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公开(公告)号：US4884223A
公开(公告)日：1989-11-28
申请号：US170036
申请日：1988-03-22
申请人： Lloyd D. Ingle , Henry V. Allen , James W. Knutti
发明人： Lloyd D. Ingle , Henry V. Allen , James W. Knutti
CPC分类号： G01L5/0038 , G01L1/22 , G01L5/0076
摘要： A dynamic force measurement system for taking a series of force measurements of a force applied against a sensor device whereby to determine, record, display and store the sequence of force measurements. The sensor device is adapted to respond to said force and provide an electronic force signal which is representative thereof. The dynamic force measurement system includes a central processing unit for operating a computer program, having data and program instruction storage means, graphic display and user interface means. A sensor interface device provides for the connecting of the sensor device to the central processing unit. The sensor interface device includes means for monitoring the force signal generated by the sensor device, converting the signal to a numerical binary format for recording in intermediate storage means within the sensor interface device for ultimate transfer to the central processing unit for display, statistical analysis and storage.
摘要翻译： 一种动态力测量系统，用于对施加在传感器装置上的力进行一系列力测量，从而确定，记录，显示和存储力测量序列。 传感器装置适于响应所述力并提供代表其的电子力信号。 动力测量系统包括用于操作计算机程序的中央处理单元，具有数据和程序指令存储装置，图形显示和用户界面装置。 传感器接口装置提供传感器装置与中央处理单元的连接。 传感器接口装置包括用于监测由传感器装置产生的力信号的装置，将该信号转换成数字二进制格式，以在传感器接口装置内的中间存储装置中记录，以最终传送到中央处理单元进行显示，统计分析和 存储。
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公开(公告)号：US4861420A
公开(公告)日：1989-08-29
申请号：US73675
申请日：1987-07-14
IPC分类号： G01L1/18
CPC分类号： G01L1/18 , Y10S438/977
摘要： A semiconductor transducer (10) including a substrate having a well (18) formed in one surface thereof and a semiconductor layer (14) having a first surface (26) bonded to the substrate about the periphery of the well to form a diaphragm (30) and a second surface (28) which is substantially parallel to the first surface and has a pedestal (16) projecting therefrom which is disposed above the well. The side walls (32) of the pedestal are substantially orthogonal to the second surface of the semiconductor layer and are formed by sawing edge portions of said semiconductor layer. The substrate includes structures (38) which extend upward from the bottom of the well to limit the deflection of the diaphragm.
摘要翻译： 一种半导体传感器（10），包括在其一个表面中形成有阱（18）的基板和具有围绕所述阱的周边结合到所述基板的第一表面（26）的半导体层（14），以形成隔膜（30） ）和基本上平行于第一表面的第二表面（28），并且具有设置在井上方的从其突出的基座（16）。 基座的侧壁（32）基本上与半导体层的第二表面正交，并且通过锯切所述半导体层的边缘部分而形成。 衬底包括从井的底部向上延伸以限制隔膜的偏转的结构（38）。
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公开(公告)号：US07487681B1
公开(公告)日：2009-02-10
申请号：US11834013
申请日：2007-08-06
申请人： Henry V. Allen
发明人： Henry V. Allen
CPC分类号： G01L9/0042 , G01L9/0073
摘要： Methods and apparatus for an absolute or gauge pressure sensor having a backside cavity with a substantially vertical interior sidewall. The backside cavity is formed using a DRIE etch or other MEMS micro-machining technique. The backside cavity has an opening that is cross shaped, where the dimensions of the cross may be varied to adjust pressure sensor sensitivity. The cross may have one or more rounded corners to reduce peak stress, for example, the interior corners may be rounded. A sensing conductor may be routed over one or more corners including the interior corners to detect breakage.
摘要翻译： 用于具有具有基本上垂直的内侧壁的背侧空腔的绝对或表压式压力传感器的方法和装置。 使用DRIE蚀刻或其他MEMS微加工技术形成背面腔。 背侧腔具有十字形的开口，其中十字形的尺寸可以改变以调节压力传感器的灵敏度。 十字架可以具有一个或多个圆角以减小峰值应力，例如，内角可以是圆形的。 感测导体可以在包括内角的一个或多个角上布线以检测断裂。
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公开(公告)号：US5445006A
公开(公告)日：1995-08-29
申请号：US138349
申请日：1993-10-18
CPC分类号： G01P15/123 , G01P21/00
摘要： An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capacitive plate and the mass causes a movement of the mass, means for producing a potential difference between the mass and the capacitive plate, and at least one piezoresistive element attached to the housing and the diaphragm for sensing movement of the mass. The accelerometer's housing comprises a frame, a base and a cap with air gaps providing squeeze film damping and mechanical stops for inhibiting movements of the mass. The combination of the capability to electrostatically produce a movement of the mass and the piezoresistive sensing of that movement allows testing and calibration of the accelerometer at any stage in its manufacture or deployment without the need for external equipment such as shakers.
摘要翻译： 一种用于具有壳体的自检加速度计的装置和操作方法，用于响应于施加的力检测运动的隔膜，隔膜上的质量，附接到壳体的至少一个电容板，并且布置成使得电位差 在电容板和质量之间引起质量的移动，用于产生质量块和电容板之间的电位差的装置，以及附着到壳体和隔膜上的至少一个压阻元件，用于感测物体的移动。 加速度计的外壳包括一个框架，一个基座和一个具有气隙的盖子，提供挤压膜阻尼和机械止动件，用于抑制质量的运动。 静电产生质量运动的能力和对该运动的压阻感测的能力的组合允许在其制造或部署的任何阶段测试和校准加速度计，而不需要诸如振动器之类的外部设备。
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公开(公告)号：US5253510A
公开(公告)日：1993-10-19
申请号：US915792
申请日：1992-07-17
CPC分类号： G01P15/123 , G01P21/00
摘要： An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capacitive plate and the mass causes a movement of the mass, electrodes for applying a potential difference between the mass and the capacitive plate, and at least one piezoresistive element attached to the housing and the diaphragm for sensing movement of the mass. The accelerometer's housing comprises a frame, a base and a cap with air gaps providing squeeze film damping and mechanical stops for inhibiting movements of the mass. The combination of the capability to electrostatically produce a movement of the mass and the piezoresistive sensing of that movement allows testing and calibration of the accelerometer at any stage in its manufacture or deployment without the need for external equipment such as shakers.
摘要翻译： 一种用于具有壳体的自检加速度计的装置和操作方法，用于响应于施加的力检测运动的隔膜，隔膜上的质量，附接到壳体的至少一个电容板，并且布置成使得电位差 在电容板和质量之间导致质量块的移动，用于在质量块和电容板之间施加电位差的电极以及附着到壳体和隔膜的至少一个压阻元件，用于感测质量块的移动。 加速度计的外壳包括一个框架，一个基座和一个具有气隙的盖子，提供挤压膜阻尼和机械止动件，用于抑制质量的运动。 静电产生质量运动的能力和对该运动的压阻感测的能力的组合允许在其制造或部署的任何阶段测试和校准加速度计，而不需要诸如振动器之类的外部设备。
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6.发明授权
公开(公告)号：US6107170A
公开(公告)日：2000-08-22
申请号：US129195
申请日：1998-07-24
申请人： Abhijeet Sathe , Henry V. Allen
发明人： Abhijeet Sathe , Henry V. Allen
IPC分类号： H01L23/485 , H01L21/44
CPC分类号： H01L23/485 , H01L2924/0002
摘要： An improved method for forming a metal contact for a silicon sensor. First, platinum is deposited over a contact area. Then the platinum is sintered to form platinum silicide. Subsequently, titanium/tungsten (TiW) is deposited over the platinum silicide. Finally, gold is deposited over the TiW.
摘要翻译： 一种用于形成用于硅传感器的金属接触件的改进方法。 首先，将铂沉积在接触区域上。 然后将铂烧结以形成铂硅化物。 随后，钛/钨（TiW）沉积在铂硅化物上。 最后，金子沉积在TiW上。
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公开(公告)号：US5103667A
公开(公告)日：1992-04-14
申请号：US370364
申请日：1989-06-22
CPC分类号： G01P15/123 , G01P21/00 , G01P2015/0828
摘要： An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capacitive plate and the mass causes a movement of the mass, electrodes for applying a potential difference between the mass and the capacitive plate, and at least one piezoresistive element attached to the housing and the diaphragm for sensing movement of the mass. The accelerometer's housing comprises a frame, a base and a cap with air gaps providing squeeze film damping and mechanical stops for inhibiting movements of the mass. The combination of the capability to electrostatically produce a movement of the mass and the piezoresistive sensing of that movement allows testing and calibration of the accelerometer at any stage in its manufacture or deployment without the need for external equipment such as shakers.
摘要翻译： 一种用于具有壳体的自检加速度计的装置和操作方法，用于响应于施加的力检测运动的隔膜，隔膜上的质量，附接到壳体的至少一个电容板，并且布置成使得电位差 在电容板和质量之间导致质量块的移动，用于在质量块和电容板之间施加电位差的电极以及附着到壳体和隔膜的至少一个压阻元件，用于感测质量块的移动。 加速度计的外壳包括一个框架，一个基座和一个具有气隙的盖子，提供挤压膜阻尼和机械止动件，用于抑制质量的运动。 静电产生质量运动的能力和对该运动的压阻感测的能力的组合允许在其制造或部署的任何阶段测试和校准加速度计，而不需要诸如振动器之类的外部设备。
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公开(公告)号：US4543457A
公开(公告)日：1985-09-24
申请号：US573509
申请日：1984-01-25
CPC分类号： H01H1/0036 , G01P2015/0828 , H01H2001/0005 , H01H2037/008 , H01H35/14 , H01H35/2657 , H01H35/346 , H01H37/46 , Y10T307/773
摘要： A microminiature switch for digitizing different-valued external conditions, such as pressure, temperature of acceleration, is disclosed. The switch includes a silicon wafer having a deflectable, reduced-thickness membrane adapted to move from a relaxed position toward increasingly flexed or bulged positions in response to greater-value changes in such external condition. Movement of the membrane from its relaxed position to more strained positions establishes electrical contact between a common terminal and first one and then progressively more switch-state terminals in the switch, wherein the number of switch states which are closed corresponds to the external condition acting on the switch.
摘要翻译： 公开了一种用于数字化不同值的外部条件（例如压力，加速温度）的微型开关。 该开关包括具有可偏转的减薄膜的硅晶片，其适于从这种外部状态的更大值的变化而从松弛位置向越来越弯曲或凸出的位置移动。 膜从其松弛位置移动到更紧张的位置，建立了公共端和第一个之间的电接触，然后在开关中逐渐增加开关状态端子，其中闭合的开关状态的数量对应于作用于 开关。
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公开(公告)号：US6150681A
公开(公告)日：2000-11-21
申请号：US129198
申请日：1998-07-24
申请人： Henry V. Allen
发明人： Henry V. Allen
CPC分类号： G01L19/148 , G01F1/28 , G01F1/383 , G01L19/0038 , G01L19/0092 , G01L9/0055 , G01L9/065
摘要： A monolithic, integrated circuit sensor combining both a differential pressure sensor and a flow sensor on the same silicon chip. The integrated circuit has a diaphragm with a number of piezo-resistive elements placed on it in the normal manner for a pressure sensor. In addition, a channel is provided between the spaces on the two sides of the diaphragm. The channel has a cross-section which is a fraction of the size of the diaphragm. In one embodiment, the channel is a hole in the diaphragm. In another embodiment, the channel is an etched groove in the frame supporting the diaphragm.
摘要翻译： 一个单片集成电路传感器，将差压传感器和流量传感器组合在相同的硅芯片上。 该集成电路具有一个膜片，多个压电元件以正常方式放置在压力传感器上。 此外，在隔膜的两侧的空间之间设置通道。 通道的横截面是隔膜尺寸的一小部分。 在一个实施例中，通道是隔膜中的孔。 在另一个实施例中，通道是支撑隔膜的框架中的蚀刻凹槽。
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10.发明授权Method for forming a bonded silicon-glass pressure sensor with strengthened corners 有权用于形成具有加强拐角的粘合硅玻璃压力传感器的方法
公开(公告)号：US6089099A
公开(公告)日：2000-07-18
申请号：US150198
申请日：1998-09-08
申请人： Abhijeet Sathe , Henry V. Allen
发明人： Abhijeet Sathe , Henry V. Allen
CPC分类号： G01L9/0042 , G01L19/0618 , G01L19/147
摘要： A unique backside mask for the backside of a silicon wafer which is to be diced in a rectangular shape to form a silicon pressure sensor. The backside mask is shaped to extend farther towards the center from portions adjacent to corners of the rectangular shape. In one embodiment, the mask has a cross-shape. The silicon is etched to form a diaphragm, with the corners etching more due to the silicon crystalline structure. This leaves corner regions which are less sloped compared to the sides of the cavity, being substantially vertical or even recessed. A glass substrate with a hole in it is then bonded to the backside to form the sensor.
摘要翻译： 用于硅晶片背面的独特背面掩模，其将被切割成矩形形状以形成硅压力传感器。 背面掩模成形为从与矩形形状的角部相邻的部分向中心延伸。 在一个实施例中，掩模具有十字形状。 蚀刻硅以形成隔膜，由于硅晶体结构，角部蚀刻更多。 这使得与空腔的侧面相比较小的倾斜区域基本上垂直或甚至凹陷。 然后将其中具有孔的玻璃基板粘合到背面以形成传感器。
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