公开(公告)号：US20090137325A1

公开(公告)日：2009-05-28

申请号：US12277993

申请日：2008-11-25

申请人： Atsushi Ando ,  Tomohiko Sato ,  Takumi Matsumoto ,  Takeo Yamamoto

发明人： Atsushi Ando ,  Tomohiko Sato ,  Takumi Matsumoto ,  Takeo Yamamoto

IPC分类号： F16D3/00

CPC分类号： F16D3/205 ,  Y10S464/905

摘要： A constant velocity universal joint is provided, having a hollow outer joint member, an inner joint member, an outer roller including a cylindrical surface, an inner roller including a concave sphere, and plural leg shafts each including a convex sphere formed in a tip portion and engaging with the concave sphere, where the cylindrical surface of the outer roller satisfies the following: W1>PCR(1−cos θ)/2+μ3R3+μ2R1 W2>3PCR(1−cos θ)/2−μ3R3+μ2R1, where W1 indicates a length of the cylindrical surface from a center of the leg shaft and an intersection of the cylindrical surface and an upper side taper portion of the outer roller, W2 indicates a length of the cylindrical surface from the center of the leg shaft and an intersection of the cylindrical surface and a lower side taper portion of the outer roller, and θ indicates a maximum joint angle.

摘要翻译： 提供了一种等速万向接头，其具有中空的外接头构件，内接头构件，包括圆柱形表面的外滚子，包括凹球的内滚子和多个腿轴，每个腿轴包括形成在尖端部分中的凸球 并且与凹面球接合，其中外滚筒的圆柱形表面满足以下条件：<？in-line-formula description =“In-line formula”end =“lead”？> W1> PCR（1-cosθ） / 2 + mu3R3 + mu2R1 <？in-line-formula description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> W2> 3PCR（1-cosθ）/ 2-mu3R3 + mu2R1，<？in-line-formula description =“In-line Formulas”end =“tail”？>其中W1表示圆柱形表面的中心长度 的腿部轴线和外侧辊的圆筒状面与上侧锥形部的交点W2表示从腿部轴心的中心的圆筒面的长度， 外滚子的圆柱形表面和下侧锥形部分，θ表示最大关节角度。

公开(公告)号：US20070066405A1

公开(公告)日：2007-03-22

申请号：US10549565

申请日：2004-12-09

申请人： Atsushi Ando ,  Tomohiko Sato ,  Takumi Matsumoto ,  Takeo Yamamoto

发明人： Atsushi Ando ,  Tomohiko Sato ,  Takumi Matsumoto ,  Takeo Yamamoto

IPC分类号： F16D3/00

CPC分类号： F16D3/2055 ,  F16D3/205 ,  F16D2003/2023

摘要： In a constant velocity universal joint including a double roller type roller unit, a cylindrical surface is formed in a radially outer surface of the outer roller; a flat engagement surface which is engaged with the cylindrical surface is formed in each of the guide grooves of the outer joint member; and the cylindrical surface satisfies following two equations, W1>PCR (1−cos θ)/2+μ3R3+μ2R1, W2>3PCR (1−cos θ)/2−μ3R3+μ2R1wherein W1, W2: a length from a center of the cylindrical surface to each of axially both end portions; PCR: a distance from an axis of the inner joint member to a center of the convex sphere of each of the leg shafts; θ: a required maximum joint angle; R1, R3: radii of the cylindrical surface and the concave sphere, respectively; and μ2, μ3: friction coefficients between the inner roller and the outer roller, and between the convex sphere and the concave sphere, respectively.

摘要翻译： 在包括双辊型辊单元的等速万向接头中，在外辊的径向外表面上形成圆柱面; 在外接头构件的每个引导槽中形成有与圆筒形表面接合的平坦接合表面; 并且圆柱形表面满足以下两个等式：W 1> PCR（1-cosθ）/ 2 + mu 3 R 3 + mu 2 R 1，W 2> 3PCR （1-cosθ）/ 2-mu 3 R 3 +μ2 R 1其中W 1，W 2：从圆柱形表面的中心到每个的长度 轴向两端部; PCR：从内接头构件的轴线到每个腿轴的凸球的中心的距离; θ：所需的最大关节角度; R 1，R 3分别为圆柱面和凹球的半径; 和内部辊子和外部辊子之间以及凸形球体和凹形球体之间的摩擦系数分别为μ2，3/3。

公开(公告)号：US08029372B2

公开(公告)日：2011-10-04

申请号：US12277993

申请日：2008-11-25

申请人： Atsushi Ando ,  Tomohiko Sato ,  Takumi Matsumoto ,  Takeo Yamamoto

发明人： Atsushi Ando ,  Tomohiko Sato ,  Takumi Matsumoto ,  Takeo Yamamoto

IPC分类号： F16D3/205

CPC分类号： F16D3/205 ,  Y10S464/905

摘要： A constant velocity universal joint is provided, having a hollow outer joint member, an inner joint member, an outer roller including a cylindrical surface, an inner roller including a concave sphere, and plural leg shafts each including a convex sphere formed in a tip portion and engaging with the concave sphere, where the cylindrical surface of the outer roller satisfies the following: W1>PCR(1−cos θ)/2+μ3R3+μ2R1 W2>3PCR(1−cos θ)/2−μ3R3+μ2R1, where W1 indicates a length of the cylindrical surface from a center of the leg shaft and an intersection of the cylindrical surface and an upper side taper portion of the outer roller, W2 indicates a length of the cylindrical surface from the center of the leg shaft and an intersection of the cylindrical surface and a lower side taper portion of the outer roller, and θ indicates a maximum joint angle.

摘要翻译： 提供了一种等速万向接头，其具有中空的外接头构件，内接头构件，包括圆柱形表面的外滚子，包括凹球的内滚子和多个腿轴，每个腿轴包括形成在尖端部分中的凸球 并且与外滚子的圆柱面对应的凹球符合如下：W1> PCR（1-cos＆Thetas）/ 2 +μ3R3+μ2R1W2> 3PCR（1-cos＆amp; thetas）/ 2-μ3R3+ μ2R1，其中W1表示从腿部轴的中心起的圆柱形表面的长度以及圆柱形表面和外部辊的上侧锥形部分的交点，W2表示从腿部中心的圆柱形表面的长度 轴和圆筒表面与外辊的下侧锥形部分的交点，和＆ 表示最大关节角度。

公开(公告)号：US20090197687A1

公开(公告)日：2009-08-06

申请号：US12340264

申请日：2008-12-19

申请人： Atsushi Ando ,  Tomohiko Sato ,  Takumi Matsumoto ,  Takeo Yamamoto

发明人： Atsushi Ando ,  Tomohiko Sato ,  Takumi Matsumoto ,  Takeo Yamamoto

IPC分类号： F16D3/26

CPC分类号： F16D3/205 ,  F16D3/2055

摘要： A constant velocity universal joint is provided, having a hollow outer joint member, an inner joint member, an outer roller including a cylindrical surface, an inner roller including a concave sphere, and plural leg shafts each including a convex sphere formed in a tip portion and engaging with the concave sphere, where the cylindrical surface of the outer roller satisfies the following: W1>PCR (1−cos θ)/2+μ3R3+μ2R1 W2>3PCR (1−cos θ)/2−μ3R3+μ2R1, where W1 indicates a length of the cylindrical surface from a center of the leg shaft and an intersection of the cylindrical surface and an upper side taper portion of the outer roller, W2 indicates a length of the cylindrical surface from the center of the leg shaft and an intersection of the cylindrical surface and a lower side taper portion of the outer roller, and θ indicates a maximum joint angle.

摘要翻译： 提供了一种等速万向接头，其具有中空的外接头构件，内接头构件，包括圆柱形表面的外滚子，包括凹球的内滚子和多个腿轴，每个腿轴包括形成在尖端部分中的凸球 并且与凹面球接合，其中外滚筒的圆柱形表面满足以下条件：<？in-line-formula description =“In-line formula”end =“lead”？> W1> PCR（1-cosθ） / 2 + mu3R3 + mu2R1 <？in-line-formula description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> W2> 3PCR（1-cosθ）/ 2-mu3R3 + mu2R1，<？in-line-formula description =“In-line Formulas”end =“tail”？>其中W1表示圆柱形表面的中心长度 的腿部轴线和外侧辊的圆筒状面与上侧锥形部的交点W2表示从腿部轴心的中心的圆筒面的长度， f为外滚子的圆筒形表面和下侧锥形部分，θ表示最大关节角度。

公开(公告)号：US08598755B2

公开(公告)日：2013-12-03

申请号：US13047084

申请日：2011-03-14

申请人： Yoshinobu Katoh ,  Yosuke Nishimura ,  Atsushi Ando

发明人： Yoshinobu Katoh ,  Yosuke Nishimura ,  Atsushi Ando

IPC分类号： H02K7/116

CPC分类号： H02K9/22 ,  H02K24/00

摘要： A housing is provided with a partition wall portion that partitions an inner space of the housing into an electric motor accommodating space and a speed reducer accommodating space. The partition wall portion fixes a gear that constitutes a speed reducer. In addition, the partition wall portion has a housing boss portion, and an inner stator is fixed to the housing boss portion. Thus, heat generated by the inner stator is dissipated to the outside through the housing boss portion and the partition wall portion.

摘要翻译： 壳体设置有将壳体的内部空间分隔成电动机容纳空间的分隔壁部分和减速器容纳空间。 分隔壁部分固定构成减速器的齿轮。 此外，分隔壁部分具有壳体凸起部分，并且内部定子固定到壳体凸起部分。 因此，由内部定子产生的热量通过壳体凸起部分和分隔壁部分消散到外部。

公开(公告)号：US20050109955A1

公开(公告)日：2005-05-26

申请号：US10959508

申请日：2004-10-07

申请人： Osamu Nagano ,  Atsushi Ando

发明人： Osamu Nagano ,  Atsushi Ando

IPC分类号： G03F7/20 ,  A61N5/00 ,  H01J37/147 ,  H01J37/305 ,  H01J37/317 ,  H01L21/027

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3174

摘要： A charged particle beam lithography system includes: a charged particle beam source which generates a charged particle beam and irradiates a substrate therewith; an aperture in which has been formed a pattern of a shape corresponding to an arbitrary pattern to be drawn; an illuminator which adjusts the diameter of the charged particle beam and illuminates the aperture with the charged particle beam; a first deflector which deflects the charged particle beam by an electrical field to cause the charged particle beam to be incident on an arbitrary pattern, allowing the charged particle beam to pass through the aperture and be reflected back along the optical axis; a first demagnification optical projection system which demagnifies the aperture image of the charged particle beam which has passed through the aperture with the use of an electrical field or electromagnetic field; a second demagnification optical projection system which demagnifies the aperture image of the charged particle beam which has been demagnified by the first demagnification projection optical system, with the use of an electrical field or electromagnetic field to form an image on the substrate; and a beam diameter adjuster which adjusts the illuminator in such a manner that the beam diameter at crossovers of the charged particle beam, formed between the aperture and the first demagnification optical projection system and within the second demagnification optical projection system, is greater than the size of the pattern.

摘要翻译： 带电粒子束光刻系统包括：带电粒子束源，其产生带电粒子束并照射衬底; 已经形成了与要拉制的任意图案相对应的形状的图案的孔; 照明器，其调节带电粒子束的直径并用带电粒子束照射孔径; 第一偏转器，其通过电场使带电粒子束偏转，以使带电粒子束入射到任意图案上，允许带电粒子束通过孔径并沿光轴反射回; 第一缩小光学投影系统，其通过使用电场或电磁场来对通过所述孔径的带电粒子束的孔径图像进行缩小; 第二缩小光学投影系统，其通过使用电场或电磁场在所述基板上形成图像来对由所述第一缩尺投影光学系统进行了缩小的带电粒子束的孔径图像进行缩小; 以及光束直径调节器，其以这样的方式调节照明器，使得形成在孔和第一缩小光学投影系统之间并且在第二缩小光学投影系统内的带电粒子束的交叉处的光束直径大于尺寸 的模式。

公开(公告)号：US06718532B2

公开(公告)日：2004-04-06

申请号：US10080081

申请日：2002-02-22

申请人： Ryoichi Inanami ,  Shunko Magoshi ,  Atsushi Ando

发明人： Ryoichi Inanami ,  Shunko Magoshi ,  Atsushi Ando

IPC分类号： G06F1750

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/31776

摘要： A charged particle beam exposure method for shaping a charged particle beam by using an aperture mask having character apertures corresponding to the character shapes extracted from a semiconductor device pattern, the method comprises arranging the character apertures in the aperture mask, each of the character apertures having a shape corresponding to character shapes extracted from a standard cell pattern used for designing a semiconductor device, and varying the shape of the charged particle beam according to the outer shape of each of the character apertures, thereby applying the shaped charged particle beam to the character apertures.

摘要翻译： 一种带电粒子束曝光方法，用于通过使用具有对应于从半导体器件图案提取的字符形状的字符孔的孔径掩模来对带电粒子束进行成形，该方法包括在孔径掩模中布置字符孔，每个字符孔具有 对应于从用于设计半导体器件的标准单元图案提取的字符形状的形状，以及根据每个字符孔的外形来改变带电粒子束的形状，从而将成形带电粒子束施加到字符 孔。

公开(公告)号：US06633045B1

公开(公告)日：2003-10-14

申请号：US09667521

申请日：2000-09-22

申请人： Kazuyoshi Sugihara ,  Atsushi Ando ,  Katsuya Okumura

发明人： Kazuyoshi Sugihara ,  Atsushi Ando ,  Katsuya Okumura

IPC分类号： G21G500

CPC分类号： H05K3/0061 ,  H01J2237/3175 ,  H05K1/0284 ,  H05K1/0393 ,  H05K1/056 ,  H05K3/048 ,  H05K3/28 ,  H05K3/365 ,  H05K3/386 ,  H05K2201/0154 ,  H05K2203/066 ,  H05K2203/135

摘要： An assembly part for constituting a unit in a vacuum column is provided with wirings and wiring terminals. Each wiring is provided on a first insulating film, and is covered with a second insulating film made of an electro-deposited polyimide film. The assembly part is used to constitute a semiconductor manufacturing system such as an electron beam exposure system.

摘要翻译： 用于构成真空塔中的单元的组装部分设置有布线和布线端子。 每个布线设置在第一绝缘膜上，并被由电沉积聚酰亚胺膜制成的第二绝缘膜覆盖。 组装部分用于构成诸如电子束曝光系统的半导体制造系统

公开(公告)号：US5989759A

公开(公告)日：1999-11-23

申请号：US30886

申请日：1998-02-26

申请人： Atsushi Ando ,  Kazuyoshi Sugihara ,  Katsuya Okumura ,  Tetsuro Nakasugi

发明人： Atsushi Ando ,  Kazuyoshi Sugihara ,  Katsuya Okumura ,  Tetsuro Nakasugi

IPC分类号： G03F7/20 ,  H01J37/304 ,  H01J37/317 ,  H01L21/027 ,  G03F9/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F7/7045 ,  G03F7/70675 ,  H01J37/3045 ,  H01J37/3174 ,  Y10S430/143

摘要： To achieve down-sizing and improvements of throughputs, light exposure and charge beam exposure are sometimes used together. In case of performing exposure of a desired pattern in a plurality of stages, a positional displacement of each of exposure patterns in the stages leads to a decrease in exposure accuracy. According to the present invention, in case of forming a fine pattern by exposure after exposure of a rough pattern, the exposure position of the rough pattern is adjusted, based on a latent image of the rough pattern which has been subjected to exposure. As a result, a positional displacement between rough and fine patterns is reduced so that a desired pattern can be formed with high accuracy.

摘要翻译： 为了实现规模缩小和吞吐量的提高，有时一起使用曝光和电荷束曝光。 在多级中进行期望图案的曝光的情况下，各级的曝光图案的位置偏移导致曝光精度降低。 根据本发明，在粗糙图案曝光后通过曝光形成精细图案的情况下，基于经受曝光的粗糙图案的潜像，调整粗糙图案的曝光位置。 结果，粗图案和精细图案之间的位置偏移减小，从而可以高精度地形成期望的图案。

公开(公告)号：US4755732A

公开(公告)日：1988-07-05

申请号：US54908

申请日：1987-05-27

申请人： Atsushi Ando

发明人： Atsushi Ando

IPC分类号： H02P8/14 ,  H02P8/22 ,  H02P8/00

CPC分类号： H02P8/22 ,  H02P8/14

摘要： A microangle drive circuit for a stepping motor and the system therefor comprising output elements pairs of which are connected to one another in series, a sense resistance connected to the output elements in series to make a motor coil control circuit for a phase or coil, a stepping motor control circuit made for n-phases, and motor coils. These circuit and system increase accuracy in rotation and stop by dividing the rotation angles of the stepping motor into microangles.

摘要翻译： 一种用于步进电机的微角驱动电路及其系统，包括串联连接的输出元件对，连接到串联的输出元件的感测电阻，以形成用于相或线圈的电动机线圈控制电路， 用于n相的步进电机控制电路和电机线圈。 这些电路和系统通过将步进电机的旋转角度分成微小的方式提高旋转精度和停止。