公开(公告)号：US09377543B2

公开(公告)日：2016-06-28

申请号：US14687489

申请日：2015-04-15

Applicant: GLOBALFOUNDRIES INC.

Inventor： Jin Cai ,  Tak H. Ning ,  Jeng-Bang Yau ,  Sufi Zafar

IPC: G01T1/20 ,  G01T1/24 ,  H01L31/115 ,  H01L27/14 ,  H01L31/11 ,  G01T3/08 ,  G01N27/403 ,  H01L31/0224 ,  H01L31/0352 ,  H01L31/118 ,  H01L27/146

CPC classification number: G01T1/247 ,  G01N27/403 ,  G01T3/08 ,  H01L27/14 ,  H01L27/14681 ,  H01L31/022408 ,  H01L31/035272 ,  H01L31/1105 ,  H01L31/115 ,  H01L31/118

Abstract: A sensor includes a collector, an emitter and a base-region barrier formed as an inverted bipolar junction transistor having a base substrate forming a base electrode to activate the inverted bipolar junction transistor. A level surface is formed by the collector, the emitter and the base-region barrier opposite the base substrate such that when the level surface is exposed to charge, the charge is measured during operation of the bipolar junction transistor.