公开(公告)号：US10971625B2

公开(公告)日：2021-04-06

申请号：US16458178

申请日：2019-06-30

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Michael V Aquilino ,  Daniel Jaeger ,  Man Gu ,  Bradley Morgenfeld ,  Haiting Wang ,  Kavya Sree Duggimpudi ,  Wang Zheng

IPC: H01L29/08 ,  H01L27/112 ,  H01L29/78 ,  H01L21/822 ,  H01L29/66

Abstract: A semiconductor device is provided, which includes an array of active regions, gate stacks and substantially uniform epitaxial structures. The gate stacks of the array include a first gate stack and a second gate stack over an active region. An active pillar between the first gate stack and the second gate stack, and the active pillar separating two substantially uniform epitaxial structures. A contact structure over the active pillar, positioned equidistant from the first gate stack and the second gate stack.