公开(公告)号：US3669863A

公开(公告)日：1972-06-13

申请号：US3669863D

申请日：1970-12-28

Applicant: BELL TELEPHONE LABOR INC

Inventor： PETERS FRANK GROOM ,  SINCLAIR WILLIAM ROBERT ,  SULLIVAN VINCENT

IPC: C23C14/00 ,  G03F1/54 ,  C23C15/00

CPC classification number: G03F1/54 ,  C23C14/0057

Abstract: A technique for the preparation of iron oxide films designed for use as photomasks for thin film and semiconductor processing involves sputtering iron in a carbon monoxide ambient containing carbon dioxide upon a substrate member.

Abstract translation: 用于制备用作薄膜和半导体处理的光掩模的氧化铁膜的技术包括在含有二氧化碳的一氧化碳环境中将铁溅射到基底部件上。