公开(公告)号：US06472332B1

公开(公告)日：2002-10-29

申请号：US09723243

申请日：2000-11-28

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  Randy J. Shul ,  Christi Willison Gober

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  Randy J. Shul ,  Christi Willison Gober

IPC分类号： H01L21302

CPC分类号： H01L21/3088 ,  B41J2/16 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B81B2201/038 ,  H01L21/30655

摘要： Structures for use in conjunction with surface micromachined structures are formed using a two-step etching process. In various exemplary embodiments, the two-step etching process comprises a modified Bosch etch. According to various exemplary embodiments of the two-step etch, first mask and second masks are used to prepare a layer for etching one or more desired structures. The first mask is used to define at least one large feature. The second mask is used to define at least one small feature (small as compared to the at least one large feature). The second mask is formed over the first mask which is formed over the layer. In the first etching step, the at least one small feature is etched into the layer. Then, the second mask is removed using the chemical rinsing agent. In the second etching step, the at least one large feature is etched into the layer such that the at least one small feature propagates further into the layer ahead of the at least one large feature. The first mask is then removed. Other surface micromachined methods and structures are provided as well.

摘要翻译： 与表面微加工结构结合使用的结构使用两步蚀刻工艺形成。 在各种示例性实施例中，两步蚀刻工艺包括经修改的博世蚀刻。 根据两步蚀刻的各种示例性实施例，使用第一掩模和第二掩模来制备蚀刻一个或多个所需结构的层。 第一个掩模用于定义至少一个大的特征。 第二个掩模用于定义至少一个小特征（与至少一个大特征相比较小）。 第二掩模形成在形成在该层上的第一掩模上。 在第一蚀刻步骤中，至少一个小特征被蚀刻到该层中。 然后，使用化学漂洗剂除去第二面罩。 在第二蚀刻步骤中，至少一个大特征被蚀刻到层中，使得至少一个小特征进一步传播到至少一个大特征之前的层中。 然后删除第一个面具。 还提供了其他表面微加工方法和结构。

公开(公告)号：US06367915B1

公开(公告)日：2002-04-09

申请号：US09722331

申请日：2000-11-28

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

IPC分类号： B41J204

CPC分类号： B41J2/14314

摘要： An electrostatic microelectromechanical system (MEMS) based fluid ejector comprises a movable piston structure and a stationary faceplate. A fluid chamber is defined between the piston structure and a substrate. The piston structure 110 may be resiliently mounted on the substrate by one or more spring elements. A fluid to be ejected is supplied in the fluid chamber from a fluid reservoir through a fluid refill hole formed in the substrate. The faceplate includes a nozzle hole through which a fluid jet or drop is ejected. In various exemplary embodiments, the piston structure moves towards the faceplate by electrostatic attraction between the piston structure and the faceplate. As a result of the movement of the piston structure, a portion of the fluid between the piston structure and the faceplate is forced out of the nozzle hole, forming a jet or drop of the fluid.

摘要翻译： 基于静电微机电系统（MEMS）的流体喷射器包括可移动活塞结构和固定面板。 流体室限定在活塞结构和基底之间。 活塞结构110可以通过一个或多个弹簧元件弹性地安装在基底上。 待流出的液体从流体储存器通过形成在衬底中的流体填充孔供应到流体室中。 面板包括喷嘴孔，流体喷射或液滴通过喷嘴孔排出。 在各种示例性实施例中，活塞结构通过活塞结构和面板之间的静电吸引而向面板移动。 作为活塞结构的运动的结果，活塞结构和面板之间的一部分流体被迫从喷嘴孔流出，形成流体的喷射或液滴。

公开(公告)号：US06406130B1

公开(公告)日：2002-06-18

申请号：US09785160

申请日：2001-02-20

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  Leonard M. Carreira

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  Leonard M. Carreira

IPC分类号： B41J204

CPC分类号： B41J2/14314 ,  B41J2002/041

摘要： A fluid ejection system according to this invention operates on the principle of electrostatic or magnetic attraction. In various exemplary embodiments, the fluid ejection system includes a sealed diaphragm arrangement having at least one diaphragm portion and a diaphragm chamber defined at least partially by the at least one diaphragm portion, a nozzle hole located over the at least one diaphragm portion, an ejection chamber defined between the nozzle hole and the least one diaphragm portion and a secondary dielectric fluid reservoir containing a secondary dielectric fluid. The ejection chamber receives a primary fluid to be ejected. The secondary dielectric fluid reservoir is in fluid communication with the diaphragm chamber to supply the secondary dielectric fluid to the diaphragm chamber. In various exemplary embodiments, the secondary dielectric fluid is a liquid, a substantially incompressible fluid, and/or a high performance dielectric fluid having a dielectric constant greater than 1.

摘要翻译： 根据本发明的流体喷射系统基于静电或磁吸引的原理进行操作。 在各种示例性实施例中，流体喷射系统包括密封隔膜装置，其具有至少一个隔膜部分和至少部分地由至少一个隔膜部分限定的隔膜室，位于至少一个隔膜部分上方的喷嘴孔， 限定在喷嘴孔和至少一个隔膜部分之间的腔室以及包含第二介电流体的次级介质流体储存器。 喷射室接收要喷射的主要流体。 次级介质流体储存器与隔膜室流体连通，以将次级介质流体供应到隔膜室。 在各种示例性实施例中，次级介电流体是具有大于1的介电常数的液体，基本上不可压缩的流体和/或高性能介电流体。

公开(公告)号：US06419335B1

公开(公告)日：2002-07-16

申请号：US09718480

申请日：2000-11-24

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  William M. Lindenfelser

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  William M. Lindenfelser

IPC分类号： B41J2938

CPC分类号： B41J2/14 ,  B41J2002/043

摘要： An electronic drive system applies a drive signal to an electrostatically actuated device such that a resulting electric field has a constant force. In various exemplary embodiments, the electronic drive system applies a drive signal to an electrostatically actuated fluid ejector that has a piston and a faceplate including a nozzle hole. A dielectric fluid to be ejected is supplied between the piston and the faceplate. The drive signal is applied to one of the piston and the faceplate. The drive signal generates an electric field across the fluid between the piston and the faceplate. The electric field causes the piston to be electrostatically attracted towards the faceplate so that a jet or drop of fluid is ejected through the nozzle hole of the faceplate. According to exemplary embodiments, the drive signal is from a constant current source or is reduced over the course of its lifetime. Further, according to various exemplary embodiments, the drive signal is of a suitable high frequency to reduce the potential of electrochemical reactions or electrical breakdown, or both. The drive signal may also be a bi-polar drive signal to reduce the possibility of electrochemical reactions.

摘要翻译： 电子驱动系统将驱动信号施加到静电致动装置，使得所产生的电场具有恒定的力。 在各种示例性实施例中，电子驱动系统将驱动信号施加到具有活塞和包括喷嘴孔的面板的静电驱动流体喷射器。 待喷射的介质流体供应在活塞和面板之间。 驱动信号被施加到活塞和面板中的一个。 驱动信号通过活塞和面板之间的流体产生电场。 电场导致活塞被静电吸引到面板上，使得喷射或液滴流过面板的喷嘴孔。 根据示例性实施例，驱动信号来自恒定电流源，或者在其寿命期间减小。 此外，根据各种示例性实施例，驱动信号具有合适的高频率，以减少电化学反应或电击穿的可能性，或者两者。 驱动信号也可以是双极驱动信号，以减少电化学反应的可能性。

公开(公告)号：US06409311B1

公开(公告)日：2002-06-25

申请号：US09718476

申请日：2000-11-24

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

IPC分类号： B41J204

CPC分类号： B41J2/14314

摘要： A bi-directional fluid ejector according to the systems and methods of this invention operates on the principle of electrostatic attraction. In various exemplary embodiments, the fluid ejector includes a sealed dual diaphragm arrangement, an electrode arrangement that is parallel and opposite to the sealed diaphragms, and a structure which contains the fluid to be ejected. A diaphragm chamber containing a relatively incompressible fluid is situated behind, and is sealed by, the diaphragms. At least one nozzle hole is formed in a faceplate of the ejector over one of the diaphragms. A drive signal is applied to at least one electrode of the electrode arrangement to generate an electrostatic field between the electrode and a first one of the diaphragms. The first diaphragm is attracted towards the electrode by an electrostatic force into a deformed shape due to the electrostatic field. Upon deforming, pressure is transmitted to a second one of the sealed diaphragms. The transmitted pressure and the relatively incompressible nature of the fluid contained within the sealed diaphragm chamber causes the second diaphragm to deflect in the opposite direction to force fluid through at least one of the at least one nozzle hole. After a drop is ejected, the movement is reversed, either through normal resilient restoration actions of the deformed diaphragm and/or through an applied force.

摘要翻译： 根据本发明的系统和方法的双向流体喷射器基于静电吸引的原理进行操作。 在各种示例性实施例中，流体喷射器包括密封的双隔膜装置，与密封隔膜平行和相对的电极装置，以及包含要喷射的流体的结构。 包含相对不可压缩流体的隔膜室位于隔膜的后面并被隔膜密封。 在喷射器的面板中的一个隔膜上形成至少一个喷嘴孔。 将驱动信号施加到电极装置的至少一个电极，以在电极和第一隔膜之间产生静电场。 第一隔膜由于静电场而被静电力吸引到变形的形状中。 在变形时，压力被传递到密封隔膜中的第二个。 包含在密封隔膜室内的流体的透过压力和相对不可压缩的性质导致第二隔膜在相反方向上偏转以迫使流体通过至少一个喷嘴孔中的至少一个。 在液滴被弹出之后，运动通过变形膜片的正常弹性恢复动作和/或通过施加的力来反转。

公开(公告)号：US06416169B1

公开(公告)日：2002-07-09

申请号：US09718420

申请日：2000-11-24

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

IPC分类号： B41J204

CPC分类号： B41J2/14 ,  B41J2002/043

摘要： A piston structure is movably mounted within a fluid chamber. Movement of the piston structure towards a faceplate causes a portion of the fluid between the piston and the faceplate to be forced out of the nozzle hole in the faceplate, forming a drop or jet of the fluid. Viscous forces that are generated by the flow of fluid along a working surface of the piston structure toward and away from the nozzle hole generate a force that resists the movement of the piston structure. This resistance force tends to slow the piston motion, and prevents the piston from contacting the faceplate. In various embodiments, the fluid chamber is defined by a cylinder structure. The piston structure moves within the cylinder structure. The cylinder structure and the faceplate define the fluid chamber. The cylinder structure and the piston structure are designed to cooperate so that the movement of the piston structure within the cylinder structure ejects fluid according to various design criteria. In various embodiments, a free space is provided between the faceplate and the piston structure at its maximum displacement towards the faceplate.

摘要翻译： 活塞结构可移动地安装在流体室内。 活塞结构朝向面板的运动导致活塞和面板之间的流体的一部分被迫离开面板中的喷嘴孔，形成液体的液滴或射流。 由流体沿着活塞结构的工作表面朝向和远离喷嘴孔流动产生的粘性力产生抵抗活塞结构的运动的力。 该阻力往往会减慢活塞运动，并防止活塞接触面板。 在各种实施例中，流体室由气缸结构限定。 活塞结构在气缸结构内移动。 气缸结构和面板限定流体室。 气缸结构和活塞结构被设计成配合，使得活塞结构在气缸结构内的运动根据各种设计标准喷射流体。 在各种实施例中，在朝向面板的最大位移处，在面板和活塞结构之间提供自由空间。

公开(公告)号：US06350015B1

公开(公告)日：2002-02-26

申请号：US09718495

申请日：2000-11-24

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley, Jr. ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  D. Russell Humphreys ,  Jeffry J. Sniegowski

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley, Jr. ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  D. Russell Humphreys ,  Jeffry J. Sniegowski

IPC分类号： B41J204

CPC分类号： B41J2/14 ,  B41J2002/041

摘要： The systems and methods of the present invention operate by magnetically driving a fluid ejector. In various exemplary embodiments, a primary coil and a secondary coil are situated in the ejector. The ejector has a movable piston usable to eject fluid through a nozzle hole. The piston may be resiliently mounted and biased to an at-rest position. A drive signal is applied to cause current to flow in the primary coil. The current flow generates a magnetic field that induces a current in the secondary coil. Either the primary coil or the secondary coil or associated with the piston and the other is associated with a fixed structure of the ejector. As a result, a magnetic force is generated that pushes the piston either toward a faceplate so that a drop of fluid is ejected through the nozzle hole in the faceplate or away from the faceplate so that fluid fills in a fluid chamber between the piston and the faceplate. When the drive signal is turned off, the piston resiliently returns to its at-rest position, thereby either refilling the ejected fluid or ejecting a drop of fluid through the nozzle hole in the faceplate. In various other embodiments, the faceplate is made of a magnetic material, such as a ferrous material, or is coated with or connected to a magnetic material. A second primary coil or a permanent magnet may be included in various other embodiments. In various embodiments, switching the direction of the current changes the magnetic force between attraction and repulsion.

摘要翻译： 本发明的系统和方法通过磁驱动流体喷射器来操作。 在各种示例性实施例中，初级线圈和次级线圈位于喷射器中。 喷射器具有用于将流体喷射通过喷嘴孔的活动活塞。 活塞可以弹性安装并偏置到静止位置。 施加驱动信号以使电流在初级线圈中流动。 电流产生在次级线圈中产生电流的磁场。 初级线圈或次级线圈或与活塞相关联的线圈或者与线圈相关联的另一个线圈与喷射器的固定结构相关联。 结果，产生磁力将活塞推向面板，使得一滴液体通过面板中的喷嘴孔或离开面板喷射，使得流体填充在活塞和活塞之间的流体室中 面板。 当驱动信号关闭时，活塞弹性地返回到其静止位置，从而重新填充喷射的流体或者通过面板中的喷嘴孔喷射一滴液体。 在各种其他实施例中，面板由诸如铁类材料的磁性材料制成，或者被涂覆或连接到磁性材料。 在各种其他实施例中可以包括第二初级线圈或永磁体。 在各种实施例中，切换电流的方向改变吸引力和排斥之间的磁力。

公开(公告)号：US07092272B1

公开(公告)日：2006-08-15

申请号：US11389738

申请日：2006-03-27

申请人： Jeffrey C. Gilkey ,  Michelle A. Duesterhaus ,  Frank J. Peter ,  Rosemarie A. Renn ,  Michael S. Baker

发明人： Jeffrey C. Gilkey ,  Michelle A. Duesterhaus ,  Frank J. Peter ,  Rosemarie A. Renn ,  Michael S. Baker

IPC分类号： G11C19/00

CPC分类号： G11C23/00 ,  G11C19/00

摘要： A first-in-first-out (FIFO) microelectromechanical memory apparatus (also termed a mechanical memory) is disclosed. The mechanical memory utilizes a plurality of memory cells, with each memory cell having a beam which can be bowed in either of two directions of curvature to indicate two different logic states for that memory cell. The memory cells can be arranged around a wheel which operates as a clocking actuator to serially shift data from one memory cell to the next. The mechanical memory can be formed using conventional surface micromachining, and can be formed as either a nonvolatile memory or as a volatile memory.

摘要翻译： 公开了先进先出（FIFO）微机电存储装置（也称为机械存储器）。 机械存储器利用多个存储器单元，其中每个存储器单元具有可以在两个曲率方向中的任一方向上弯曲的光束，以指示该存储器单元的两种不同的逻辑状态。 存储器单元可以布置在作为时钟执行器的轮周围，以将数据从一个存储器单元串行地移位到下一个存储器单元。 机械存储器可以使用常规的表面微加工形成，并且可以形成为非易失性存储器或易失性存储器。

公开(公告)号：US07046539B1

公开(公告)日：2006-05-16

申请号：US10979419

申请日：2004-11-02

申请人： Jeffrey C. Gilkey ,  Michelle A. Duesterhaus ,  Frank J. Peter ,  Rosemarie A. Renn ,  Michael S. Baker

发明人： Jeffrey C. Gilkey ,  Michelle A. Duesterhaus ,  Frank J. Peter ,  Rosemarie A. Renn ,  Michael S. Baker

IPC分类号： G11C5/06 ,  B81B7/02

CPC分类号： G11C23/00 ,  G11C19/00

摘要： A first-in-first-out (FIFO) microelectromechanical memory apparatus (also termed a mechanical memory) is disclosed. The mechanical memory utilizes a plurality of memory cells, with each memory cell having a beam which can be bowed in either of two directions of curvature to indicate two different logic states for that memory cell. The memory cells can be arranged around a wheel which operates as a clocking actuator to serially shift data from one memory cell to the next. The mechanical memory can be formed using conventional surface micromachining, and can be formed as either a nonvolatile memory or as a volatile memory.

公开(公告)号：US06484545B1

公开(公告)日：2002-11-26

申请号：US09294782

申请日：1999-04-19

申请人： Frank J. Peter ,  Larry J. Dalton ,  David W. Plummer

发明人： Frank J. Peter ,  Larry J. Dalton ,  David W. Plummer

IPC分类号： E05B3716

CPC分类号： E05B37/166 ,  Y10T70/7164 ,  Y10T70/7226 ,  Y10T70/7271 ,  Y10T70/7311

摘要： A new class of mechanical code comparators is described which have broad potential for application in safety, surety, and security applications. These devices can be implemented as micro-scale electromechanical systems that isolate a secure or otherwise controlled device until an access code is entered. This access code is converted into a series of mechanical inputs to the mechanical code comparator, which compares the access code to a pre-input combination, entered previously into the mechanical code comparator by an operator at the system security control point. These devices provide extremely high levels of robust security. Being totally mechanical in operation, an access control system properly based on such devices cannot be circumvented by software attack alone.

摘要翻译： 描述了一类新的机械代码比较器，在安全，保证和安全应用中具有广泛的应用潜力。 这些设备可以实现为微型机电系统，其隔离安全或其他受控设备，直到输入访问代码。 该访问代码被转换为机械代码比较器的一系列机械输入，该机械代码比较器将访问代码与预先输入的组合进行比较，该输入组合在系统安全控制点处由操作员先前输入机械代码比较器。 这些设备提供极高水平的强大的安全性。 完全机械的运行，正是基于这样的设备的访问控制系统不能仅靠软件攻击来规避。