公开(公告)号：US20210373073A1

公开(公告)日：2021-12-02

申请号：US17313789

申请日：2021-05-06

Applicant: FormFactor, Inc.

Inventor： Anthony James Lord ,  Gavin Neil Fisher ,  David Randle Hess

IPC: G01R31/311 ,  G01R31/319

Abstract: Methods of producing augmented probe system images and associated probe systems. A method of producing an augmented probe system image includes recording a base probe system image, generating the augmented probe system image at least partially based on the base probe system image, and presenting the augmented probe system image. The augmented probe system image includes a representation of at least a portion of the probe system that is obscured in the base probe system image. In some examples, a probe system includes a chuck, a probe assembly, an imaging device, and a controller programmed to perform methods disclosed herein.

公开(公告)号：US11047879B2

公开(公告)日：2021-06-29

申请号：US16600142

申请日：2019-10-11

Applicant: FormFactor, Inc.

Inventor： Gavin Neil Fisher ,  Thomas Reiner Thaerigen ,  Peter McCann ,  Rodney Jones ,  Koby L. Duckworth

IPC: G01R31/01 ,  G01R1/067 ,  G01R35/00 ,  G01R31/28 ,  G01R1/073

Abstract: Probe systems and methods are disclosed herein. The methods include directly measuring a distance between a first manipulated assembly and a second manipulated assembly, contacting first and second probes with first and second contact locations, providing a test signal to an electrical structure, and receiving a resultant signal from the electrical structure. The methods further include characterizing at least one of a probe system and the electrical structure based upon the distance. In one embodiment, the probe systems include a measurement device configured to directly measure a distance between a first manipulated assembly and a second manipulated assembly. In another embodiment, the probe systems include a probe head assembly including a platen, a manipulator operatively attached to the platen, a vector network analyzer (VNA) extender operatively attached to the manipulator, and a probe operatively attached to the VNA extender.

公开(公告)号：US11821912B2

公开(公告)日：2023-11-21

申请号：US17313789

申请日：2021-05-06

Applicant: FormFactor, Inc.

Inventor： Anthony James Lord ,  Gavin Neil Fisher ,  David Randle Hess

IPC: G01R31/311 ,  G01R31/319

CPC classification number: G01R31/311 ,  G01R31/31917

Abstract: Methods of producing augmented probe system images and associated probe systems. A method of producing an augmented probe system image includes recording a base probe system image, generating the augmented probe system image at least partially based on the base probe system image, and presenting the augmented probe system image. The augmented probe system image includes a representation of at least a portion of the probe system that is obscured in the base probe system image. In some examples, a probe system includes a chuck, a probe assembly, an imaging device, and a controller programmed to perform methods disclosed herein.

公开(公告)号：US11454799B2

公开(公告)日：2022-09-27

申请号：US16752324

申请日：2020-01-24

Applicant: FormFactor, Inc.

Inventor： Gerald Lee Gisler ,  Sia Choon Beng ,  Anthony James Lord ,  Gavin Neil Fisher

IPC: G02B21/36 ,  G02B21/02 ,  G02B21/26

Abstract: Microscopes with objective assembly crash detection and methods of utilizing the same are disclosed herein. For example, a microscope comprises a microscope body, an objective assembly comprising an objective lens, an objective assembly mount configured to separably attach the objective assembly to the microscope body, and an orientation detection circuit configured to indicate when a relative orientation between the microscope body and the objective assembly differs from a predetermined relative orientation.