公开(公告)号：US20180003178A1

公开(公告)日：2018-01-04

申请号：US15541085

申请日：2016-01-06

Applicant: Edwards Limited

Inventor： Nigel Paul Schofield ,  Andrew Seeley ,  Katsumi Nishimura ,  Katsunori Takahashi

IPC: F04C25/02 ,  F04C23/00 ,  C23C16/44 ,  H01L21/205

CPC classification number: F04C25/02 ,  C23C16/4405 ,  C23C16/4412 ,  F04C23/001 ,  F04C23/003 ,  F04C2220/30 ,  F16K15/00 ,  H01L21/205 ,  H01L21/67155

Abstract: A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.

公开(公告)号：US20200061535A1

公开(公告)日：2020-02-27

申请号：US16500665

申请日：2018-03-28

Applicant: Edwards Limited

Inventor： Andrew Seeley ,  Duncan Michael Price

IPC: B01D53/75 ,  F23G7/06

Abstract: A purge gas feeding means, an abatement system comprising such a means and a method of modifying an abatement system to include such a purge gas feeding means is disclosed. The purge gas feeding means comprises a plurality of paths running from an outer perimeter of the purge gas feeding means to an inner surface, the inner surface comprising a purge gas outlet for outputting the purge gas into the abatement system; wherein a cross sectional area of the plurality of paths increases from the outer perimeter to the inner surface such that a pressure of the purge gas falls flowing along the paths drops.

公开(公告)号：US10309401B2

公开(公告)日：2019-06-04

申请号：US15541085

申请日：2016-01-06

Applicant: Edwards Limited

Inventor： Nigel Paul Schofield ,  Andrew Seeley ,  Katsumi Nishimura ,  Katsunori Takahashi

IPC: C23C16/44 ,  F04C25/02 ,  H01L21/67 ,  F04C23/00 ,  H01L21/205 ,  F16K15/00

Abstract: A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.

公开(公告)号：US20230375174A1

公开(公告)日：2023-11-23

申请号：US18247197

申请日：2021-10-05

Applicant: Edwards Limited

Inventor： Andrew Seeley

IPC: F23D14/14

CPC classification number: F23D14/148 ,  F23D2203/1012 ,  F23D2203/103 ,  F23D2203/106

Abstract: The present invention provides a foraminous burner liner for a gas abatement system. The burner liner comprises a hollow body defined by a wall, the wall comprising a plurality of interconnected substantially concentric layers. Each layer of the wall comprises a substantially regular openwork mesh; wherein the substantially regular openwork mesh of each layer is configured such that it is out of phase with one or more adjacent layers, and wherein the wall comprises sufficient layers arranged such that the wall is optically opaque when viewed externally in any radially inward direction normal to the wall.

公开(公告)号：US10888817B2

公开(公告)日：2021-01-12

申请号：US16500665

申请日：2018-03-28

Applicant: Edwards Limited

Inventor： Andrew Seeley ,  Duncan Michael Price

IPC: B01D53/75 ,  F23G7/06

Abstract: A purge gas feeding means, an abatement system comprising such a means and a method of modifying an abatement system to include such a purge gas feeding means is disclosed. The purge gas feeding means comprises a plurality of paths running from an outer perimeter of the purge gas feeding means to an inner surface, the inner surface comprising a purge gas outlet for outputting the purge gas into the abatement system; wherein a cross sectional area of the plurality of paths increases from the outer perimeter to the inner surface such that a pressure of the purge gas falls flowing along the paths drops.

公开(公告)号：US20200030828A1

公开(公告)日：2020-01-30

申请号：US16498108

申请日：2018-03-21

Applicant: Edwards Limited

Inventor： Andrew Seeley ,  Duncan Michael Price

IPC: B05B1/34 ,  F23D14/12

Abstract: A nozzle for an abatement apparatus and a method are disclosed. The nozzle is for abatement apparatus operable to treat an effluent stream from a processing tool, the nozzle comprises: a nozzle body defining a nozzle inlet operable to receive the effluent stream, a nozzle outlet, and a conduit extending between the nozzle inlet and the nozzle outlet and operable to convey the effluent stream in a direction of flow from the nozzle inlet to the nozzle outlet; and an effluent stream rotator configured to impart a rotational component to the effluent stream to rotate the effluent stream around the direction of flow. In this way, the effluent stream is rotated as it passes through the nozzle body. The destruction rate efficiency achieved by an abatement apparatus when receiving such rotating effluent streams has been found to be significantly improved compared to non-rotating effluent streams.