公开(公告)号：US20230317482A1

公开(公告)日：2023-10-05

申请号：US18189639

申请日：2023-03-24

Applicant: EBARA REFRIGERATION EQUIPMENT & SYSTEMS CO., LTD. ,  CKD CORPORATION

Inventor： Yukihiro FUKUSUMI ,  Shinichi NITTA ,  Norio KOKUBO

IPC: H01L21/67 ,  G05D23/19

CPC classification number: H01L21/67248 ,  G05D23/19

Abstract: A temperature regulating apparatus includes: a heating section configured to produce a heating liquid; a cooling section configured to produce a cooling liquid; a heating-liquid delivery pipe for delivering the heating liquid to the semiconductor-device manufacturing equipment; a cooling-liquid delivery pipe for delivering the cooling liquid to the semiconductor-device manufacturing equipment; a heating-side return pipe for returning a liquid mixture of the heating liquid and the cooling liquid that have passed through the semiconductor-device manufacturing equipment to the heating section; a cooling-side return pipe for returning the liquid mixture that has passed through the semiconductor-device manufacturing equipment to the cooling section; and at least one of a heating-side heat exchanger configured to exchange heat between the heating liquid and the liquid mixture and a cooling-side heat exchanger configured to exchange heat between the cooling liquid and the liquid mixture.

公开(公告)号：US20140030480A1

公开(公告)日：2014-01-30

申请号：US14042553

申请日：2013-09-30

Applicant: CKD Corporation

Inventor： Shinichi NITTA ,  Hiroshi ITAFUJI

IPC: B32B7/12

CPC classification number: B32B7/12 ,  F04B43/02 ,  F04B43/021 ,  F04B43/04 ,  F16J3/02 ,  F16K7/12 ,  Y10T428/24331 ,  Y10T428/24752 ,  Y10T428/31678

Abstract: This invention provides a multi-layer diaphragm which is for use in fluid devices and has excellent maintainability in addition to both operability and pressure resistance. This multi-layer diaphragm is provided with a first and second plate and with an elastic adhesive layer which binds together the first and second metal plates. The elastic adhesive layer has an elastic layer that is elastic in a direction which offsets the first and second metal plates from one another in the in-plane direction. The multi-layer diaphragm is provided with a metal mounting plate which, provided in a position allowing protrusion beyond the first and second metal plates in the outer edge direction, has a mounting unit for mounting to the fluid device.

Abstract translation: 本发明提供一种用于流体装置的多层隔膜，除了可操作性和耐压性之外，还具有优异的可维护性。 该多层隔膜设置有第一和第二板，并且具有将第一和第二金属板结合在一起的弹性粘合剂层。 弹性粘合剂层具有弹性层，该弹性层沿使得第一和第二金属板在面内方向彼此偏移的方向具有弹性。 多层隔膜设置有金属安装板，该金属安装板设置在允许在第一金属板和第二金属板之间在外边缘方向上突出的位置，具有用于安装到流体装置的安装单元。

公开(公告)号：US20220187027A1

公开(公告)日：2022-06-16

申请号：US17440812

申请日：2020-03-19

Applicant: CKD CORPORATION

Inventor： Akihiro ITO ,  Takahiro MINATANI ,  Shinichi NITTA

IPC: F28D20/02

Abstract: A heat exchange system is arranged between a chiller device and a temperature control member, and is provided with: supply line for supplying a refrigerant from the chiller device to the temperature control member; a return line for returning the refrigerant from the temperature control member to the chiller device; a bypass line for bypassing the supply line and the return line; a latent heat storage member arranged closer to the chiller device relative to a first connection point connecting the return line and the bypass line; and a flow distribution unit that is arranged at a second connection point connecting the outgoing line and the bypass line, and that is for adjusting a ratio for distributing refrigerant to the temperature control member and the bypass line.

公开(公告)号：US20150021505A1

公开(公告)日：2015-01-22

申请号：US14469010

申请日：2014-08-26

Applicant: CKD CORPORATION

Inventor： Shinichi NITTA ,  Takashi YAJIMA

IPC: F16K31/524 ,  F16K31/528

CPC classification number: F16K31/52408 ,  F16K31/163 ,  F16K31/528 ,  F16K41/103

Abstract: An inlet flow passage, a valve seat section, and a valve chamber are formed within a flow passage block. An operation chamber, a rocking chamber, and a drive chamber are formed within a case along a reference plane. A valve rod is brought into contact with and separated from the valve seat section by reciprocating through the operation chamber in an extending direction thereof. A piston rod reciprocates through the drive chamber in an extending direction thereof. A lever member is received in the rocking chamber and has a support shaft section. The distance between the center of the support shaft section and a second contact position where the piston rod contacts the lever member is set greater than the distance between the center of the support shaft section and a first contact position where the valve rod contacts the lever member.

Abstract translation: 入口流动通道，阀座部分和阀室形成在流动通道块内。 操作室，摆动室和驱动室沿着参考平面形成在壳体内。 阀杆通过操作室沿其延伸方向往复运动而与阀座部分接触并分离。 活塞杆在其延伸方向上通过驱动室往复运动。 杠杆构件容纳在摆动室中并具有支撑轴部分。 支撑轴部分的中心与活塞杆接触杠杆部件的第二接触位置之间的距离被设定为大于支撑轴部分的中心与阀杆接触杠杆部件的第一接触位置之间的距离 。

公开(公告)号：US20130343909A1

公开(公告)日：2013-12-26

申请号：US14012820

申请日：2013-08-28

Applicant: CKD CORPORATION

Inventor： Shinichi NITTA

IPC: F04B43/04

CPC classification number: F04B43/046 ,  F04B43/02 ,  F04B43/021 ,  F04B43/04

Abstract: A liquid feed pump includes a pump housing, a diaphragm forming a pump chamber together with the recessed portion surface and partitioning the pump chamber from the hole, a reciprocating member reciprocatably inserted into the hole and reciprocating to press the diaphragm to deform, a driving member displacing the reciprocating member periodically in a direction of reciprocation, a seal portion sandwiching the diaphragm to seal the diaphragm in a position around an outer peripheral side of the recessed portion surface, a diaphragm receiving surface provided between the seal portion and the opening portion, and its contact area contacting the diaphragm decreases in response to an increase in the displacement of the reciprocating member to the recessed portion surface side and increases in response to an increase in the internal pressure of the pump chamber.

Abstract translation: 液体供给泵包括泵壳体，隔膜，与凹部表面一起形成泵室并将泵室与孔分隔开;往复运动件，其可往复运动地插入孔中并往复运动以推压膜片变形;驱动构件 在往复运动方向周期性地移动往复运动件，密封部分夹住隔膜以将隔膜密封在凹部表面的外周侧的位置，设置在密封部和开口部之间的隔膜接收面，以及 响应于往复运动构件向凹部表面侧的位移的增加而与隔膜接触的接触面积减小，并且响应于泵室的内部压力的增加而增加。