开(公告)日：2008-05-01

申请号：US11938236

申请日：2007-11-09

申请人： Anthony Bonora ,  Richard Gould ,  Roger Hine ,  Michael Krolak ,  Jerry Speasl

发明人： Anthony Bonora ,  Richard Gould ,  Roger Hine ,  Michael Krolak ,  Jerry Speasl

IPC分类号： B65G54/02

CPC分类号： H01L21/67778 ,  H01L21/67766 ,  H01L21/67775 ,  H01L21/68707 ,  Y10S414/139

摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.

摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内传播的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。

公开(公告)号：US20060177289A1

公开(公告)日：2006-08-10

申请号：US11352154

申请日：2006-02-10

申请人： Anthony Bonora ,  Richard Gould ,  Roger Hine ,  Michael Krolak ,  Jerry Speasl

发明人： Anthony Bonora ,  Richard Gould ,  Roger Hine ,  Michael Krolak ,  Jerry Speasl

IPC分类号： H01L21/677

CPC分类号： H01L21/68707 ,  H01L21/67766 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/135

摘要： The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.

公开(公告)号：US20060120833A1

公开(公告)日：2006-06-08

申请号：US11305256

申请日：2005-12-16

申请人： Anthony Bonora ,  Richard Gould ,  Roger Hine ,  Michael Krolak ,  Jerry Speasl

发明人： Anthony Bonora ,  Richard Gould ,  Roger Hine ,  Michael Krolak ,  Jerry Speasl

IPC分类号： H01L21/677

CPC分类号： H01L21/67778 ,  H01L21/67766 ,  H01L21/67775 ,  H01L21/68707 ,  Y10S414/137

摘要： The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.

摘要翻译： 本发明是用于输送晶片的晶片引擎。 晶片引擎包括用于沿x轴移动晶片的线性驱动器，用于使晶片围绕θ轴旋转的旋转驱动器，用于沿着z轴移动晶片的线性驱动器和用于沿着径向移动晶片的线性驱动器 轴。 用于沿着z轴移动晶片的线性驱动器偏离旋转驱动。 当旋转驱动器围绕θ轴旋转时，z轴和径向轴驱动器也绕θ轴旋转。 优选地，用于沿着径向轴线移动晶片的线性驱动器是具有上端和下端执行器的双重或快速互换滑动体机构。 滑动体机构优选地还具有对准晶片并执行各种检查和标记程序的装置。

公开(公告)号：US20080019811A1

公开(公告)日：2008-01-24

申请号：US11775755

申请日：2007-07-10

申请人： Michael Krolak ,  Roger Hine ,  Anthony Bonora

发明人： Michael Krolak ,  Roger Hine ,  Anthony Bonora

IPC分类号： B65G65/02 ,  B65G1/00 ,  B65G65/32 ,  B65G65/38

CPC分类号： H01L21/67379 ,  H01L21/67017 ,  H01L21/67386 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/68707

摘要： A substrate support and transport system for substrates to be processed is provided. The system includes a container supporting a plurality of substrates in a substantially vertical orientation, where the container has an access door surrounded by a flange defined on a top surface. The system includes a conveying system supporting a bottom surface of the container opposing the top surface. The conveying system is configured to enable removal of the container from the conveying system to a processing tool while the plurality of substrates is in the substantially vertical orientation. The system further includes a receiving module for a processing tool configured to accept the container from the conveying system. The receiving module is configured to move the container in a two dimensional plane defined within the receiving module. A container holding the substrates in a substantially vertical orientation and a method for transporting and storing substrates is provided.

摘要翻译： 提供了一种用于待处理衬底的衬底支撑和输送系统。 该系统包括支撑基本垂直取向的多个基板的容器，其中容器具有由限定在顶表面上的凸缘包围的通道门。 该系统包括支撑与顶表面相对的容器的底表面的输送系统。 输送系统被构造成使得容器从输送系统移除到处理工具，同时多个基板处于基本垂直的方向。 所述系统还包括用于处理工具的接收模块，所述接收模块被配置为从所述输送系统接收所述容器。 接收模块被配置为在容纳模块内定义的二维平面内移动容器。 提供了将基板保持为大致垂直取向的容器以及用于输送和存储基板的方法。

公开(公告)号：US20070010908A1

公开(公告)日：2007-01-11

申请号：US11484218

申请日：2006-07-10

申请人： Anthony Bonora ,  Michael Krolak ,  Roger Hine

发明人： Anthony Bonora ,  Michael Krolak ,  Roger Hine

IPC分类号： G06F7/00

CPC分类号： H01L21/67763 ,  B65G15/12 ,  B65G43/10 ,  B65G47/268 ,  B65G2201/0297 ,  H01L21/67706 ,  H01L21/6773

摘要： The present invention comprises a conveyor for moving a semiconductor containers throughout a fabrication facility. In one embodiment, the conveyor comprises a plurality of individually controlled conveyor zones. Each conveyor zone includes a first belt, a second belt, a drive assembly for rotating the first belt and the second belt at substantially the same speed. The first belt and the second belt are driven at substantially the same speed and movably support the container's bottom plate as the container moves along the conveyor. In another embodiment, the conveyor includes sensors to determine, among other things, the position of the container.

摘要翻译： 本发明包括用于在整个制造设施中移动半导体容器的输送机。 在一个实施例中，输送机包括多个独立控制的输送带。 每个传送带包括第一带，第二带，用于以基本上相同的速度旋转第一带和第二带的驱动组件。 第一带和第二带以大致相同的速度驱动，并且随着容器沿着输送机移动，可移动地支撑容器的底板。 在另一个实施例中，输送机包括用于确定容器位置的传感器。

公开(公告)号：US20060257233A1

公开(公告)日：2006-11-16

申请号：US11178072

申请日：2005-07-08

申请人： Anthony Bonora ,  Michael Krolak ,  Roger Hine

发明人： Anthony Bonora ,  Michael Krolak ,  Roger Hine

IPC分类号： H01L21/677

CPC分类号： H01L21/67766 ,  H01L21/67736 ,  H01L21/67769 ,  H01L21/67775 ,  Y10S414/14 ,  Y10T74/20305

摘要： The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.

摘要翻译： 本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。 工具装载设备可以服务于单个装载端口或多个装载端口。 无论如何，工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。 工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。 在另一个实施例中，工具装载装置与x驱动组件联接，该x驱动组件沿着基本上平行于通过装载端口前方的集装箱运输系统的路径移动工具装载装置 - 允许工具装载装置服务多个 加载端口。

公开(公告)号：US20060188360A1

公开(公告)日：2006-08-24

申请号：US11177645

申请日：2005-07-08

申请人： Anthony Bonora ,  Michael Krolak ,  Roger Hine

发明人： Anthony Bonora ,  Michael Krolak ,  Roger Hine

IPC分类号： H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67736 ,  Y10S414/14

摘要： The present invention comprises a load port for providing access to an article that is stored in a container having a container door removably coupled to a container shell. The load port preferably loads/unloads a container directly from a container transport system. In one embodiment, the load port includes a plate having an opening, a container support plate, a drive assembly for moving the support plate vertically and a shroud to partially enclose the opening. The shroud, which may be affixed to the mounting plate, has an open top and bottom. The shroud contains a mechanism for retaining the container shell at a controllable height. During operation, a container is raised from the transport system into the shroud until the container shell is retained by the mechanism. After the container shell is uncoupled from the container door, the container support plate is lowered until the article is accessible through the opening. The container shell remains located at the controllable height. The container shell, in combination with the shroud, creates a mini-environment isolating the article from ambient conditions in the fabrication facility.

摘要翻译： 本发明包括一个负载端口，用于提供对存储在具有可拆卸地联接到容器壳体的容器门的容器中的物品的通路。 负载端口优选地从容器运输系统直接装载/卸载容器。 在一个实施例中，负载端口包括具有开口的板，容器支撑板，用于垂直移动支撑板的驱动组件和用于部分地封闭开口的护罩。 可以固定到安装板的护罩具有敞开的顶部和底部。 护罩包含用于将容器壳保持在可控高度的机构。 在操作期间，容器从运输系统升起到护罩中，直到容器壳体被机构保持。 在容器壳与容器门分离后，容器支撑板被降低直到制品通过开口接近。 容器壳保持位于可控高度。 容器壳与护罩组合形成了将制品与制造设备中的环境条件隔离的迷你环境。

公开(公告)号：US20080008564A1

公开(公告)日：2008-01-10

申请号：US11774764

申请日：2007-07-09

申请人： Anthony Bonora ,  Michael Krolak ,  Roger Hine ,  Theodore Rogers

发明人： Anthony Bonora ,  Michael Krolak ,  Roger Hine ,  Theodore Rogers

IPC分类号： H01L21/677

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/139

摘要： A variable lot size load port assembly is described having a tool interface, a port door, a latch key, an advance plate, and an elevator. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The latch key extends from the port door and is configured to mate with a latch key receptacle of a door of a front opening unified pod (FOUP). The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The elevator raises and lowers the advance plate to bring the latch key receptacle of the door of the FOUP into alignment with the latch key of the port door.

摘要翻译： 描述了具有工具接口，端口门，闩锁键，前进板和电梯的可变批量装载端口组件。 工具界面通常在垂直方向上延伸并具有孔径。 端口门具有关闭位置，其中端口门至少部分地封闭孔。 闩锁键从端口门延伸并且被配置为与前开口统一盒（FOUP）的门的闩锁钥匙插座配合。 前进板被构造成支撑前开口统一舱（FOUP）并且在缩回位置和前进位置之间平移。 升降机提升并降低前进板，使FOUP门的闩锁键座与门口的闩锁键对准。

公开(公告)号：US20070010909A1

公开(公告)日：2007-01-11

申请号：US11482650

申请日：2006-07-07

申请人： Anthony Bonora ,  Michael Krolak ,  Roger Hine

发明人： Anthony Bonora ,  Michael Krolak ,  Roger Hine

IPC分类号： G06F7/00

CPC分类号： H01L21/67769 ,  H01L21/67161

摘要： The present invention comprises a stocker for managing containers within a fabrication facility having a ceiling-based interbay material handling system a floor-based intrabay material handling system. In one embodiment, the stocker comprises a container storage area for storing at least one container, a ceiling-based input conveyor, a floor-based conveyor and a robotic mechanism. The ceiling-based input conveyor receives containers from the ceiling based interbay material handling system. The stocker's floor-based conveyor may comprise an output conveyor, an input conveyor or both, and moves containers between the stocker's container storage area and the floor-based intrabay material handling system. A robotic mechanism moves containers between the ceiling-based input conveyor, the container storage area and the floor-based conveyor.

摘要翻译： 本发明包括一种用于管理制造设备内的容器的储料器，其具有一个基于天花板的间隔物料处理系统，一个基于楼层的垃圾处理系统。 在一个实施例中，储料器包括用于存储至少一个容器，天花板输入输送机，地板式输送机和机器人机构的容器存储区域。 基于天花板的输入输送机从天花板间隔物料处理系统接收容器。 储料机的地板式输送机可以包括输出输送机，输入输送机或两者，并且在储料器的容器存储区域和地板间内材料处理系统之间移动容器。 机器人机构将容器移动到基于天花板的输入输送机，容器储存区域和地板输送机之间。

公开(公告)号：US20080031709A1

公开(公告)日：2008-02-07

申请号：US11774760

申请日：2007-07-09

申请人： Anthony Bonora ,  Michael Krolak ,  Roger Hine ,  Theodore Rogers

发明人： Anthony Bonora ,  Michael Krolak ,  Roger Hine ,  Theodore Rogers

IPC分类号： H01L21/677

CPC分类号： H01L21/67772

摘要： A variable lot size load port assembly includes a tool interface, a port door, an advance plate, and first and second latch keys. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The first latch key is disposed on the port door at a first elevation configured to selectively engage a corresponding latch key receptacle of a FOUP having a first selected FOUP capacity and the second latch key is disposed on the port door at a second elevation configured to selectively engage a corresponding latch key receptacle of another FOUP having a second selected FOUP capacity.

摘要翻译： 可变批量装载端口组件包括工具接口，端口门，前进板以及第一和第二闩锁键。 工具界面通常在垂直方向上延伸并具有孔径。 端口门具有关闭位置，其中端口门至少部分地封闭孔。 前进板被构造成支撑前开口统一舱（FOUP）并且在缩回位置和前进位置之间平移。 第一闩锁键以第一高度设置在端口门上，第一高度被构造成选择性地接合具有第一选择的FOUP容量的FOUP的对应闩锁钥匙插座，并且第二闩锁键以第二高度设置在端口门上，第二高度被配置为选择性地 接合具有第二选择的FOUP容量的另一FOUP的对应的闩锁键插座。