公开(公告)号：US09534896B2

公开(公告)日：2017-01-03

申请号：US13851448

申请日：2013-03-27

Applicant: Honeywell International Inc.

Inventor： Michael S. Sutton ,  Mark W. Weber

IPC: G01C19/5621 ,  G01C19/5726 ,  G01C19/5614

CPC classification number: G01C19/5621 ,  G01C19/5614 ,  G01C19/5726

Abstract: Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.

Abstract translation: 本申请的实施例提供了一种用于操作微机电系统（MEMS）音叉陀螺仪的方法。 该方法包括在第一频率处的第一电压和第二电压之间的第一感测电极外的第一感测电极的外部和附近的第一检测质量的第一侧振荡电压。 该方法还包括在第一频率处的第一电压和第二电压之间的第一感测质量的第二侧和第二感测电极的第二侧附近振荡第二感测电极的电压，并且与第 第一感测电极上的电压。 该方法还包括通过首先从第一频率处的第一检测质量解调出平面外信号，并且相位地解调平面外信号，生成与第一证明质量块的旋转速率相对应的速率信号， 第一个检验质量的平面内运动。

公开(公告)号：US09476712B2

公开(公告)日：2016-10-25

申请号：US13956048

申请日：2013-07-31

Applicant: Honeywell International Inc.

Inventor： Timothy J. Hanson ,  Mark W. Weber ,  Max C. Glenn ,  Drew A. Karnick

IPC: G01C19/56 ,  G01C19/574 ,  G01C19/5783 ,  G01P15/08

CPC classification number: G01C19/574 ,  G01C19/5783 ,  G01P2015/0871 ,  Y10T29/49002

Abstract: A micro-electro-mechanical systems (MEMS) device comprises at least one proof mass configured to have a first voltage and a motor motion in a first horizontal direction. At least one sense plate is separated from the proof mass by a sense gap, with the sense plate having an inner surface facing the proof mass and a second voltage different than the first voltage. A set of stop structures are on the inner surface of the sense plate and are electrically isolated from the sense plate. The stop structures are configured to prevent contact of the inner surface of the sense plate with the proof mass in a vertical direction. The stop structures have substantially the same voltage as that of the proof mass, and are dimensioned to minimize energy exchange upon contact with the proof mass during a shock or acceleration event.

Abstract translation: 微机电系统（MEMS）装置包括配置成在第一水平方向具有第一电压和电机运动的至少一个检验质量块。 至少一个感测板通过感测间隙与检测质量分离，感测板具有面向校准质量块的内表面和与第一电压不同的第二电压。 一组停止结构位于感测板的内表面上并且与感测板电隔离。 止动结构被构造成防止感测板的内表面与检验块在垂直方向上的接触。 停止结构具有与证明质量块基本上相同的电压，并且其尺寸被设计成使得在冲击或加速事件期间与证明块接触时的能量交换最小化。

公开(公告)号：US20150253138A1

公开(公告)日：2015-09-10

申请号：US13851448

申请日：2013-03-27

Applicant: Honeywell International Inc.

Inventor： Michael S. Sutton ,  Mark W. Weber

IPC: G01C19/5621 ,  G01C19/5614

CPC classification number: G01C19/5621 ,  G01C19/5614 ,  G01C19/5726

Abstract: Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.

Abstract translation: 本申请的实施例提供了一种用于操作微机电系统（MEMS）音叉陀螺仪的方法。 该方法包括在第一频率处的第一电压和第二电压之间的第一感测电极外的第一感测电极的外部和附近的第一检测质量的第一侧振荡电压。 该方法还包括在第一频率处的第一电压和第二电压之间的第一感测质量的第二侧和第二感测电极的第二侧附近振荡第二感测电极的电压，并且与第 第一感测电极上的电压。 该方法还包括通过首先在第一频率解调来自第一检测质量的平面外信号并且将与平面外信号同步地解调的平面外信号与 第一个检验质量的平面内运动。

公开(公告)号：US09562767B2

公开(公告)日：2017-02-07

申请号：US14458029

申请日：2014-08-12

Applicant: Honeywell International Inc.

Inventor： Mark W. Weber ,  Dang Tu Van-Cao ,  Marie Annette Cox ,  Douglas Campbell MacGugan

IPC: G01C19/00 ,  G01C19/5712 ,  B81C1/00 ,  B81B7/02 ,  G01C19/5776

CPC classification number: G01C19/5712 ,  B81B7/02 ,  B81C1/00301 ,  B81C2203/0792 ,  G01C19/5776

Abstract: Systems and methods for improving MEMS gyroscope start time are provided. In one embodiment, a circuit board for a MEMS gyroscope system comprises: a proof mass assembly; a proof mass control loop coupled to the proof mass assembly by a first proof mass motion sensor pickup line and a second proof mass motion sensor pickup line, where the proof mass control loop generates a set of drive signals that operate the proof mass assembly using a first capacitive signal from the first proof mass motion sensor pickup line and a second capacitive signal from the second proof mass motion sensor pickup line; and a tunable capacitive coupler connected to at least one of the first or the second proof mass motion sensor pickup lines, where the tunable capacitive coupler varies at least one of the first and second charge signals as a function of the drive signals.

Abstract translation: 提供了改进MEMS陀螺仪启动时间的系统和方法。 在一个实施例中，用于MEMS陀螺仪系统的电路板包括：证明质量组件; 通过第一检测质量运动传感器拾取线和第二证明质量运动传感器拾取线耦合到证明质量组件的证明质量控制环路，其中证明质量控制环路产生一组驱动信号，该组驱动信号使用 来自第一检测质量运动传感器拾取线的第一电容信号和来自第二检测质量运动传感器拾取线的第二电容信号; 以及可调电容耦合器，其连接到第一或第二检验质量运动传感器拾取线中的至少一个，其中可调谐电容耦合器根据驱动信号改变第一和第二充电信号中的至少一个。

公开(公告)号：US20150007656A1

公开(公告)日：2015-01-08

申请号：US13936938

申请日：2013-07-08

Applicant: Honeywell International Inc.

Inventor： Mark W. Weber ,  Timothy J. Hanson

IPC: G01P15/08

CPC classification number: G01P15/08 ,  B81C1/00698 ,  G01P2015/0862 ,  G01P2015/0871 ,  G01P2015/0874

Abstract: A method of controlling exposed glass charging in a micro-electro-mechanical systems (MEMS) device is disclosed. The method includes providing a MEMS device comprising a proof mass positioned apart from at least one sense plate and at least one outboard metallization layer, wherein at least one conductive glass layer is coupled to the sense plate and the outboard metallization layer, the conductive glass layer including at least one exposed glass portion near the proof mass; and applying a first voltage to the sense plate and a second voltage to the outboard metallization layer. The first voltage is separated from the second voltage by a predetermined voltage level such that the exposed glass portion has an average voltage corresponding to a voltage midway between the first voltage and the second voltage.

Abstract translation: 公开了一种在微机电系统（MEMS）装置中控制暴露的玻璃充电的方法。 该方法包括提供MEMS器件，其包括与至少一个感测板和至少一个外侧金属化层隔开的检测质量块，其中至少一个导电玻璃层耦合到感测板和外侧金属化层，导电玻璃层 包括靠近证明物质的至少一个暴露的玻璃部分; 以及向所述感测板施加第一电压，并向所述外侧金属化层施加第二电压。 第一电压与第二电压分开预定的电压电平，使得暴露的玻璃部分具有对应于第一电压和第二电压之间的电压的平均电压。

公开(公告)号：US09568491B2

公开(公告)日：2017-02-14

申请号：US13936938

申请日：2013-07-08

Applicant: Honeywell International Inc.

Inventor： Mark W. Weber ,  Timothy J. Hanson

IPC: G01P15/08 ,  B81C1/00

CPC classification number: G01P15/08 ,  B81C1/00698 ,  G01P2015/0862 ,  G01P2015/0871 ,  G01P2015/0874

Abstract: A method of controlling exposed glass charging in a micro-electro-mechanical systems (MEMS) device is disclosed. The method includes providing a MEMS device comprising a proof mass positioned apart from at least one sense plate and at least one outboard metallization layer, wherein at least one conductive glass layer is coupled to the sense plate and the outboard metallization layer, the conductive glass layer including at least one exposed glass portion near the proof mass; and applying a first voltage to the sense plate and a second voltage to the outboard metallization layer. The first voltage is separated from the second voltage by a predetermined voltage level such that the exposed glass portion has an average voltage corresponding to a voltage midway between the first voltage and the second voltage.

Abstract translation: 公开了一种在微机电系统（MEMS）装置中控制暴露的玻璃充电的方法。 该方法包括提供MEMS器件，其包括与至少一个感测板和至少一个外侧金属化层隔开的检测质量块，其中至少一个导电玻璃层耦合到感测板和外侧金属化层，导电玻璃层 包括靠近证明物质的至少一个暴露的玻璃部分; 以及向所述感测板施加第一电压，并向所述外侧金属化层施加第二电压。 第一电压与第二电压分开预定的电压电平，使得暴露的玻璃部分具有对应于第一电压和第二电压之间的电压的平均电压。

公开(公告)号：US20160046485A1

公开(公告)日：2016-02-18

申请号：US14458029

申请日：2014-08-12

Applicant: Honeywell International Inc.

Inventor： Mark W. Weber ,  Dang Tu Van-Cao ,  Marie Annette Cox ,  Douglas Campbell MacGugan

IPC: B81C1/00 ,  B81B7/02 ,  G01C19/5712

CPC classification number: G01C19/5712 ,  B81B7/02 ,  B81C1/00301 ,  B81C2203/0792 ,  G01C19/5776

Abstract: Systems and methods for improving MEMS gyroscope start time are provided. In one embodiment, a circuit board for a MEMS gyroscope system comprises: a proof mass assembly; a proof mass control loop coupled to the proof mass assembly by a first proof mass motion sensor pickup line and a second proof mass motion sensor pickup line, where the proof mass control loop generates a set of drive signals that operate the proof mass assembly using a first capacitive signal from the first proof mass motion sensor pickup line and a second capacitive signal from the second proof mass motion sensor pickup line; and a tunable capacitive coupler connected to at least one of the first or the second proof mass motion sensor pickup lines, where the tunable capacitive coupler varies at least one of the first and second charge signals as a function of the drive signals.

Abstract translation: 提供了改进MEMS陀螺仪启动时间的系统和方法。 在一个实施例中，用于MEMS陀螺仪系统的电路板包括：证明质量组件; 通过第一检测质量运动传感器拾取线和第二证明质量运动传感器拾取线耦合到证明质量组件的证明质量控制环路，其中证明质量控制环路产生一组驱动信号，该组驱动信号使用 来自第一检测质量运动传感器拾取线的第一电容信号和来自第二检测质量运动传感器拾取线的第二电容信号; 以及可调电容耦合器，其连接到第一或第二检验质量运动传感器拾取线中的至少一个，其中可调谐电容耦合器根据驱动信号改变第一和第二充电信号中的至少一个。

公开(公告)号：US20150033849A1

公开(公告)日：2015-02-05

申请号：US13956048

申请日：2013-07-31

Applicant: Honeywell International Inc.

Inventor： Timothy J. Hanson ,  Mark W. Weber ,  Max C. Glenn ,  Drew A. Karnick

IPC: G01C19/56 ,  G01C25/00

CPC classification number: G01C19/574 ,  G01C19/5783 ,  G01P2015/0871 ,  Y10T29/49002

Abstract: A micro-electro-mechanical systems (MEMS) device comprises at least one proof mass configured to have a first voltage and a motor motion in a first horizontal direction. At least one sense plate is separated from the proof mass by a sense gap, with the sense plate having an inner surface facing the proof mass and a second voltage different than the first voltage. A set of stop structures are on the inner surface of the sense plate and are electrically isolated from the sense plate. The stop structures are configured to prevent contact of the inner surface of the sense plate with the proof mass in a vertical direction. The stop structures have substantially the same voltage as that of the proof mass, and are dimensioned to minimize energy exchange upon contact with the proof mass during a shock or acceleration event.

Abstract translation: 微机电系统（MEMS）装置包括配置成在第一水平方向具有第一电压和电机运动的至少一个检验质量块。 至少一个感测板通过感测间隙与检测质量分离，感测板具有面向校准质量块的内表面和与第一电压不同的第二电压。 一组停止结构位于感测板的内表面上并且与感测板电隔离。 止动结构被构造成防止感测板的内表面与检验块在垂直方向上的接触。 停止结构具有与证明质量块基本上相同的电压，并且其尺寸被设计成使得在冲击或加速事件期间与证明块接触时的能量交换最小化。