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    VARIABLE LOT SIZE LOAD PORT
    1.
    发明申请
    VARIABLE LOT SIZE LOAD PORT 失效
    可变大尺寸负载端口

    公开(公告)号：US20080031708A1

    公开(公告)日：2008-02-07

    申请号：US11774750

    申请日：2007-07-09

    申请人： Anthony Bonora ,  Michael Krolak ,  Roger Hine ,  Theodore Rogers

    发明人： Anthony Bonora ,  Michael Krolak ,  Roger Hine ,  Theodore Rogers

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

    摘要： A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.

    摘要翻译： 可变批量装载端口组件包括工具接口，前进板和密封板。 工具界面大致垂直延伸，并且具有前表面，大体平行于前表面的后表面和孔。 前进板位于孔下方的工具界面的前部。 前进板大致水平地延伸并且被配置为支撑前开口统一舱（FOUP）。 推进板在缩回位置和高级位置之间平移。 前进位置靠近工具界面，缩回位置与工具界面间隔开。 密封板具有固定到工具接口的上端，并且下端覆盖孔的一部分以形成减小的孔。 密封板成形为与安装到前进板的选定容量的FOUP的前凸缘形成邻近密封件并且被带到前进位置。

    Horizontal array stocker
    2.
    发明申请
    Horizontal array stocker 有权
    水平阵列储料机

    公开(公告)号：US20070134078A1

    公开(公告)日：2007-06-14

    申请号：US11588962

    申请日：2006-10-27

    申请人： Theodore Rogers ,  Norma Riley

    发明人： Theodore Rogers ,  Norma Riley

    IPC分类号： B65G65/00

    CPC分类号： H01L21/67769 ,  Y10S414/14

    摘要： The present invention comprises a stocker. The stocker comprises multiple container storage locations arranged in a horizontal array. The horizontal array of storage locations may be suspended from the facility ceiling or supported by the facility floor. The stocker may include one or more stocker robots for transporting a workpiece container within the stocker and/or to a material transport system. The stocker may also include features such as container elevators and conveyor loops.

    摘要翻译： 本发明包括储料器。 储料器包括以水平阵列布置的多个容器储存位置。 存储位置的水平阵列可以从设施顶棚悬挂或由设施楼层支撑。 储料器可以包括一个或多个储料器机器人，用于将储存器内的工件容器和/或物料输送系统运送。 储料器还可以包括诸如集装箱电梯和输送机回路的特征。

    Active edge gripping end effector
    3.
    发明申请
    Active edge gripping end effector 有权
    主动边缘抓取端部执行器

    公开(公告)号：US20050017529A1

    公开(公告)日：2005-01-27

    申请号：US10624133

    申请日：2003-07-21

    申请人： Theodore Rogers ,  Shawn Hamilton ,  Michael Mayo

    发明人： Theodore Rogers ,  Shawn Hamilton ,  Michael Mayo

    IPC分类号： B25J13/08 ,  B25J15/10 ,  H01L21/687 ,  B25J15/08

    CPC分类号： B25J13/085 ,  B25J15/10 ,  H01L21/68707 ,  Y10S294/907 ,  Y10S414/141

    摘要： The present invention generally relates to an end effector that utilizes a gripping mechanism to grip a peripheral edge of the wafer and secure the wafer to the end effector. In one embodiment, the gripping mechanism includes a pair of gripper arms that pivot between a wafer-loading position and a wafer-engaging position. In another embodiment, an active plunger moves linearly between the wafer-loading and wafer-engaging positions. Both the gripper arms and the plunger device are driven by a motor assembly. A force feedback system monitors the force the gripping mechanism exerts on the wafer and, based on the amount of force, controls the operation of the motor assembly to dynamically adjust the position of the gripping mechanism.

    摘要翻译： 本发明总体上涉及一种端部执行器，其利用夹持机构来夹持晶片的周边边缘并将晶片固定到末端执行器。 在一个实施例中，夹持机构包括一对夹持臂，其在晶片装载位置和晶片接合位置之间枢转。 在另一个实施例中，有源柱塞在晶片加载和晶片接合位置之间线性移动。 夹持臂和柱塞装置都由马达组件驱动。 力反馈系统监测夹紧机构施加在晶片上的力，并且基于力的量控制马达组件的操作以动态地调节夹持机构的位置。

    VARIABLE LOT SIZE LOAD PORT
    4.
    发明申请
    VARIABLE LOT SIZE LOAD PORT 有权
    可变大尺寸负载端口

    公开(公告)号：US20080008564A1

    公开(公告)日：2008-01-10

    申请号：US11774764

    申请日：2007-07-09

    申请人： Anthony Bonora ,  Michael Krolak ,  Roger Hine ,  Theodore Rogers

    发明人： Anthony Bonora ,  Michael Krolak ,  Roger Hine ,  Theodore Rogers

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/139

    摘要： A variable lot size load port assembly is described having a tool interface, a port door, a latch key, an advance plate, and an elevator. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The latch key extends from the port door and is configured to mate with a latch key receptacle of a door of a front opening unified pod (FOUP). The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The elevator raises and lowers the advance plate to bring the latch key receptacle of the door of the FOUP into alignment with the latch key of the port door.

    摘要翻译： 描述了具有工具接口，端口门，闩锁键，前进板和电梯的可变批量装载端口组件。 工具界面通常在垂直方向上延伸并具有孔径。 端口门具有关闭位置，其中端口门至少部分地封闭孔。 闩锁键从端口门延伸并且被配置为与前开口统一盒（FOUP）的门的闩锁钥匙插座配合。 前进板被构造成支撑前开口统一舱（FOUP）并且在缩回位置和前进位置之间平移。 升降机提升并降低前进板，使FOUP门的闩锁键座与门口的闩锁键对准。

    Array centrifuge
    5.
    发明授权
    Array centrifuge 失效

    公开(公告)号：US06544161B2

    公开(公告)日：2003-04-08

    申请号：US09989760

    申请日：2001-11-20

    申请人： Scott P. Hunicke-Smith ,  Carl Buice ,  Benjamin Riepe ,  Theodore Rogers ,  David Huber

    发明人： Scott P. Hunicke-Smith ,  Carl Buice ,  Benjamin Riepe ,  Theodore Rogers ,  David Huber

    IPC分类号： B04B500

    CPC分类号： B01L3/5085 ,  B01J2219/00691 ,  B01L3/0217 ,  B01L2400/0409 ,  B04B5/0407 ,  B04B5/10 ,  B04B9/00 ,  B04B2011/046 ,  G01N35/0099 ,  G01N35/028 ,  G01N35/1065 ,  G01N35/1067 ,  G01N35/1074 ,  G01N2035/00495 ,  G01N2035/1069

    摘要： The present invention is directed to a microcentrifuge apparatus adapted to simultaneously spin a plurality of samples contained within a plurality of rotors. The microcentrifuge comprises an upper plate that has a plurality of upper plate holes; and a lower plate that has a plurality of lower plate holes or recesses. The lower plate is adjacent and substantially parallel to the upper plate, and the plurality of lower plate holes or recesses are in axial alignment with the plurality of upper plate holes. The plurality of rotors are adapted for retaining and spinning the plurality of samples, and are positioned between the upper plate and the lower plate. Each of the plurality of rotors has at opposing ends an upper shaft and a lower shaft, wherein the upper shaft engages one of the upper plate holes and the lower shaft engages one of the lower plate holes or recesses such that the axes of rotation of each of the plurality rotors are substantially perpendicular to the upper and lower plates. In addition, each of the rotors has a central outer surface portion positioned between the upper and lower plates, wherein the central outer surface portion is outwardly bulged. The microcentrifuge further comprises a pulley and a drive belt that is operatively engaged with the pulley and the bulged central outer surface portion of each of the plurality of rotors.

    Array centrifuge
    6.
    发明授权
    Array centrifuge 失效
    阵列离心机

    公开(公告)号：US06387031B1

    公开(公告)日：2002-05-14

    申请号：US09494132

    申请日：2000-01-28

    申请人： Scott P. Hunicke-Smith ,  Carl Buice ,  Benjamin Riepe ,  Theodore Rogers

    发明人： Scott P. Hunicke-Smith ,  Carl Buice ,  Benjamin Riepe ,  Theodore Rogers

    IPC分类号： B04B510

    CPC分类号： B01L3/5085 ,  B01J2219/00691 ,  B01L3/0217 ,  B01L2400/0409 ,  B04B5/0407 ,  B04B5/10 ,  B04B9/00 ,  B04B2011/046 ,  G01N35/0099 ,  G01N35/028 ,  G01N35/1065 ,  G01N35/1067 ,  G01N35/1074 ,  G01N2035/00495 ,  G01N2035/1069

    摘要： The present invention is directed to a microcentrifuge apparatus adapted to simultaneously spin a plurality of samples contained within a plurality of rotors. The microcentrifuge comprises an upper plate that has a plurality of upper plate holes; and a lower plate that has a plurality of lower plate holes or recesses. The lower plate is adjacent and substantially parallel to the upper plate, and the plurality of lower plate holes or recesses are in axial alignment with the plurality of upper plate holes. The plurality of rotors are adapted for retaining and spinning the plurality of samples, and are positioned between the upper plate and the lower plate. Each of the plurality of rotors has at opposing ends an upper shaft and a lower shaft, wherein the upper shaft engages one of the upper plate holes and the lower shaft engages one of the lower plate holes or recesses such that the axes of rotation of each of the plurality rotors are substantially perpendicular to the upper and lower plates. In addition, each of the rotors has a central outer surface portion positioned between the upper and lower plates, wherein the central outer surface portion is outwardly bulged. The microcentrifuge further comprises a pulley and a drive belt that is operatively engaged with the pulley and the bulged central outer surface portion of each of the plurality of rotors.

    摘要翻译： 本发明涉及一种适于同时旋转包含在多个转子内的多个样品的微量离心机装置。 微量离心机包括具有多个上板孔的上板; 以及具有多个下板孔或凹部的下板。 下板相邻并且基本上平行于上板，并且多个下板孔或凹槽与多个上板孔轴向对准。 多个转子适于保持和旋转多个样品，并且位于上板和下板之间。 多个转子中的每一个在相对端处具有上轴和下轴，其中上轴接合上板孔中的一个，下轴接合下板孔或凹槽中的一个，使得每个 多个转子基本上垂直于上板和下板。 此外，每个转子具有定位在上板和下板之间的中心外表面部分，其中中心外表面部分向外凸出。 微型离心机还包括滑轮和驱动皮带，该皮带轮和驱动皮带与多个转子中的每一个的滑轮和凸出的中心外表面部分可操作地接合。

    VARIABLE LOT SIZE LOAD PORT
    7.
    发明申请
    VARIABLE LOT SIZE LOAD PORT 审中-公开
    可变大尺寸负载端口

    公开(公告)号：US20080031709A1

    公开(公告)日：2008-02-07

    申请号：US11774760

    申请日：2007-07-09

    申请人： Anthony Bonora ,  Michael Krolak ,  Roger Hine ,  Theodore Rogers

    发明人： Anthony Bonora ,  Michael Krolak ,  Roger Hine ,  Theodore Rogers

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67772

    摘要： A variable lot size load port assembly includes a tool interface, a port door, an advance plate, and first and second latch keys. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The first latch key is disposed on the port door at a first elevation configured to selectively engage a corresponding latch key receptacle of a FOUP having a first selected FOUP capacity and the second latch key is disposed on the port door at a second elevation configured to selectively engage a corresponding latch key receptacle of another FOUP having a second selected FOUP capacity.

    摘要翻译： 可变批量装载端口组件包括工具接口，端口门，前进板以及第一和第二闩锁键。 工具界面通常在垂直方向上延伸并具有孔径。 端口门具有关闭位置，其中端口门至少部分地封闭孔。 前进板被构造成支撑前开口统一舱（FOUP）并且在缩回位置和前进位置之间平移。 第一闩锁键以第一高度设置在端口门上，第一高度被构造成选择性地接合具有第一选择的FOUP容量的FOUP的对应闩锁钥匙插座，并且第二闩锁键以第二高度设置在端口门上，第二高度被配置为选择性地 接合具有第二选择的FOUP容量的另一FOUP的对应的闩锁键插座。