公开(公告)号：US20170154754A1

公开(公告)日：2017-06-01

申请号：US15257667

申请日：2016-09-06

Applicant: FEI Company

Inventor： Tim Dahmen ,  Niels de Jonge

IPC: H01J37/22 ,  H01J37/10 ,  H01J37/28 ,  H01J37/20

CPC classification number: H01J37/222 ,  H01J37/10 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2611 ,  H01J2237/2802

Abstract: The disclosed subject matter relates to testing a sample by means of a particle beam microscope in which the sample is scanned in a point-wise manner by a focused beam of charged particles thereby generating imaging signals. The particle beam dose applied per scanning point is changed during scanning.