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公开(公告)号：US12044404B2
公开(公告)日：2024-07-23
申请号：US17767678
申请日：2020-10-07
Applicant: Edwards Limited
Inventor： Gareth David Stanton
Abstract: A method of cleaning a gas inlet nozzle of an abatement burner combustion chamber. The abatement burner intermittently receives gas for combustion from a feed process. The nozzle comprises a cleaning mechanism including a movable cleaning member for physically removing unwanted deposits from the nozzle. The cleaning member is movable from a retracted first position wherein the cleaning member is outside a path of a flame associated with the nozzle, to a second cleaning position wherein the cleaning member is in a path of the flame associated with the nozzle. The method comprises the steps of:
a. identifying when the nozzle is out of use;
b. moving the cleaning member from the first position to the second position while the nozzle is out of use; and
c. returning the cleaning member to the first position before nozzle is in use.-
公开(公告)号：US20230158440A1
公开(公告)日：2023-05-25
申请号：US17907613
申请日：2021-03-24
Applicant: Edwards Limited
Inventor： Arani Elanganathan , Christopher Paul Williams , Anna Victoria Howbrook , Gareth David Stanton
CPC classification number: B01D49/00 , B01D53/346
Abstract: Apparatus and methods are disclosed. The apparatus comprises: an abatement chamber of an abatement apparatus which treats an effluent stream from a semiconductor processing tool to provide a combusted effluent stream having effluent particles; and a first atomiser located downstream of the abatement chamber, the first atomiser being configured to produce droplets having a droplet size based on a particle size of the effluent particles to be removed from the combusted effluent stream. In this way, the atomizer may produce droplets which combine with or adhere to the effluent particles which assists in the removal of the effluent particles from the combusted effluent stream.
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Patent Agency Ranking
公开(公告)号：US20240017206A1
公开(公告)日：2024-01-18
申请号：US18250878
申请日：2021-11-01
Applicant: Edwards Limited
Inventor： Anna Victoria Howbrook , Gareth David Stanton , Mark James Attwood
CPC classification number: B01D53/185 , B01D47/10 , B01D2252/103 , B01D2257/406
Abstract: The present invention provides a wet scrubber for gas abatement, comprising a scrubbing vessel defining a chamber, a gas inlet for supplying a gas to be scrubbed, and a gas outlet for allowing the egress of a scrubbed gas; the inlet and outlet being in fluid communication with one another; one or more scrubbing fluid supply ports; the wet scrubber comprising at least one distribution element connected to a scrubbing fluid supply port for distributing a scrubbing fluid inside the chamber; wherein at least one said distribution element is a distribution plate comprising a cavity and a plurality of apertures arranged to allow scrubbing fluid to flow from the cavity.
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公开(公告)号：US20240377062A1
公开(公告)日：2024-11-14
申请号：US18292162
申请日：2022-07-28
Applicant: Edwards Limited
Inventor： Gemma Haf Jones , Neil Andrew Maddock , Gareth David Stanton , Alageswaren Reddi Balsamy Radiar
Abstract: An inlet head assembly for an abatement apparatus is disclosed. The inlet head assembly is for an abatement apparatus for abating an effluent stream from a semiconductor processing tool, the inlet head assembly comprises: an inlet head; a pilot nozzle extending within the inlet head and configured to supply at least one pilot combustion reagent stream to a downstream abatement chamber of the abatement apparatus; and a plurality inlet nozzles, each extending within the inlet head and configured to supply an associated effluent stream for abatement within the abatement chamber, the plurality of inlet nozzles being positioned around the pilot nozzle. In this way, the effluent streams are packed closer together around the pilot nozzle which improves the heating of the effluent stream, improving the DRE and reducing heat loss, which enables a reduction in the combustion reagents needing to be supplied.
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5.发明公开公开(公告)号：US20230213186A1
公开(公告)日：2023-07-06
申请号：US18000598
申请日：2021-05-24
Applicant: Edwards Limited
Inventor： Gemma Haf Jones , Alageswaren Reddi Balsamy Radiar , Neil Andrew Maddock , Gareth David Stanton
CPC classification number: F23G7/065 , F23D14/02 , F23D14/62 , F23D2900/14701 , F23G2209/142
Abstract: An inlet assembly for an abatement apparatus includes: an effluent stream conduit configured to convey an effluent stream along a major direction of flow within the effluent stream conduit; an inlet nozzle fluidly coupled with the effluent stream conduit and configured to convey the effluent stream received from the effluent stream conduit to an abatement chamber of the abatement apparatus; and a baffle interposed between the effluent stream conduit and the inlet nozzle, the baffle being shaped and configured to redirect flow of the effluent stream from the effluent stream conduit into the inlet nozzle by inhibiting effluent stream flow along the major direction of flow into the inlet nozzle. A line-of-sight flow from the effluent stream conduit into the inlet nozzle is prevented by the baffle and the effluent stream instead follows a non-line-of-sight or diversionary path from the effluent stream conduit into the inlet nozzle, which improves DRE.
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公开(公告)号：US20220397268A1
公开(公告)日：2022-12-15
申请号：US17767678
申请日：2020-10-07
Applicant: Edwards Limited
Inventor： Gareth David Stanton
Abstract: A method of cleaning a gas inlet nozzle of an abatement burner combustion chamber. The abatement burner intermittently receives gas for combustion from a feed process. The nozzle comprises a cleaning mechanism including a movable cleaning member for physically removing unwanted deposits from the nozzle. The cleaning member is movable from a retracted first position wherein the cleaning member is outside a path of a flame associated with the nozzle, to a second cleaning position wherein the cleaning member is in a path of the flame associated with the nozzle. The method comprises the steps of: a. identifying when the nozzle is out of use; b. moving the cleaning member from the first position to the second position while the nozzle is out of use; and c. returning the cleaning member to the first position before nozzle is in use.
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公开(公告)号：US10030871B2
公开(公告)日：2018-07-24
申请号：US14891365
申请日：2014-04-16
Applicant: Edwards Limited
Inventor： Gareth David Stanton , Duncan Michael Price
Abstract: A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool and comprises: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; a combustion characteristic monitor operable to determine combustion performance of the radiant burner by monitoring infra-red radiation emitted from the combustion surface; and a radiant burner controller operable to control operation of the radiant burner in dependence upon combustion performance determined by the combustion characteristic monitor. Accordingly, aspects recognize that if a burner is suffering from an excessive flow of air the burner pad or combustion surface will typically cool, which results in an increase in unwanted emissions in the exhaust produced by a radiant burner. The cooling also results in a reduction in infrared radiation determined by the combustion surface. The hydrogen flame of the radiant burner and the hydrocarbon flame of the burner pilot typically do not emit infrared radiation and thus a change in infra-red an radiation, for example, intensity, quantity or frequency, emitted by the combustion surface of the radiant burner can be used to diagnose an “overflow” of cold gas, typically air, in the combustion mixture fed into the system, for example, the combustion chamber. Once diagnosed appropriate ameliorative steps may be taken and, for example, the burner control logic may be operable to compensate by reducing air flow into the burner.
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