公开(公告)号：US11002763B2

公开(公告)日：2021-05-11

申请号：US16100297

申请日：2018-08-10

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Ye Wang ,  Hanyi Ding ,  Timothy M. Platt

IPC: G01R1/073 ,  G01R1/067

Abstract: Embodiments of the disclosure provide a probe structured for electrical and photonics testing of a photonic integrated circuit (PIC) die, the probe including: a membrane having a first surface and an opposing second surface and including conductive traces, the membrane being configured for electrical coupling to a probe interface board (PIB); a set of probe tips positioned on the membrane, the set of probe tips being configured to send electrical test signals to the PIC die or receive electrical test signals from the PIC die; and a photonic test assembly disposed on the membrane and electrically coupled to the conductive traces of the membrane, the photonic test assembly positioned for substantial alignment with a photonic I/O element of the PIC die, wherein the photonic test assembly is configured to transmit a photonic input signal to the photonic I/O element or detect a photonic output signal from the photonic I/O element.

公开(公告)号：US10949005B2

公开(公告)日：2021-03-16

申请号：US16429702

申请日：2019-06-03

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Mustapha Slamani ,  Kaushal Kannan ,  Ritin Nambiar ,  Timothy M. Platt

IPC: H04B3/46 ,  G06F3/041 ,  H04L7/02 ,  G06F3/0484

Abstract: The present disclosure relates to a testing device and techniques of testing semiconductor structures and, more particularly, to an absolute phase measurement testing device and technique of testing semiconductor structures. The structure includes: a first frequency input source which provides a first signal to an up-converter at an input side of a test fixture; a down-converter on an output side of the test fixture; a second frequency signal source which provides a second signal at a higher frequency than the first signal to the up-converter and the down-converter on the output side of the test fixture; a bypass path which bypasses the test fixture and provides connection between the up-converter and the down-converter; and a digitizer that is connected to an output side of the down-converter.