公开(公告)号：US20150333727A1

公开(公告)日：2015-11-19

申请号：US14653829

申请日：2012-12-21

Applicant: EPCOS AG

Inventor： Gilles Moulard ,  Paul Muralt ,  Ramin Matloub

IPC: H03H9/02 ,  H03H3/02 ,  H01L41/187 ,  H01L41/332 ,  H01L41/29 ,  H01L41/314

CPC classification number: H03H3/04 ,  H01L41/187 ,  H01L41/29 ,  H01L41/314 ,  H01L41/332 ,  H03H3/02 ,  H03H9/02015 ,  H03H9/589 ,  H03H2003/0435 ,  H03H2003/0471

Abstract: A MEMS component includes a lower electrode. The MEMS component also includes an upper electrode. The upper electrode overlies the lower electrode. The MEMS component also includes a first piezoelectric layer between the lower electrode and the upper electrode. The first piezoelectric layer has a first piezoelectric material comprising AlN and Sc.

Abstract translation: MEMS部件包括下电极。 MEMS组件还包括上电极。 上电极覆盖下电极。 MEMS部件还包括在下电极和上电极之间的第一压电层。 第一压电层具有包含AlN和Sc的第一压电材料。

公开(公告)号：US20150333249A1

公开(公告)日：2015-11-19

申请号：US14654480

申请日：2012-12-21

Applicant: EPCOS AG

Inventor： Gilles Moulard ,  Paul Muralt ,  Ramin Matloub ,  Thomas Metzger

IPC: H01L41/083 ,  H01L41/27 ,  H01L41/18

CPC classification number: H01L41/083 ,  H01L41/18 ,  H01L41/27 ,  H03H3/02 ,  H03H9/02015 ,  H03H9/0576 ,  H03H9/171 ,  Y10T29/43

Abstract: A BAW component is provided. A method for manufacturing a BAW component is also provided. The component includes a bottom electrode, a top electrode and a first piezoelectric material. The first piezoelectric material is between the bottom electrode and the top electrode. The first piezoelectric material has a higher piezoelectric coefficient than AlN.

Abstract translation: 提供BAW组件。 还提供了一种制造BAW部件的方法。 该部件包括底部电极，顶部电极和第一压电材料。 第一压电材料位于底部电极和顶部电极之间。 第一压电材料具有比AlN更高的压电系数。