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    VIBRATION TYPE GYRO SENSOR
    1.
    发明申请
    VIBRATION TYPE GYRO SENSOR 审中-公开
    振动式陀螺传感器

    公开(公告)号：US20090320593A1

    公开(公告)日：2009-12-31

    申请号：US12306860

    申请日：2007-06-29

    申请人： Eiji Nakashio ,  Shigeto Watanabe ,  Shin Sasaki ,  Teruo Inaguma ,  Junichi Honda ,  Kazuo Kurihara ,  Yuji Shishido ,  Tomoyuki Takahashi

    发明人： Eiji Nakashio ,  Shigeto Watanabe ,  Shin Sasaki ,  Teruo Inaguma ,  Junichi Honda ,  Kazuo Kurihara ,  Yuji Shishido ,  Tomoyuki Takahashi

    IPC分类号： G01P9/04 ,  G01C19/56

    CPC分类号： G01C19/5663

    摘要： A vibration type gyro sensor according to the present invention includes vibrating elements 1X and 1Y which detect angular velocities, a support substrate 2 which is electrically connected to the vibrating elements 1X and 1Y and which supports the vibrating elements 1X and 1Y, a relay substrate 4 which is electrically connected to the support substrate 2 and which includes external connection terminals 3, and buffer members 5 which are disposed between the support substrate 2 and the relay substrate 4 and which suppress transmission of strain and vibration between the support substrate 2 and the relay substrate 4. The vibration type gyro sensor is capable of stabilizing vibration characteristics without being influenced by strain and vibration.

    摘要翻译： 根据本发明的振动型陀螺传感器包括检测角速度的振动元件1X和1Y，与振动元件1X和1Y电连接并支撑振动元件1X和1Y的支撑基板2，中继基板4 电连接到支撑基板2并且包括设置在支撑基板2和中继基板4之间的外部连接端子3和缓冲部件5，并且抑制支撑基板2和继电器之间的应变和振动的传播 振动型陀螺传感器能够在不受应变和振动影响的情况下稳定振动特性。

    VIBRATING GYROSENSOR
    2.
    发明申请
    VIBRATING GYROSENSOR 有权
    振动陀螺仪

    公开(公告)号：US20090174292A1

    公开(公告)日：2009-07-09

    申请号：US12116646

    申请日：2008-05-07

    申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

    发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

    IPC分类号： H01L41/04

    CPC分类号： G01C19/5663 ,  G01C19/5783

    摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.

    摘要翻译： 振动陀螺传感器包括支撑基板，其上形成有具有平台的布线图案。 振动元件安装在支撑基板的表面上。 振动元件包括具有安装表面的基座部分，其上形成有可连接到焊盘的多个端子。 振动器部分从基部的一侧整体地突出并且具有与基部的安装表面共面的面向对象的表面。 振动器部分具有层压在面向基板的表面上的第一电极层，压电层和第二电极层。 当在第一和第二电极层之间施加AC信号时，振动器部分振动。 AC信号的中心电场强度设定在从压电层的磁滞回线的中心向正方向移动的位置。

    Vibrating gyrosensor driven with offset potential
    3.
    发明授权
    Vibrating gyrosensor driven with offset potential 有权
    用偏移电位驱动的振动陀螺仪

    公开(公告)号：US07723905B2

    公开(公告)日：2010-05-25

    申请号：US12116646

    申请日：2008-05-07

    申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

    发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

    IPC分类号： H01L41/08

    CPC分类号： G01C19/5663 ,  G01C19/5783

    摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.

    摘要翻译： 振动陀螺传感器包括支撑基板，其上形成有具有平台的布线图案。 振动元件安装在支撑基板的表面上。 振动元件包括具有安装表面的基座部分，其上形成有可连接到焊盘的多个端子。 振动器部分从基部的一侧整体地突出并且具有与基部的安装表面共面的面向对象的表面。 振动器部分具有层压在面向基板的表面上的第一电极层，压电层和第二电极层。 当在第一和第二电极层之间施加AC信号时，振动器部分振动。 AC信号的中心电场强度设定在从压电层的磁滞回线的中心向正方向移动的位置。

    Vibratory Gyrosensor
    6.
    发明申请
    Vibratory Gyrosensor 有权
    振动陀螺仪

    公开(公告)号：US20080257044A1

    公开(公告)日：2008-10-23

    申请号：US10599833

    申请日：2006-02-23

    申请人： Shigeto Watanabe ,  Junichi Honda ,  Shin Sasaki ,  Kazuo Takahashi ,  Teruo Inaguma ,  Koji Suzuki ,  Manabu Aizawa

    发明人： Shigeto Watanabe ,  Junichi Honda ,  Shin Sasaki ,  Kazuo Takahashi ,  Teruo Inaguma ,  Koji Suzuki ,  Manabu Aizawa

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5663 ,  G01C19/5656

    摘要： To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.

    摘要翻译： 通过简单的结构实现尺寸缩小和高Q值提高特性。 根据本发明的振动陀螺传感器1包括其上安装有电路元件的支撑基板2和布置在其上的多个焊盘4的布线图案; 以及安装在支撑基板的表面2-1上的振动元件20。 振动元件20包括基部22，基部22具有安装表面22-2，该安装表面22-2设置有连接到焊盘的多个端子25; 以及从基部22的一侧以悬臂方式一体地延伸并具有与基部22的安装面齐平的面向基板的表面的振动部23，面向基板的表面设置有第一电极 堆叠在第一电极层上的压电层28和堆叠在压电层上的第二电极层29,30。 振动元件20通过将端子25与设置在它们之间的金属突起26接合到平台4而安装在支撑基板2上。

    Vibratory gyrosensor having a vibration element provided with terminals
    7.
    发明授权
    Vibratory gyrosensor having a vibration element provided with terminals 有权
    具有振动元件的振动陀螺仪具有端子

    公开(公告)号：US07654139B2

    公开(公告)日：2010-02-02

    申请号：US10599833

    申请日：2006-02-23

    申请人： Shigeto Watanabe ,  Junichi Honda ,  Shin Sasaki ,  Kazuo Takahashi ,  Teruo Inaguma ,  Koji Suzuki ,  Manabu Aizawa

    发明人： Shigeto Watanabe ,  Junichi Honda ,  Shin Sasaki ,  Kazuo Takahashi ,  Teruo Inaguma ,  Koji Suzuki ,  Manabu Aizawa

    IPC分类号： G01P9/04 ,  G01C19/56

    CPC分类号： G01C19/5663 ,  G01C19/5656

    摘要： To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.

    摘要翻译： 通过简单的结构实现尺寸缩小和高Q值提高特性。 根据本发明的振动陀螺传感器1包括其上安装有电路元件的支撑基板2和布置在其上的多个焊盘4的布线图案; 以及安装在支撑基板的表面2-1上的振动元件20。 振动元件20包括具有安装表面22-2的基部22，该安装表面22-2设置有连接到该焊盘的多个端子25; 以及从基部22的一侧以悬臂方式一体地延伸并具有与基部22的安装面齐平的面向基板的表面的振动部23，面向基板的表面设置有第一电极 堆叠在第一电极层上的压电层28和堆叠在压电层上的第二电极层29,30。 振动元件20通过将端子25与设置在它们之间的金属突起26接合到平台4而安装在支撑基板2上。

    VIBRATING GYROSCOPIC SENSOR AND METHOD OF ADJUSTING VIBRATING GYROSCOPIC SENSOR
    8.
    发明申请
    VIBRATING GYROSCOPIC SENSOR AND METHOD OF ADJUSTING VIBRATING GYROSCOPIC SENSOR 有权
    振动式陀螺仪传感器及调节振动式陀螺仪传感器的方法

    公开(公告)号：US20080083278A1

    公开(公告)日：2008-04-10

    申请号：US11950725

    申请日：2007-12-05

    申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

    发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

    IPC分类号： G01C19/04 ,  H01S4/00

    CPC分类号： G01C19/5663 ,  Y10T29/49002

    摘要： A vibrating gyroscopic sensor element including a cantilever vibrator, at least one first depression on the cantilever vibrator, a pair of detection electrodes provided on the cantilever vibrator and at least one second depression on the cantilever vibrator. The cantilever vibrator projects from a base area of the vibrating gyroscopic sensor element and the first depression is effective to adjust the frequency difference between a vertical resonance frequency and a horizontal resonance frequency of the vibrator. Further, the second depression is effective to adjust the difference of signals output from the detection electrodes.

    摘要翻译： 一种振动陀螺仪传感器元件，包括悬臂振动器，悬臂振子上的至少一个第一凹陷，设置在悬臂振动器上的一对检测电极和悬臂振子上的至少一个第二凹陷。 从振动陀螺仪传感器元件的基部突出的悬臂振子和第一凹陷有效地调节振动器的垂直共振频率和水平共振频率之间的频率差。 此外，第二凹陷有效地调节从检测电极输出的信号的差异。

    Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor
    9.
    发明授权
    Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor 有权
    振动陀螺传感器及调节振动陀螺传感器的方法

    公开(公告)号：US07578187B2

    公开(公告)日：2009-08-25

    申请号：US11950725

    申请日：2007-12-05

    申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

    发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

    IPC分类号： G01P3/00 ,  G01P9/00

    CPC分类号： G01C19/5663 ,  Y10T29/49002

    摘要： A vibrating gyroscopic sensor element including a cantilever vibrator, at least one first depression on the cantilever vibrator, a pair of detection electrodes provided on the cantilever vibrator and at least one second depression on the cantilever vibrator. The cantilever vibrator projects from a base area of the vibrating gyroscopic sensor element and the first depression is effective to adjust the frequency difference between a vertical resonance frequency and a horizontal resonance frequency of the vibrator. Further, the second depression is effective to adjust the difference of signals output from the detection electrodes.

    摘要翻译： 一种振动陀螺仪传感器元件，包括悬臂振动器，悬臂振子上的至少一个第一凹陷，设置在悬臂振动器上的一对检测电极和悬臂振子上的至少一个第二凹陷。 从振动陀螺仪传感器元件的基部突出的悬臂振子和第一凹陷有效地调节振动器的垂直共振频率和水平共振频率之间的频率差。 此外，第二凹陷有效地调节从检测电极输出的信号的差异。

    Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor
    10.
    发明授权
    Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor 有权
    振动陀螺传感器及调节振动陀螺传感器的方法

    公开(公告)号：US07325452B2

    公开(公告)日：2008-02-05

    申请号：US11368153

    申请日：2006-03-03

    申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

    发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

    IPC分类号： G01P3/00 ,  G01P9/00

    CPC分类号： G01C19/5663 ,  Y10T29/49002

    摘要： A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.

    摘要翻译： 一种振动陀螺仪传感器，包括振动陀螺传感器元件，所述振动陀螺传感器元件包括悬臂振子，所述振动器包括压电膜，驱动电极和在第一表面上的一对检测电极以及安装所述振动陀螺传感器元件的支撑基板。 振动陀螺传感器元件安装在支撑基板上，使得悬臂振动器的第一表面面向支撑基板。 将悬臂振子的第一面以外的区域定义为要设置用于调节悬臂振动器的振动特性的凹陷的激光加工区域。