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公开(公告)号：US4737660A
公开(公告)日：1988-04-12
申请号：US930703
申请日：1986-11-13
申请人： Henry V. Allen , John H. Jerman , Stephen C. Terry
发明人： Henry V. Allen , John H. Jerman , Stephen C. Terry
CPC分类号： H01H1/0036 , H01H2037/008 , H01H2085/466 , H01H35/14 , H01H37/52 , Y10T307/74 , Y10T307/773 , Y10T307/779
摘要： A trimmable microminiature force-sensitive switching device for detecting the state of external conditions, such as pressure, acceleration and temperature, is disclosed. The device includes a silicon substrate having a reduced-thickness, deflectable member adapted to change its deflection in response to changes in the external condition to be detected. Increasing deflection of the member establishes electrical contact between a common contact and first one, then progressively more, spaced electrical contacts of a plurality of switches. Each of the spaced electrical contacts is connected to a common terminal. Trimming of the switching device is accomplished by application of a preselected external force, such as pressure, that causes the deflection of the deflectable member and the closing of one or more of the switches. Electrical energy is then applied to the external terminal of the common contact and the external terminal of the common terminal of the fusible links, such that current flows through the switches that have closed and through their associated fusible links, causing those fusible links to open circuit, thereby precluding the subsequent detection of external conditions whose level is at or below the preselected level applied during trimming of the device.
摘要翻译： 公开了一种用于检测诸如压力，加速度和温度之类的外部状态的可调整的微型力敏感开关装置。 该装置包括具有减小厚度的可偏转构件的硅衬底，其适于响应于待检测的外部状况的变化而改变其偏转。 构件的增加的偏转建立了公共接触件与第一接头之间的电接触，然后在多个开关中逐渐增加间隔开的电触点。 每个间隔开的电触头连接到公共端子。 通过施加诸如压力的预选的外力来实现切换装置的修整，其导致可偏转构件的偏转和关闭一个或多个开关。 然后将电能施加到公共接点的外部端子和可熔链路的公共端子的外部端子，使得电流流过已经关闭的开关并通过其相关联的可熔链路，使得可熔链路断开 从而防止随后检测其水平处于或低于在修整设备期间施加的预选级别的外部条件。
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公开(公告)号：US5103667A
公开(公告)日：1992-04-14
申请号：US370364
申请日：1989-06-22
CPC分类号： G01P15/123 , G01P21/00 , G01P2015/0828
摘要： An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capacitive plate and the mass causes a movement of the mass, electrodes for applying a potential difference between the mass and the capacitive plate, and at least one piezoresistive element attached to the housing and the diaphragm for sensing movement of the mass. The accelerometer's housing comprises a frame, a base and a cap with air gaps providing squeeze film damping and mechanical stops for inhibiting movements of the mass. The combination of the capability to electrostatically produce a movement of the mass and the piezoresistive sensing of that movement allows testing and calibration of the accelerometer at any stage in its manufacture or deployment without the need for external equipment such as shakers.
摘要翻译： 一种用于具有壳体的自检加速度计的装置和操作方法，用于响应于施加的力检测运动的隔膜，隔膜上的质量，附接到壳体的至少一个电容板，并且布置成使得电位差 在电容板和质量之间导致质量块的移动，用于在质量块和电容板之间施加电位差的电极以及附着到壳体和隔膜的至少一个压阻元件，用于感测质量块的移动。 加速度计的外壳包括一个框架，一个基座和一个具有气隙的盖子，提供挤压膜阻尼和机械止动件，用于抑制质量的运动。 静电产生质量运动的能力和对该运动的压阻感测的能力的组合允许在其制造或部署的任何阶段测试和校准加速度计，而不需要诸如振动器之类的外部设备。
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公开(公告)号：US5445006A
公开(公告)日：1995-08-29
申请号：US138349
申请日：1993-10-18
CPC分类号： G01P15/123 , G01P21/00
摘要： An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capacitive plate and the mass causes a movement of the mass, means for producing a potential difference between the mass and the capacitive plate, and at least one piezoresistive element attached to the housing and the diaphragm for sensing movement of the mass. The accelerometer's housing comprises a frame, a base and a cap with air gaps providing squeeze film damping and mechanical stops for inhibiting movements of the mass. The combination of the capability to electrostatically produce a movement of the mass and the piezoresistive sensing of that movement allows testing and calibration of the accelerometer at any stage in its manufacture or deployment without the need for external equipment such as shakers.
摘要翻译： 一种用于具有壳体的自检加速度计的装置和操作方法，用于响应于施加的力检测运动的隔膜，隔膜上的质量，附接到壳体的至少一个电容板，并且布置成使得电位差 在电容板和质量之间引起质量的移动，用于产生质量块和电容板之间的电位差的装置，以及附着到壳体和隔膜上的至少一个压阻元件，用于感测物体的移动。 加速度计的外壳包括一个框架，一个基座和一个具有气隙的盖子，提供挤压膜阻尼和机械止动件，用于抑制质量的运动。 静电产生质量运动的能力和对该运动的压阻感测的能力的组合允许在其制造或部署的任何阶段测试和校准加速度计，而不需要诸如振动器之类的外部设备。
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公开(公告)号：US5253510A
公开(公告)日：1993-10-19
申请号：US915792
申请日：1992-07-17
CPC分类号： G01P15/123 , G01P21/00
摘要： An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capacitive plate and the mass causes a movement of the mass, electrodes for applying a potential difference between the mass and the capacitive plate, and at least one piezoresistive element attached to the housing and the diaphragm for sensing movement of the mass. The accelerometer's housing comprises a frame, a base and a cap with air gaps providing squeeze film damping and mechanical stops for inhibiting movements of the mass. The combination of the capability to electrostatically produce a movement of the mass and the piezoresistive sensing of that movement allows testing and calibration of the accelerometer at any stage in its manufacture or deployment without the need for external equipment such as shakers.
摘要翻译： 一种用于具有壳体的自检加速度计的装置和操作方法，用于响应于施加的力检测运动的隔膜，隔膜上的质量，附接到壳体的至少一个电容板，并且布置成使得电位差 在电容板和质量之间导致质量块的移动，用于在质量块和电容板之间施加电位差的电极以及附着到壳体和隔膜的至少一个压阻元件，用于感测质量块的移动。 加速度计的外壳包括一个框架，一个基座和一个具有气隙的盖子，提供挤压膜阻尼和机械止动件，用于抑制质量的运动。 静电产生质量运动的能力和对该运动的压阻感测的能力的组合允许在其制造或部署的任何阶段测试和校准加速度计，而不需要诸如振动器之类的外部设备。
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5.发明授权Extremely low cost pressure sensor realized using deep reactive ion etching 有权使用深反应离子蚀刻实现极低成本的压力传感器公开(公告)号：US07111518B1
公开(公告)日：2006-09-26
申请号：US10665991
申请日：2003-09-19
CPC分类号： G01L9/0042
摘要： Methods and apparatus for an absolute or gauge pressure sensor having a backside cavity with a substantially vertical interior sidewall. The backside cavity is formed using a DRIE etch or other MEMS micro-machining technique. One embodiment provides for a diaphragm having a boss manufactured using a two step process that results in a boss thickness that is independent of the thickness of the starting material. Another provides for various shapes to the backside cavity that reduces the likelihood of crystalline fractures while focusing stress on piezoresistive sensing elements. Another provides for a sensitivity adjustment by thinning the insulating and silicon layers that form the sensor diaphragm. A pressure sensor according to the present invention may incorporate one or more of these, or may incorporate other elements discussed herein.
摘要翻译： 用于具有具有基本上垂直的内侧壁的背侧空腔的绝对或表压式压力传感器的方法和装置。 使用DRIE蚀刻或其他MEMS微加工技术形成背面腔。 一个实施例提供了一种隔板，其具有使用两步工艺制造的凸台，其导致凸起厚度与初始材料的厚度无关。 另一种为背面腔提供各种形状，其降低了结晶断裂的可能性，同时将压力聚焦在压阻感测元件上。 另一种通过使形成传感器隔膜的绝缘层和硅层变薄来提供灵敏度调节。 根据本发明的压力传感器可以并入这些中的一个或多个，或者可以包含本文所讨论的其它元件。
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公开(公告)号：US4884223A
公开(公告)日：1989-11-28
申请号：US170036
申请日：1988-03-22
申请人： Lloyd D. Ingle , Henry V. Allen , James W. Knutti
发明人： Lloyd D. Ingle , Henry V. Allen , James W. Knutti
CPC分类号： G01L5/0038 , G01L1/22 , G01L5/0076
摘要： A dynamic force measurement system for taking a series of force measurements of a force applied against a sensor device whereby to determine, record, display and store the sequence of force measurements. The sensor device is adapted to respond to said force and provide an electronic force signal which is representative thereof. The dynamic force measurement system includes a central processing unit for operating a computer program, having data and program instruction storage means, graphic display and user interface means. A sensor interface device provides for the connecting of the sensor device to the central processing unit. The sensor interface device includes means for monitoring the force signal generated by the sensor device, converting the signal to a numerical binary format for recording in intermediate storage means within the sensor interface device for ultimate transfer to the central processing unit for display, statistical analysis and storage.
摘要翻译： 一种动态力测量系统，用于对施加在传感器装置上的力进行一系列力测量，从而确定，记录，显示和存储力测量序列。 传感器装置适于响应所述力并提供代表其的电子力信号。 动力测量系统包括用于操作计算机程序的中央处理单元，具有数据和程序指令存储装置，图形显示和用户界面装置。 传感器接口装置提供传感器装置与中央处理单元的连接。 传感器接口装置包括用于监测由传感器装置产生的力信号的装置，将该信号转换成数字二进制格式，以在传感器接口装置内的中间存储装置中记录，以最终传送到中央处理单元进行显示，统计分析和 存储。
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公开(公告)号：US4861420A
公开(公告)日：1989-08-29
申请号：US73675
申请日：1987-07-14
IPC分类号： G01L1/18
CPC分类号： G01L1/18 , Y10S438/977
摘要： A semiconductor transducer (10) including a substrate having a well (18) formed in one surface thereof and a semiconductor layer (14) having a first surface (26) bonded to the substrate about the periphery of the well to form a diaphragm (30) and a second surface (28) which is substantially parallel to the first surface and has a pedestal (16) projecting therefrom which is disposed above the well. The side walls (32) of the pedestal are substantially orthogonal to the second surface of the semiconductor layer and are formed by sawing edge portions of said semiconductor layer. The substrate includes structures (38) which extend upward from the bottom of the well to limit the deflection of the diaphragm.
摘要翻译： 一种半导体传感器（10），包括在其一个表面中形成有阱（18）的基板和具有围绕所述阱的周边结合到所述基板的第一表面（26）的半导体层（14），以形成隔膜（30） ）和基本上平行于第一表面的第二表面（28），并且具有设置在井上方的从其突出的基座（16）。 基座的侧壁（32）基本上与半导体层的第二表面正交，并且通过锯切所述半导体层的边缘部分而形成。 衬底包括从井的底部向上延伸以限制隔膜的偏转的结构（38）。
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公开(公告)号：US07487681B1
公开(公告)日：2009-02-10
申请号：US11834013
申请日：2007-08-06
申请人： Henry V. Allen
发明人： Henry V. Allen
CPC分类号： G01L9/0042 , G01L9/0073
摘要： Methods and apparatus for an absolute or gauge pressure sensor having a backside cavity with a substantially vertical interior sidewall. The backside cavity is formed using a DRIE etch or other MEMS micro-machining technique. The backside cavity has an opening that is cross shaped, where the dimensions of the cross may be varied to adjust pressure sensor sensitivity. The cross may have one or more rounded corners to reduce peak stress, for example, the interior corners may be rounded. A sensing conductor may be routed over one or more corners including the interior corners to detect breakage.
摘要翻译： 用于具有具有基本上垂直的内侧壁的背侧空腔的绝对或表压式压力传感器的方法和装置。 使用DRIE蚀刻或其他MEMS微加工技术形成背面腔。 背侧腔具有十字形的开口，其中十字形的尺寸可以改变以调节压力传感器的灵敏度。 十字架可以具有一个或多个圆角以减小峰值应力，例如，内角可以是圆形的。 感测导体可以在包括内角的一个或多个角上布线以检测断裂。
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9.发明授权
公开(公告)号：US6107170A
公开(公告)日：2000-08-22
申请号：US129195
申请日：1998-07-24
申请人： Abhijeet Sathe , Henry V. Allen
发明人： Abhijeet Sathe , Henry V. Allen
IPC分类号： H01L23/485 , H01L21/44
CPC分类号： H01L23/485 , H01L2924/0002
摘要： An improved method for forming a metal contact for a silicon sensor. First, platinum is deposited over a contact area. Then the platinum is sintered to form platinum silicide. Subsequently, titanium/tungsten (TiW) is deposited over the platinum silicide. Finally, gold is deposited over the TiW.
摘要翻译： 一种用于形成用于硅传感器的金属接触件的改进方法。 首先，将铂沉积在接触区域上。 然后将铂烧结以形成铂硅化物。 随后，钛/钨（TiW）沉积在铂硅化物上。 最后，金子沉积在TiW上。
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公开(公告)号：US4543457A
公开(公告)日：1985-09-24
申请号：US573509
申请日：1984-01-25
CPC分类号： H01H1/0036 , G01P2015/0828 , H01H2001/0005 , H01H2037/008 , H01H35/14 , H01H35/2657 , H01H35/346 , H01H37/46 , Y10T307/773
摘要： A microminiature switch for digitizing different-valued external conditions, such as pressure, temperature of acceleration, is disclosed. The switch includes a silicon wafer having a deflectable, reduced-thickness membrane adapted to move from a relaxed position toward increasingly flexed or bulged positions in response to greater-value changes in such external condition. Movement of the membrane from its relaxed position to more strained positions establishes electrical contact between a common terminal and first one and then progressively more switch-state terminals in the switch, wherein the number of switch states which are closed corresponds to the external condition acting on the switch.
摘要翻译： 公开了一种用于数字化不同值的外部条件（例如压力，加速温度）的微型开关。 该开关包括具有可偏转的减薄膜的硅晶片，其适于从这种外部状态的更大值的变化而从松弛位置向越来越弯曲或凸出的位置移动。 膜从其松弛位置移动到更紧张的位置，建立了公共端和第一个之间的电接触，然后在开关中逐渐增加开关状态端子，其中闭合的开关状态的数量对应于作用于 开关。
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