Gas nozzle cleaning method and system

    公开(公告)号:US12044404B2

    公开(公告)日:2024-07-23

    申请号:US17767678

    申请日:2020-10-07

    申请人: Edwards Limited

    IPC分类号: F23D14/50 F23G7/06

    CPC分类号: F23D14/50 F23G7/06

    摘要: A method of cleaning a gas inlet nozzle of an abatement burner combustion chamber. The abatement burner intermittently receives gas for combustion from a feed process. The nozzle comprises a cleaning mechanism including a movable cleaning member for physically removing unwanted deposits from the nozzle. The cleaning member is movable from a retracted first position wherein the cleaning member is outside a path of a flame associated with the nozzle, to a second cleaning position wherein the cleaning member is in a path of the flame associated with the nozzle. The method comprises the steps of:



    a. identifying when the nozzle is out of use;
    b. moving the cleaning member from the first position to the second position while the nozzle is out of use; and
    c. returning the cleaning member to the first position before nozzle is in use.

    ABATEMENT APPARATUS
    2.
    发明公开
    ABATEMENT APPARATUS 审中-公开

    公开(公告)号:US20240159395A1

    公开(公告)日:2024-05-16

    申请号:US18549671

    申请日:2022-03-02

    申请人: Edwards Limited

    IPC分类号: F23J15/06 B01D47/06 F23G7/06

    CPC分类号: F23J15/06 B01D47/06 F23G7/06

    摘要: A method of cooling an abatement apparatus for abatement of an effluent stream from a semiconductor processing tool includes: providing at least one modular cooling assembly having a cooling capacity; determining a cooling requirement of an abatement apparatus; and incorporating into the abatement apparatus a number of the modular cooling assemblies whose cumulative cooling capacity at least matches the cooling requirement of the abatement apparatus. In this way, multiple modular cooling assemblies may be incorporated into the abatement apparatus, each of which provides cooling capacity. The number of modular cooling assemblies can be selected to suit the cooling requirement of the abatement apparatus.

    Heat storage type waste gas purification apparatus

    公开(公告)号:US09726373B2

    公开(公告)日:2017-08-08

    申请号:US14413970

    申请日:2013-12-26

    申请人: SINTOKOGIO, LTD.

    IPC分类号: F23G7/06 F23M20/00 F23M9/06

    摘要: Disclosed is a heat storage type waste gas purification apparatus which comprises: a combustion chamber configured to combust and decompose a component contained in waste gas; a plurality of heat storage chambers each having one end communicating with the combustion chamber and each comprising a heat storage body; a plurality of supply inlets each equipped with an on-off valve and each provided at the other end of a respective one of the heat storage chambers to selectively supply waste gas thereto; a plurality of discharge outlets each equipped with an on-off valve and each provided at the other end of a respective one of the heat storage chambers to selectively discharge treated waste gas therefrom; a discharge passage connected to the discharge outlets to discharge the treated waste gas to an outside of the apparatus therethrough; a plurality of bypass passages each connecting between the combustion chamber and the discharge passage, wherein each of the bypass passages is connected to the combustion chamber at a position directly above a respective one of the heat storage chambers, and equipped with an on-off valve; and a control section operable, when a temperature of one of the heat storage chambers becomes equal to or greater than a given value, to open one or more of the on-off valves of the bypass passages so as to discharge a part of waste gas in the combustion chamber via the opened one or more bypass passages.

    System and method for controlling a flow of vent gases to a natural gas engine
    10.
    发明授权
    System and method for controlling a flow of vent gases to a natural gas engine 有权
    用于控制排放气体流向天然气发动机的系统和方法

    公开(公告)号:US09534564B2

    公开(公告)日:2017-01-03

    申请号:US14340451

    申请日:2014-07-24

    发明人: Howard Malm

    摘要: A system and method controls a flow of vent gases to a combustion engine. The system includes an inlet for receiving the vent gases, a pressure relief device that enables the vent gases to escape to atmosphere when a pressure in the inlet exceeds a predetermined relief pressure, a flow-restricting orifice, and a back pressure regulator disposed downstream of the orifice. A shut-off valve disposed between the back pressure regulator and the air intake is set to only open when an intake pressure falls below a predetermined negative intake pressure.

    摘要翻译: 一种系统和方法控制排气到内燃机的流动。 该系统包括用于接收排放气体的入口,一个压力释放装置,其能够在入口中的压力超过预定的释放压力时使得排出气体逸出到大气中,限流孔和位于 孔口。 设置在背压调节器和进气口之间的截止阀被设定为仅在进气压力低于预定的进气压力时打开。